• Title/Summary/Keyword: Gap Sensor

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Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement (집중 소자를 이용한 표면 탄성파 장치 기반의 용량 성 센서 보정 및 이를 이용한 초정밀 간극 측정)

  • Kim, Jae-Geun;Ko, Byung-Han;Park, Young-Pil;Park, No-Cheol
    • Transactions of the Society of Information Storage Systems
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    • v.8 no.1
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    • pp.16-21
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    • 2012
  • SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

Shape Design Optimization of Inductive Position Sensor to Improve Sensitivity (유도형 변위 센서의 민감도 향상을 위한 형상 최적 설계)

  • 홍준희;이동주;신우철
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.10a
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    • pp.250-254
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    • 2001
  • The resolution of analog sensor is determined by its sensitivity and amplitude of noise. This paper presents modeling of inductive gap sensor base on equivalent magnetic circuit and analysis of sensitivity. We can simulate static characteristic of inductive gap sensor using this model. Computer simulation show that sensor's sensitivity is affected by magnetic flux's leakage and fringing, and that they are affected by shape of sensor probe. Base on this, we designed shape of inductive position sensor probe.

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A Development of Eddy Current Sensor System for An Axial-flow type Blood Pump with The Magnetic Bearing (축류형 인공심장의 자기베어링 제어를 위한 와전류 센서 시스템 개발)

  • Ahn, C.B.;Moon, K.C.;Jeong, G.S.;Nam, K.W.;Lee, J.J.;Sun, K.
    • Journal of Biomedical Engineering Research
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    • v.28 no.2
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    • pp.310-315
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    • 2007
  • The axial-flow type blood pump(XVAD) which has been developed in our group consists of mechanical parts (an impeller, a diffuser and a flow straightener) and electrical parts (a motor and a magnetic bearing). The magnetic bearing system fully levitates the impeller to remove mechanical coupling with other parts of the pump with constant gap, which needs non-contact type gap sensing. Conventional gap sensors are too large to be adopted to the implantable axial -flow type blood pump. Thus, in this paper, the compact eddy current type gap sensor system proper for the implantable axial-flow type blood pump was developed and its performance was evaluated in vitro. The developed eddy current type gap sensor system is a transformer type and has a differential probe. Sensor coil(probe) has small dimensions(6 mm diameter, 2 mm thickness) and its optimal inductance was determined as 0.068 mH for the measurement range of $0\sim3mm$. It could be manufactured with 130 turns of the 0.04 mm diameter copper coil. The characteristics of the developed eddy current type gap sensor system was evaluated by in vitro experiment. At experiment, it showed satis(actory performance to apply to the magnetic bearing system of the XVAD. It could measure the gap up to 3mm, but the linearity was decreased at the range of $1.8\sim3.0mm$. Moreover, it showed no difference in different media such as the water and the blood at the temperature range of $35\sim40^{\circ}C$.

Stage System for LCD Exposure Equipment Using Touch-type Displacement Sensor (접촉형 변위센서를 이용한 LCD노광기용 스테이지 시스템)

  • Yim, Kwang-Kuk;Seo, Hwa-Il;Cho, Hyun-Chan;Kim, Kwang-Sun;Kang, Heung-Seok
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1 s.18
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    • pp.7-10
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    • 2007
  • In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

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The Implementation of high temperature displacement sensors and sensors drive system for Air-preheater (공기예열기를 위한 고온용 변위센서 및 센서드라이브 시스템 구현)

  • Cho, Hyang-Duck;Kim, Woo-Shik
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.04a
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    • pp.453-458
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    • 2011
  • Air preheater uses the waste heat of the gas which burnt from the boiler from the thermal power plant. Air preheater it is established in the exit of the boiler follows in change of temperature combustion gas and the vibration which it follows in thermal expansion and contraction occurs. Air preheater with ruse the gas the seal the place where it includes a gap in the structure which it does, the vibration which it follows in change of temperature fluctuates the displacement of gap, fluctuation of the leakage quantity which occurs from gap there is a possibility of decreasing an effect to system. Part system it will be able to control the interval of gap in order, control mechanism about under establishing the place where it does the gap control actively, measures a gap the displacement sensor for is necessary. Like this displacement sensor the condition must do continuous running from atmosphere of high temperature was demanded all. This paper investigates the implementation instance of hazard existing which implement the high temperature displacement sensor, it analyzes, produces the result which it examines a model, it was a presentation. These results with the fact that it will contribute in the research for the implementation and a localization of the high temperature displacement sensor and advanced air preheater.

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AN EFFICIENT SENEOR ARRAY FOR A LATFE-GAP MAGNETIC LEVITATION SYSTEM

  • Na, Seung-You;Shin, Dae-Jung
    • 제어로봇시스템학회:학술대회논문집
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    • 1995.10a
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    • pp.154-157
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    • 1995
  • A magnetic levitation control system is nonlinear and very unstable. Thus there should be a stabilizing compensation network and a feedback path. Due to the levitation control a noncontact photoresistor sensor is generally used. One photocell provides a certain amount of variation in length by the ball shadow casted on the cell surface. Furthermore at the boundary of the cell, the linearity of sensitivity deteriorates severely. To overcome the constraints of the length and linearity, an efficient sensor array is deviced and applied in the feedback path of a large-gap magnetic levitation control system. A number of CdS photocells and a summing circuit of the sensor output signals are used for a sensor array. The levitation length of a ball and the transient performances are main objectives of the large-gap suspension system using the sensor array.

