• 센서학회지
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• 제22권3호
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• pp.219-222
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• 2013

The exhaled breath contains gases generated from human body. When disease occurs in the body, exhaled breath may include gas components released from disease metabolism. If we can find specific elements through analysis of the exhaled gases, this approach is an effective way to diagnose the disease. The lung function has a close relationship with exhalation. Exhaled gases from COPD (Chronic Obstructive Pulmonary Disease) patients can be analyzed by gas chromatography-mass spectroscopy (GC-MS) and a gas sensor system. The exhaled breath for healthy person and COPD patients had different components. Significantly more benzendicarboxylic acid was detected from COPD patients than in healthy persons. In addition, patients had a variety of decane. Phosphorous compounds with different isomers were detected from patients. The results obtained by gas sensor system were processed by PCA (Principal Component Analysis). The PCA results revealed distinct difference between the patients and healthy people.

• 한국산업정보학회:학술대회논문집
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• 한국산업정보학회 2002년도 춘계학술대회 논문집
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• pp.356-360
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• 2002

산업의 발달과 더불어 CO, $H_2$S, S $O_2$등에 의한 대기오염이 심각해져 가스중독의 위험성이 고조되었을 뿐만 아니라, 생활수준의 향상으로 부탄(C$_4$ $H_{10}$)이나 프로판(C$_3$ $H_{8}$) 등의 폭발성 탄화수소계 가스들의 수요가 급증하는 가운데 가스폭발의 위험성이 대두되고 있다. 이에 대한 방비책으로 고감도 가스센서의 개발 뿐만 아니라 가스센서를 응용한 가스검출 및 가스식별 시스템의 개발이 시급한 실정이다. 본 연구에서는 반도체식 가스센서의 선택도에 대한 문제점을 개선하는 동시에 단일 센서신호의 드리프트에 대한 영향을 최소화하기 위해 반도체식 가스센서 어레이를 구성하고, 이로부터 검지된 가스별 입력 패턴데이터를 신경 회로망(neural network)에 적용함으로써 가스의 종류를 선택적으로 인식할 수 있는 가스인식 시스템을 개발하고자 한다.다.

• 센서학회지
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• 제21권1호
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• pp.59-67
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• 2012

It was reported that the latest sensor technology allow an 65536 conductive polymer sensor array to be made with broad but overlapping selectivity to different families of chemicals emulating the characteristics found in biological olfaction. However, the supernumerary redundancy always accompanies great error and risk as well as an inordinate amount of computation time and local minima in signal processing, e.g. neural networks. In this paper, we propose a new method to reduce the number of sensor for analysis by reducing redundancy between sensors and by removing unstable sensors using the cosine similarity method and to decide on representative sensor using FCM(Fuzzy C-Means) algorithm. The representative sensors can be just used in analyzing. And, we introduce DWT(Discrete Wavelet Transform) for data compression in the time domain as preprocessing. Throughout experimental trials, we have done a comparative analysis between gas sensor data with and without reduced redundancy. The possibility and superiority of the proposed methods are confirmed through experiments.

• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 센서학회지
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• 제25권1호
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• pp.13-19
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• 2016

Nowadays, most major automobile manufacturers are very interested, and actively involved, in developing driver alcohol detection system for safety (DADSS) that serves to prevent driving under the influence. DADSS measures the blood alcohol concentration (BAC) from the driver's breath and limits the ignition of the engine of the vehicle if the BAC exceeds the reference value. In this study, to optimize the sensor array of the DADSS, we selected sensors by using three different methods, configured the sensor arrays, and then compared their performance. The Wilks' lambda, stepwise elimination and filter method (using a principal component) were used as the sensor selection methods [2,3]. We compared the performance of the arrays, by using the selectivity and sensitivity as criteria, and Sammon mapping for the analysis of the cluster type of each gas. The sensor array configured by using the stepwise elimination method exhibited the highest sensitivity and selectivity and yielded the best visual result after Sammon mapping.

