• JSTS:Journal of Semiconductor Technology and Science
• /
• 제5권1호
• /
• pp.30-37
• /
• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
• /
• pp.35-39
• /
• 2002

아몰퍼스 자성와이어를 센서헤드로 이용한 금속 구조체의 미세결함 검사에 대해 검토하였다. 측정 방법은 스파이럴 코일의 균일 자장범위에 직선 갭을 가진 동판을 놓고 갭 주위를 관통하는 자속량의 차이를 센서헤드의 유기전압으로 측정하는 것이다. 이 결과 두께 1mm, 갭폭 0.5mm의 동판에 대해 100kHz~600kHz의 주라수 범위에 있어서 갭 근방에서 약 2.5mV의 전압차가 얻어져 결함의 유무를 확인할 수 있었다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2006년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
• /
• pp.310-312
• /
• 2006

Maglev using EMS becomes unstable by unexpected big air-gap disturbance. The main causes of the unexpected air-gap disturbance are step-wise rail joint and large distance between rail splices. For the stable operation of the Maglev, the conventional system uses the threshold method, which selects one gap sensor among two gap sensors installed on the magnet to read the gap between magnet and guide rail. But the threshold method with a wide bandwidth makes the discontinuous air-gap signal at the rail joints because of the offset in air gap sensors and/or the step-wise rail joins. Further more, in the case of the one with a narrow bend-width, it makes Maglev system unstable because of frequent alternation. In this paper, a new method using fuzzy rule to reduce air-gap disturbances proposed to improve the stability of Maglev system. It treats the air-gap signal from dual gap sensors effectively to make continuous signal without air gap disturbance. Simulation and experiment results proved that the proposed scheme was effective to reduce air-gap disturbance from dual gap sensors in rail joints.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
• /
• 제51권6호
• /
• pp.307-312
• /
• 2002

Inter-turn short circuits can have significant effects on a generator and its performance. The Inter-turn short circuits sensor for synchronous generator's field winding has been developed. The sensor, installed in the generator air-gap, senses the slot leakage flux of field winding and produces a voltage waveform proportional to the rate of change of the flux. For identification of reliability for sensor, a shorted- turn test was performed at the Seoinchon combined cycle power plant on gas turbine generator and stim turbine generator. This sensor will be used as a detecting of Inter-turn short circuits for synchronous generator's field winding.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.207-211
• /
• 2004

The performance of an inductive position sensor has approved by previous research papers. In this paper, magnetic circuit model of a ring-type multi-pole insuctive position sensor is described. The magnetic circuit model is required to design in ductive position sensor as well as draw a fault tolerance algorithm. Using the magnetic circuit theory, we derived the relationship between voltage applied and flux density in the normal air-gap. By idealizing the modulation/demodulation processes of signal processing circuit, sensor gain with respect to change of displacement is theoretically calculation using the magnetic circuit model, which validate the theoretical derivation.

• 한국정밀공학회지
• /
• 제21권4호
• /
• pp.72-78
• /
• 2004

In this paper, a development of an inductive position sensor is described. The sensor is similar to a radial magnetic bearing in that the sensor stator is shaped like a heteropolar magnetic bearing and is driven by a switching amplifier. A demodulation filter extracts the gap information from the switching current ripples. A prototype sensor exhibits the resolution of $0.43\mum$ and the dynamic bandwidth of about 800Hz. The dynamic performance can be improved by increasing the switching frequency. However, the eddy current effects become noticeable at high switching frequency, thus limiting the improvement of the bandwidth.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 추계학술대회 논문집
• /
• pp.987-992
• /
• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle systems. The main goal of our research is to develop technology for producing high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is being developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. This paper describes the selection process of the sensor types and the design of the driving circuit. We also report the experimental results that characterize the static and dynamic performances of the inductive sensor.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
• /
• 제55권9호
• /
• pp.443-448
• /
• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2001년도 ICCAS
• /
• pp.128.5-128
• /
• 2001

This paper presents investigation of an arc force sensor for a robotic welding control system. Arc force sensor is employed in this research to monitor the bead geometry of the arc welding process. Arc force sensor mounted at the end of the robot wrist was employed to measure the arc force applied to the weld. Experimental configuration for measurement of arc force was used to quantify the changes in the arc force distributions of the plate being welded. A relationship between the bead dimension and the arc force distributions was established. The sensor information was used to establish a relationship between welding current and arc force. Arc force sensor have shown to be one of the most sophisticated technique to monitor perturbations that occurred during robotic arc welding process.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
• /
• pp.61-65
• /
• 2003

A magnetic field sensor is fabricated with superconducting ceramics system The prepared material shows the superconductivity at about 95K. The sensor at liquid nitrogen temperature shows the increase in electrical resistance by applying magnetic field. Actually, the voltage drop across the sensor is changed from zero to a value more than $100{\mu}V$ by the applied magnetic field. The change in electrical resistance depends on magnetic field. The sensitivity of this sensor is 2.9 ohm/T. The increase in electrical resistance by the magnetic field is ascribed to a modification of the Josephson junctions due to the penetrating magnetic flux into the superconducting material.