Effect of discharge power and pressure in deposition of diamond thin films by MWPECVD (MWPECVD법에 의한 Diamond박막 성장에 있어서 방전전력과 압력의 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1992.11a
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- pp.132-135
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- 1992