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Development of an Inductive Position Sensor Using Magnetic Bearing Technology  

노명규 (충남대학교 메카트로닉스공학과)
박병철 (충남대학교 대학원 메카트로닉스공학과)
노승국 (한국기계연구원 지능형정밀기계연구부)
경진호 (한국기계연구원 지능형정밀기계연구부)
박종권 (한국기계연구원 지능형정밀기계연구부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.4, 2004 , pp. 72-78 More about this Journal
Abstract
In this paper, a development of an inductive position sensor is described. The sensor is similar to a radial magnetic bearing in that the sensor stator is shaped like a heteropolar magnetic bearing and is driven by a switching amplifier. A demodulation filter extracts the gap information from the switching current ripples. A prototype sensor exhibits the resolution of $0.43\mum$ and the dynamic bandwidth of about 800Hz. The dynamic performance can be improved by increasing the switching frequency. However, the eddy current effects become noticeable at high switching frequency, thus limiting the improvement of the bandwidth.
Keywords
Inductive Position Sensor; Hysteresis; Eddy Currents;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Noh, M. D. and Maslen, E. H. 'Self Sensing Active Magnetic Bearings Based on Parameter Estimation,' IEEE Transactions on Instrumentation and Measurement, Vol. 46, pp. 45-50, February ,1997   DOI   ScienceOn
2 Noh, M, 'A Model of Magnetic Bearings Considering Eddy Currents and Hysteresis,' International Journal of KSPE, Vol. 4, No. 3, pp. 5-11, May, 2003   과학기술학회마을
3 Choi, D., Choi, I.M., Kim, S.H, 'An Inductive Micro Position Sensing System and Analysis of its Response Characteristics,' J. of KSPE, Vol. 18, No. 3, pp. 189-194, March 2001   과학기술학회마을
4 Okada, Y., Matsuda, K. and Nagai, B., 'Sensorless magnetic levitation control by measuring the PWM carrier frequency component,' in Proceedings of the Third International Symposium on Magnetic Bearings, 1992
5 Noh, M. D., 'Self-Sensing Magnetic Bearings Driven by a Switching Power Amplifier,' Ph. D. Thesis, The University of Virginia, 1996