• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.622-625
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• 2004

The CMP monitoring system was newly developed by the aid of friction force measurement, resulting from installation of piezoelectric quartz sensor on R&D polisher. The correlation between friction and CMP results was investigated in terms of tribological aspects by using the monitoring system. Various friction signals were monitored and analyzed by the change of experimental conditions such as pressure, velocity, pad and slurry. First of all, the lubrication regimes were classified with Sommerfeld Number through measuring coefficient of friction in ILD CMP. And then, the removal mechanism of abrasives could be understood through the correlation with removal rate and coefficient of friction. Especially, the amount of material removal per unit sliding distance is directly proportional to the friction force. The uniformity of CMP performances was also deteriorated as coefficient of friction increased.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.313-320
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.653-654
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

• Design & Manufacturing
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• v.17 no.4
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• pp.8-13
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• 2023

In this study, it was studied whether a new measurement factor "frictional vibration" that occurs due to the material flow of the die and sheet metal in the flange area during deep drawing process, could be measured using an vibration sensor. The blank holder force acting on the flange area during drawing processing acts as a friction force in the opposite direction into which the sheet material flows and causes friction vibration. As the blank holder force increases, the friction force increases, and as the blank holder force decreases, the friction force also decreases. Because of this, friction vibration also increases and decreases in proportion to the size of the blank holder force. According to this theory, whether frictional vibration occurs was measured using a flange simulator and a vibration sensor. The initial pressure was created using a torque wrench, and it was confirmed that the amplitude increased by about 4 times when torque 6 Nm was increased. When the forming velocity was rapidly changed to 300 mm/min, the amplitude increased approximately 4 times. It was confirmed that the amplitude of frictional vibration according to the measurement location was greater the further away from the specimen. It was verified that a new measurement factor "friction vibration" in the flange area can be measured and used for online monitoring.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.1 s.94
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• pp.219-225
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• 1999

Monitoring of the cutting force signals in cutting process has been well emphasized in machine tool communities. Although the cutting force can be directly measured by a tool dynamometer, this method is not always feasible because of high cost and limitations in setup. In this paper an indirect cutting force monitoring system is developed so that the cutting force in turning process is estimated based on a AC spindle drive model. This monitoring system considers the cutting force as a disturbance input to the spindle drive and estimates the cutting force based on the inverse dynamic model. The inverse dynamic model represents the dynamic relation between the cutting force, the motor torque and the motor power. The proposed monitoring system is realized on a CNC lathe and its estimation performance is evaluated experimentally.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.11-15
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• 1999

Monitoring of the cutting force signals in cutting process has been well emphasized in machine tool communities. Although the cutting force can be directly measured by a tool dynamometer, this method is not always feasible because of high cost and limitations in setup. In this paper an indirect cutting force monitoring system is developed so that the cutting force in turning process is estimated based on a AC spindle drive model. This monitoring system considers the cutting force as a disturbance input to the spindle drive and estimates the cutting force based on the inverse dynamic model. The inverse dynamic model represents the dynamic relation between the cutting force, the motor torque and the motor power. The proposed monitoring system is realized on a CNC lathe and its estimation performance is evaluated experimentally.

• International Journal of Highway Engineering
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• v.14 no.3
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• pp.41-48
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• 2012

In this study the negative skin friction test of foundation pile was performed in order to monitor the negative skin frictional force acting on the steel pipe pile installed in soft soil. The monitored frictional stresses obtained from the long-term loading test. Through the long-term frictional stress monitoring test, the economical period for the construction of the superstructure was determined. The following conclusion were derived from this study: (1) In soft soil, negative skin friction increases with the increase in the rate of settlement. (2) In the friction relationship graph, the period where there is no frictional strain increase is verified and the time for the construction of the superstructure is determined. (3) The pile loading test was performed and the negative skin friction was compared with the test results. It was determined that the negative skin friction after driving was larger than the negative skin friction obtained from the loading test. 15 days after the construction, the monitored value was similar with the theoretical data. (4) It was determined that even during the occurrence of negative skin friction an economical construction management can be performed using the long-term monitoring method of negative skin friction.

• Composites Research
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• v.27 no.1
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• pp.31-36
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• 2014

This paper presents the slip behavior of composite fabrics by high speed resin flow in high pressure resin transfer molding. In order to observe the fiber deformation behavior, we constructed the measuring equipment for friction coefficient between fiber and mold, and the monitoring system for deformation of fiber preform in high-pressure RTM process. Coulomb friction coefficient and hydrodynamic friction coefficient between fiber preform and mold were measured and the external force induced by fluid flow causing the deformation of fiber preform was measured. Friction force calculated by friction coefficient and the external force upon fiber deformation were compared, which showed that preform deformation occurred when the external force was bigger than the friction force. The slip behavior of the fiber preform was mainly influenced by the volume fraction of fiber preform and the friction coefficient.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.479-480
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• 2006

The purpose of this paper is to investigate the relationship between CMP(Chemical Mechanical Polishing) characteristics of ITO thin film and friction signal by using the CMP monitoring system. Suba 400 pad and MSW2000 slurry of the Rohm & Haas Co. was used in this experiment to investigate the charateristics of ITO CMP. From this experiment, it is proven that the coefficient of friction is related to uniformity of the removal rate of the ITO thin film. Therefore, the prediction of polishing result would be possible by measuring friction signal.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.224-228
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• 2003

The basic Principles and methods of the on-line monitoring of tribology parameters (friction coefficient and wear allowance) and fault diagnosis for the hoist disc brake system were introduced, the method were based on the spring force and oil pressure of the brake system and the hoist kinematics parameters. The experiment on the monitoring and diagnosis of hoist brake system were carried out. The research results showed: the monitoring and diagnosis methods are feasible.