• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.198-201
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• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• Bulletin of the Korean Chemical Society
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• v.32 no.10
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• pp.3571-3574
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• 2011

Nano-scaled metal oxides have been attractive materials for sensors, photocatalysis, and dye-sensitization for solar cells. We report the controlled synthesis and characterization of single crystalline $TiO_2$ nanowires via a catalyst-assisted vapor-liquid-solid (VLS) and vapor-solid (VS) growth mechanism during TiO powder evaporation. Scanning electron microscope (SEM) and transmission electron microscope (TEM) studies show that as grown $TiO_2$ materials are one-dimensional (1D) nano-structures with a single crystalline rutile phase. Also, energy-dispersive X-ray (EDX) spectroscopy indicates the presence of both Ti and O with a Ti/O atomic ratio of 1 to 2. Various morphologies of single crystalline $TiO_2$ nano-structures are realized by controlling the growth temperature and flow rate of carrier gas. Large amount of reactant evaporated at high temperature and high flow rate is crucial to the morphology change of $TiO_2$ nanowire.

• Journal of the Korean Society of Industry Convergence
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• v.25 no.2_1
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• pp.169-176
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• 2022

Prognostics and health management (PHM) is recently converging throughout the industry, one of the trending issue is to detect abnormal conditions at decanter centrifuge during water treatment facilities. Wastewater treatment operation produces corrosive gas which results failures on attached sensors. This scenario causes frequent sensor replacement and requires highly qualified manager's visual inspection while replacing important parts such as bearings and screws. In this paper, we propose anomaly detection by measuring the vibration of the decanter centrifuge based on the video camera images. Measuring the vibration of the screw decanter by applying the optical flow technique, the amount of movement change of the corresponding pixel is measured and fed into the LST M model. As a result, it is possible to detect the normal/warning/dangerous state based on LSTM classification. In the future work, we aim to gather more abnormal data in order to increase the further accuracy so that it can be utilized in the field of industry.

• Journal of the Korea Society of Computer and Information
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• v.25 no.4
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• pp.19-27
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• 2020

In this paper, we propose a machine learning method for diagnosing the failure of a gas pressure regulator. Originally, when implementing a machine learning model for detecting abnormal operation of a facility, it is common to install sensors to collect data. However, failure of a gas pressure regulator can lead to fatal safety problems, so that installing an additional sensor on a gas pressure regulator is not simple. In this paper, we propose various machine learning approach for diagnosing the abnormal operation of a gas pressure regulator with only the flow rate and gas pressure data collected from a gas pressure regulator itself. Since the fault data of a gas pressure regulator is not enough, the model is trained in all classes by applying the over-sampling method. The classification model was implemented using Gradient boosting, 1D Convolutional Neural Networks, and LSTM algorithm, and gradient boosting model showed the best performance among classification models with 99.975% accuracy.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3319-3321
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• 1999

Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures, In the analysis of properties of Pt-RTD, TCR value had 3927 $ppm/^{\circ}C$ and liner in the temperature range of $25-400^{\circ}C$. The temperature of Pt micro-heater had up to $400^{\circ}C$ with 1.5watts of the heating power. In investigating output characteristics of flow sensors output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000sccm, heating power of 1.2W.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.7 no.6
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• pp.48-56
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• 2008

This study provides to car driver with car exhaust gas and sensor information which are car trouble code in engine and many sensors when the car has some problems. This is to provide car manager with many information of car sensors when we go to vehicle maintenance. For example, information of engine RPM, fuel system, intake air temperature, air flow sensors and oxygen sensors can provide to owner or garage, and also add to multimedia system for mp3 files and video files. This system consists of embedded linux system of low power while driving the car which uses OBD-II protocols and zigbee communication interface from CAN communication of car system to self-diagnosis embedded system of car. Finally, low power embedded system has a lot of application and OBD-II protocols for embedded linux system and CAN communication which get sensor informations of car control sensor system while driving the car.

• Transactions of the Korean Society of Automotive Engineers
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• v.23 no.5
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• pp.515-523
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• 2015

In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

• Journal of the Korean Society of Combustion
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• v.6 no.2
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• pp.65-70
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• 2001

To investigate statistics of flamelet in a turbulent premixed flame and to obtain components of their burning velocities in a vertical plane above a pipe-flow burner, the local motion of flamelets with respect to gas are measured by specially arranged diagnostics, composed of an electrostatic probe with four identical sensors and a two-color four-beam LDV system. With this technique, the three-dimensional local flame-front-velocity vector is measured by the electrostatic probe for the first time, and simultaneously the axial and radial components of the local gas-velocity vector in a vertical plane above the vertically oriented burner are measured by the LDV system. Two components of burning velocities of planar flamelets can be obtained from these results and are found to be distributed over different directions and to range in magnitude from nearly zero to a few times the planar, unstrained adiabatic laminar burning velocity measured in the unburnt gas. It may be concluded from these results that turbulence exerts measurable influences on flamelets and causes at least some of them to exhibit increased burning velocity.

• Journal of Sensor Science and Technology
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• v.16 no.3
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• pp.197-201
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• 2007

The magnetron reactive ion etching (RIE) characteristics of polycrystalline (poly) 3C-SiC grown on $SiO_{2}$/Si substrate by APCVD were investigated. Poly 3C-SiC was etched by $CHF_{3}$ gas, which can form a polymer as a function of side wall protective layers, with additive $O_{2}$ and Ar gases. Especially, it was performed in magnetron RIE, which can etch SiC at a lower ion energy than a commercial RIE system. Stable etching was achieved at 70 W and the poly 3C-SiC was undamaged. The etch rate could be controlled from $20\;{\AA}/min$ to $400\;{\AA}/min$ by the manipulation of gas flow rates, chamber pressure, RF power, and electrode gap. The best vertical structure was improved by the addition of 40 % $O_{2}$ and 16 % Ar with the $CHF_{3}$ reactive gas. Therefore, poly 3C-SiC etched by magnetron RIE can expect to be applied to M/NEMS applications.