• Proceedings of the KSME Conference
• /
• 2008.11a
• /
• pp.1880-1884
• /
• 2008

Cleaning is required following CMP (chemical mechanical planarization) to remove particles. The minimization of particle residue is required with each successive technology generation, and the cleaning of wafers becomes more complicated. In copper damascene process for interconnection structure, it utilizes 2-steop CMP consists of Cu CMP and barrier CMP. Such a 2-steps CMP process leaves a lot of abrasive particles on the wafer surface, cleaning is required to remove abrasive particles. In this study, the buffing is performed various conditions as a cleaning process. The buffing process combined mechanical cleaning by friction between a wafer and a buffing pad and chemical cleaning by buffing solution consists of tetramethyl ammonium hydroxide (TMAH)/benzotriazole(BTA).

• Proceedings of the KSME Conference
• /
• 2008.11a
• /
• pp.127-131
• /
• 2008

In the disk braking of the railway trains, kinetic energy of the vehicles is converted into thermal energy by friction between a brake disk and the pad materials. This can be cause of the iterative thermal shock and generates thermal cracks on the brake disk surface. In this study, we show the comparative thermal fatigue test procedures and thermal crack analysis process to evaluate the thermal fatigue characteristics of candidate materials designed for development of heat-resistant brake disk material. We carried out tests on the conventional brake disk materials used for Saemaul and Mugunghwa trains, then we comparatively analyzed the thermal crack initiation and propagation on the surface of a specimen. A thermal fatigue test procedure and a crack analysis process were suggested to evaluate the heat resistance of the developed materials at later studies.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.8 no.4
• /
• pp.34-40
• /
• 2009

The effect of frictional factors on thermal stress and deformation volume of motorcycle brake disk was studied by using a disk-on-pad type friction tester. It has an effect on the frictional factor such as applied load, sliding speed, sliding distance and number of ventilated disk hole. However, it is difficult to know the mutual relation of these factors. In this study, thermal stress and deformation volume by using design of experiment with 4 elements were investigated for thermal analysis with regression analysis. Thermal stress and thermal deformation are obtained by the application of temperature from mechanical test. From this study, the result showed that the motorcycle brake disk with ventilated hole 3 had the most excellent thermal stress and deformation volume. The regression equation had a trust rate of 95% for the prediction of thermal stress and deformation volume of motorcycle brake disk was composed.

• Tribology and Lubricants
• /
• v.24 no.6
• /
• pp.308-314
• /
• 2008

The thermal stress have an effect on the frictional factor such as applied load, sliding speed, sliding distance and number of ventilated disk hole. However, it is difficult to know the mutual relation of these factors on thermal stress of motorcycle break disk. For this, temperature of motorcycle break disk is measured using a disk-on-pad type friction tester with full factorial design containing above 4 elements. and the thermal stress analysis of it was carried out using with ANSYS workbench. From this study, the result was shown that the regression equation which have a trust rate of 95% for thermal stress presumption of motorcycle break disk with frictional factor was composed. It is possible to apply for another automobile parts.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.24 no.12
• /
• pp.954-961
• /
• 2014

Brake squeal noise of KTX is very uncomfortable to passengers and workers in stations. A lot of study has been conducted to inquire into the mechanism of the squeal noise. But understanding of the brake squeal noise is still challenging. In this study, we developed a full-scale tester equipped with a KTX mechanical brake unit. And we measured the vibrational characteristics of each component of the brake unit and compared them with frequency response functions of brake squeal noise measured also in the tester. It was found that the brake squeal noise was more closely related to the vibrational characteristics of the brake pads and hangers in friction condition than those of free components.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2003.05a
• /
• pp.313-318
• /
• 2003

The vibration of washing machine at spinning cycle is important problem that affects the performance of a product. In this raper, the inner structure of the washing machine is modeled as a rigid body suspension system and transfer farce caused by rotating unbalance mass is obtained using Newton's the 2nd law. and this model is used to predict the verge of walking instability during the spinning cycle. The walk of the drum washing machine is suggested by calculating the force transmissibility between drum and the cabinet. As calculating the resultant force exerted for cabinet, the friction coefficient of the pad is suggested to avoid the walk. In addition, relation between translational slip and rotational slip is derived and method to avoid the rotational slip is introduced.

• Proceedings of the KSR Conference
• /
• 2002.10b
• /
• pp.820-825
• /
• 2002

As the speed of rail transit is higher, it is very important to secure the safety and confidence of the braking device and in the point of view, by means of the rise of the temperature from the friction between the disk and pad which are the actual part of a braking system, the damage of brake disk is the main cause to lose the safety of braking device. Therefore, in this study, to predict the danger of a disk brake and to know its max. temperature in the train service the module of a temperature measurement by the non-contact method was developed.

• Journal of the Earthquake Engineering Society of Korea
• /
• v.20 no.5
• /
• pp.319-329
• /
• 2016

The Eradi Quake System (EQS) is a seismic isolation bearing system designed to minimize forces and displacements experienced by structures subjected to ground motion. The EQS dissipates seismic energy through friction of Poly Tetra Fluoro Ethylene (PTFE) disk pad. In general, a force-displacement relationship of EQS has post yield stiffness hardening during large inelastic displacement. In this study, seismic responses of seismically isolated nuclear power plant (NPP) subjected to design basis earthquake (DBE) and beyond design basis earthquakes (150% DBE and 167% DBE) are compared considering the post yield stiffness hardening effect of EQS. From the results, it can be observed that if the post-yield stiffness hardening effect of EQS is increased, the displacement response of EQS is reduced, and the acceleration and shear responses of containment structures of NPP is increased.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.11 no.1
• /
• pp.137-142
• /
• 2003

In automotive brake systems, the frictional heat generated can cause high temperature at the interface of rotor and pad which may deteriorate the material properties of the sliding parts and can result in brake fade. Conventionally, a pie-shaped 3-dimentional model is adopted to calculate temperature of ventilated disk using finite element method. To overcome the difficulties in preparing 3D finite element model and reduce the computational time required, the ventilated rotor is to be analyzed, in this study, as an axisymmetric finite element model in which, taking into considerations the effects of cooling passages, a homogenization technique is used to obtain the equivalent thermal properties and boundary conditions for the elements placed at the vent holes. Numerical tests show the proposed procedure can be successfully applied in practice, replacing 3-dimensional thermal analysis of ventilated disk.

• Journal of Mechanical Science and Technology
• /
• v.20 no.10
• /
• pp.1590-1606
• /
• 2006

Slider bearings are widely applied in mechanical systems, where the design needs cover increased load capacity, lowered friction and power consumption and creative designs. This work is governed to perform a parametric characterization, by generating a novel structure on the upper slider surface, which can formally be expressed in micro-machined wavy-form, where the individual and combined influences of various structural design parameters and boundary conditions, on the performance records, are also evaluated. Computations put forward that the contribution of the wave amplitude on power loss values is highly dependent on the level of inlet pressure; higher amplitudes are determined to increase power loss in the lowest inlet pressure case of 1.01, whereas the contrary outcome is determined in the higher inlet pressure cases of 3.01 & 5.01. Designing the slider bearing system, based on optimal load capacity, produced the optimum wave number ranges as 10-45, 7-11 and 5-8 for the pad inclinations of $5^{\circ},\;4^{\circ}$ and $3^{\circ}$ respectively.