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Digital Control of an Electromagnetic Levitation System (자기부상 시스템의 디지털 제어)

  • 이승욱;이건복
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.9
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    • pp.2312-2321
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    • 1994
  • In this work the dynamics of an electromagnetic levitation system is described by a set of three first order nonlinear ordinary differential equations. The objective is to design a digital linear controller which takes the inherent instability of the uncontrolled system and the disturbing force into consideration. The controller is made by employing digital linear quadratic(LQ) design methodology and the unknown state variables are estimated by the kalman filter. The state estimation is performed using not only an air gap sensor but also both an air gap sensor and a piezoelectric accelerometer. The design scheme resulted in a digital linear controller having good stability and performance robustness in spite of various modelling errors. In case of using both a gap sensor and an accelerometer for the state estimation, the control input was rather stable than that in a system with gap sensor only and the controller dealt with the disturbing force more effectively.

A Study on Development of Automatic Weld-Seam Tracking System using Vision Sensor (시각센서를 이용한 용접선 자동추적시스템의 개발에 관한 연구)

  • 배강열;이지형
    • Journal of Welding and Joining
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    • v.14 no.4
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    • pp.79-88
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    • 1996
  • For improvement in productivity and weld quality, weld seam tracking and welding parameter control are very essential in the welding of a structure which can not be cxactly fit-up due to mismatch, discontinous gap, deflection, etc.. In this study, an automatic weld seam tracking system is developed for I-butt joint structure, and the system consists of XYZ working table, vision sensor and user interface program. In the developed vision sensor system, an image projection algorithm for weld-line detection and an adaptive current control algorithm for gap variation were implemented. The user interface program developed in this study by basing on the objct oriented concept could provide very convenient way to utilize the tracking system with the pull-down menu driven structure. The developed system showed a good seam tracking and weld quality control capability corresponding to deflected weld lines and gap variations.

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Effect of the Sensor Location on Magnetocardiography (심자도 센서의 위치 효과에 대한 연구)

  • Lim, Hyun-Kyoon;Kim, Ki-Woong;Kwon, Hyuk-Chan;Lee, Yong-Ho
    • Progress in Superconductivity
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    • v.10 no.1
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    • pp.1-5
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    • 2008
  • Magnetocardiography (MCG) is a non-contact, non-invasive, and harmless diagnostic tool to detect the abnormal electrical conductivities of the heart caused by the various coronary artery disease or cardiac muscular disease. The purpose of this study is to identify whether MCG signals and MCG parameter values vary depending on the location of sensor assembly. It will be an important reference for the standard measurement. Four healthy male subjects (33.3$\pm$6.3 years) participated in this study. Basal recording was made at 20 mm apart from the chest surface. All subjects were requested to take a regular breathe while MCG was taken. The gap between the chest surface and the bottom of the sensor assembly was 20, 40, 60, and 80 mm. Recording was made using 64 channel MCG system (Axial type, first order gradiometer) developed by Korea Research Institute of Standards and Science (KRISS). After resting for two minutes in a supine position on the bed in magnetically shielded room, MCG were recorded for 30 s. As the sensor location is getting away from the chest surface signal, the amplitude of R and T wave peak decreases to 70% (at 40 mm gap), 50% (at 60 mm), and 37% (at 80 mm) of the reference strength measured (y = $1.3903e^{-0.0169x}$, $R^2$ = 0.99; where y=amplitude remained after reduction, x=distance between chest surface and sensor location). The regression equations may be used as a good reference to calculate how much strength will be decreased by the distance. In MCG parameters, most values of parameters were decreased as the gap was increased. As an example, the current moment at T-wave peak reduced to 52% (at 40 mm gap), 33% (at 60 mm), and 19% (at 80 mm). However, the difference caused by the gap could be reduced by considering the distance when the MCG parameters were calculated. The study results can be used as a useful reference to design the baseline and the sensor location.

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NUMERICAL INVESTIGATION ON BOTTOM GAP OF MICRO FLOW SENSOR

  • Abdullahl Mohd Zulkiefly;Kouta T;Kamijo Takuma;Yamamoto Makoto;Honami Shinji;Kamiunten Shoji
    • Journal of computational fluids engineering
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    • v.10 no.1
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    • pp.73-79
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    • 2005
  • Micro sensor is very useful for flow measurements in a number of engineering applications. Especially, it is necessary for the development of MEMS. This paper presents the 3D numerical simulation of flows around a micro flow sensor, which is mounted on a flat plate. The effects of the sensor configuration (i.e. bottom gap) and the Reynolds number on the flow field are numerically investigated. The numerical results indicate that the bottom gap clearly affects the flow fields over the top surface of the sensor. The Reynolds numbers also show a significant influence on the flow nature, especially on the recirculation zone at downstream of the sensor. The present results illustrate a certain improvement on the flow field for the sensor installed at O.5mm above the wall with four pillars, comparing with that directly mounted on the wall.