• JSTS:Journal of Semiconductor Technology and Science
• /
• v.13 no.4
• /
• pp.395-401
• /
• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Journal of the Korean Society of Safety
• /
• v.38 no.2
• /
• pp.30-35
• /
• 2023

Acetone is a widely used Volatile Organic Compound (VOC) in industries and laboratories. However, acetone affects human health adversely and causes fires and explosions. Early acetone detection and improved personnel training in safety and emergency management are necessary to prevent acetone-related accidents. The multi-VOC acetone detectors used currently have a sensitivity and selectivity limit. In this study, we discovered that Pt-loaded iron oxide (a metal oxide semiconductor) conversely, has high detection and selectivity for very low-levels of acetone gas. The loaded Pt catalyzes the reaction between the sensing materials' surface and the oxygen molecules in the air; this optimizes acetone detection and can decrease acetone-related illnesses, fires and explosions.

• Transactions on Control, Automation and Systems Engineering
• /
• v.3 no.2
• /
• pp.89-94
• /
• 2001

This paper presents an approach to leak detection and location of gas pipelines based on a strong tracking filter(STF). The STF has strong robustness against model uncertainties, which will deteriorate the performance of the extended Kalman filter. Hence, much faster and more accurate leak detection and location has been obtained. Computer simulation results demonstrate the effective-ness of the proposed approach.

• Journal of The Korean Astronomical Society
• /
• v.37 no.5
• /
• pp.579-581
• /
• 2004

Recently, claims have been made of the detection of 'warm-hot' gas in the intergalactic medium. Kaastra et al. (2003) claimed detection of ${\~} 10^6$ K material in the Coma Cluster but studies by Arnaud et al. (2001), and our analysis of the Chandra observations of Coma (Vikhlinin et al. 2001), find no evidence for a $10^6$ K gas in the cluster. Finoguenov et al. (2003) claimed the detection of $3 {\times} 10^6$ gas slightly off-center from the Coma Cluster. However, our analysis of ROSAT data from this region shows no excess in this region. We propose an alternative explanation which resolves all these conflicting reports. A number of studies (e.g. Robertson et al., 2001) have shown that the local interstellar medium undergoes charge exchange with the solar wind. The resulting recombination spectrum shows lines of O VII and O VIII (Wargelin et al. 2004). Robertson & Cravens (2003) have .shown that as much as $25\%$ of the Galactic polar flux is heliospheric recombination radiation and that this component is highly variable. Sporadic heliospheric emission could account for all the claims of detections of 'warm-hot' gas and explain the conflicts cited above.

• Journal of Sensor Science and Technology
• /
• v.28 no.3
• /
• pp.139-145
• /
• 2019

Precautionary detection of chemical warfare agents (CWAs) has been an important global issue mainly owing to their toxicity. To achieve proper detection, many studies have been conducted to develop sensitive gas sensors for CWAs. In particular, metal-oxide semi-conductors (MOS) have been investigated as promising sensing materials owing to their abundance in nature and excellent sensitivity. In this review, we mainly focus on various MOS-based gas sensors that have been fabricated for the detection of two specific CWA simulants, 2-chloroethyl ethyl sulfide (2-CEES) and dimethyl methyl phosphonate (DMMP), which are simulants of sulfur mustard and sarin, respectively. In the case of 2-CEES, we mainly discuss $CdSnO_3-$ and ZnO-based sensors and their reaction mechanisms. In addition, a method to improve the selectivity of ZnO-based sensors is mentioned. Various sensors and their sensing mechanisms have been introduced for the detection of DMMP. As the reaction with DMMP may directly affect the sensing properties of MOS, this paper includes previous studies on its poisoning effect. Finally, promising sensing materials for both gases are proposed.