• 한국가스학회지
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• 제10권2호
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• pp.61-67
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• 2006

폴리에틸렌(PE) 배관 전기융착부에 대하여 위상배열초음파기술을 이용하여 전기융착부에 대한 비파괴검사를 실시하였다. 사례 1은 직경 300 mm의 PE배관 전기융착부에 대하여 3.5 MHz 배열초음파 센서를 이용하여 건전성 평가를 실시하였으며 사례 2는 직경 350 mm 3개의 새들융착부에 대하여 건전성을 평가하였고 사례 3은 400 mm 전기융착부에 대하여 3.5 MHz 배열초음파 센서를 가지고 비파괴검사를 실시하였다. 그리고 검사한 결과를 절단시험 결과와 비교하였다. 사례 4는 도시가스의 공급압력이 300 kPa인 400 mm PE배관 전기융착부를 탐상하고 그 결과를 살펴보았다.

• 한국정보통신학회논문지
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• 제4권3호
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• pp.705-711
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• 2000

반도체 제조공정과 미세가공 기술을 이용하여 $300^{\circ}C$의 동작온도에서 약 60 mW의 전력소모를 갖는 산화물 반도체 박막 가스센서 어레이를 제조하였다. 멤브레인의 우수한 열적 절연은 $0.1\mum\; 두께의\; Si_3N_4와\; 1\mum$ 두께의 PSG의 이중 층에 의한 것으로, 각각 LPCVD(저압화학 기상증착)와 APCVD(대기압 화학 기상증착)에 의해 제조되었다. 센서 어레이의 4가지 산화물 반도체 박막 감지물질로는 1 wt.% Pd가 도핑된 $SnO_2,\; 6 we.% A1_2O_3$가 도핑된 ZnO, $WO_3$, ZnO를 이용하였으며,4가지 감지물질의 베이스라인 저항은 $300^{\circ}C$ 에서 3일 동안의 에이징을 거친 후 안정됨을 보였다. 제조된 초소형 산화물 반도체 박막 가스센서 어레이는 여러 가지 가스의 노출 시 유용한 저항 변화를 나타내었으며 감도는 감지 물질에 강하게 의존함을 알 수 있었다.

• 한국정보통신학회논문지
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• 제6권2호
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• pp.315-322
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• 2002

반도체 제조공정과 미세가공 기술을 이용하여 30$0^{\circ}C$의 동작온도에서 약 60㎽의 전력소모를 갖는 산화물 반도체 박막 가스센서 어레이를 제조하였다. 멤브레인의 우수한 열적 절연은 0.1$\mu\textrm{m}$ 두께의 Si$_3$N$_4$와 1$\mu\textrm{m}$ 두께의 PSG의 이중 층에 의한 것으로, 각각 LPCVD(저압화학 기상증착)와 APCVD(대기압 화학 기상증착)에 의해 제조되었다. 센서 어레이의 4가지 산화물 반도체 박막 감지물질로는 1wt.%Pd가 도핑된 SnO$_2$, 6wt.% $Al_2$O$_3$가 도핑된 ZnO, WO$_3$, ZnO를 이용하였으며, 제조된 초소형 산화물 반도체 박막 가스센서 어레이는 여러 가지 가스의 노출시 유용한 저항 변화를 나타내었고 감도는 감지 물질에 강하게 의존함을 알 수 있었다. 센서 소자의 공정 수율을 증진시키기 위하여 히터 부위를 함몰하는 공정 방법을 취하였으며, 그 결과 월등한 수율 개선을 도모할 수 있었다.

• 센서학회지
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• 제14권5호
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• 센서학회지
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• 제14권3호
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• pp.186-190
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• 2005

This paper describes the development of a surface acoustic wave gas sensor that is designed to detect volatile gas by monitering phase change of output signal as a function of time. The sensor consists of SAW oscillators with a center frequency of 100 MHz fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, are presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.