• Journal of the Korea Institute of Military Science and Technology
• /
• v.23 no.3
• /
• pp.302-309
• /
• 2020

Early-detection and monitoring of toxic chemical gas cloud with chemical detector is essential for reducing the number of casualties. Conventional method for chemical detection and reconnaissance has the limitation in approaching to chemically contaminated site and prompt understanding for the situation. Stand-off detector can detect and identify the chemical gas at a long distance but it cannot know exact distance and position. Chemical detection UAV is an emerging platform for its high mobility and operation safety. In this study, we have conducted chemical gas cloud detection with the stand-off chemical detector and the chemical detection UAV. DMMP vapor was generated in the area where the cloud can be detected through the field of view(FOV) of stand-off chemical detector. Monitoring the vapor cloud with standoff detector, the chemical detection UAV moved back and forth at the area DMMP vapor being generated to detect the chemical contamination. The hybrid detection system with standoff cloud detection and point detection by chemical sensors with UAV seems to be very efficient as a new concept of chemical detection.

• The Journal of the Korea institute of electronic communication sciences
• /
• v.17 no.6
• /
• pp.1226-1274
• /
• 2022

In this paper, we dealt with a safety helmet for detecting dangerous situations that focuses on falling accidents and gas leaks, which are the main causes of industrial accidents. the fall situation range was set through gravity acceleration measurement using an acceleration sensor, and as a result, a fall detection rate of 80% could be confirmed. .In addition, the dangerous gas concentration was measured through a gas sensor, and when a digital value of 188 or more was output through a serial monitor, it was determined as a gas dangerous situation, and a fall warning message and a gas warning message could be checked through a smart-phone application produced based on the app inventor program.

• Journal of Sensor Science and Technology
• /
• v.32 no.2
• /
• pp.75-81
• /
• 2023

The significance of gas sensors has been emphasized in various industries and applications, owing to the growing significance of environmental, social, and governance (ESG) management in corporate operations. In particular, the monitoring of hazardous gas leakages and detection of fugitive emissions have recently garnered significant attention across several industrial sectors. As industrial workplaces evolve to ensure the safety of their working environments and reduce greenhouse gas emissions, the demand for high-performance gas sensors in industrial sectors dealing with toxic substances is on the rise. However, conventional gas-sensing systems have limitations in monitoring fugitive gas leakages at both critical and subcritical concentrations in complex environments. To overcome these difficulties, recent studies in the field of gas sensors have employed techniques such as mobile robotic olfaction, remote optical sensing, chemical grid sensing, and remote acoustic sensing. This review highlights the significant progress made in various technologies that have enabled accurate and real-time mapping of gas distribution and localization of hazardous gas sources. These recent advancements in gas-sensing technology have shed light on the future role of gas-detection systems in industrial safety.

• Proceedings of the KIEE Conference
• /
• 1994.07b
• /
• pp.1298-1300
• /
• 1994

An ability of $NO_2$ gas detection has been investigated using dilithium phthalocyanine($Li_2Pc$) Langmuir-Blodgett (LB) films. It is a well-known gas sensitive material and has been manufactured under a surface pressure of 30mN/m. A status of deposited films was confirmed by UV-visible absorption spectrum, ellipsometry measurements and current-voltage characteristics. Gas-detection characteristics of the films were studied through an electrical conductivity, response time, recovery time, and reproducibility under 200 ppm of $NO_2$ gases.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.8 no.2
• /
• pp.41-49
• /
• 2000

To understand the signal fluctuation of a wide-range oxygen sensor installed at the exhaust confluence point, when a misfiring is triggered in a cylinder, the steady state and the transient response characteristics of the sensor to the flow of the misfired gas were investigated quantitatively. It was recognized that the steady state output voltage of the sensor increased higher when it contacted the misfired gas even though the fueling condition was the same as the normal combustion case and this characteristic enabled the application of the wide-range oxygen sensor for the misfire detection. The transient response was compared at different engine speeds and it was found that the response speed increased with the engine speed. The signal fluctuation was also estimated quantitatively, using these steady state and transient response of the sensor, and the estimated signal showed satisfactory correlation with the measurements.