• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.12
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• pp.2016-2024
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• 1989

A versatile incoherent optical processing system is developed and analyzed in detail, in which an acousto-optic modulator is used to generate the temporal offset frequency for heterodyning and an optical scanner to process the input object in scanning mode. The operational characteristics of the systems are studied with respect to spatial filtering in terms of the spectral width change of the light source, the temporal offset frequency, and a scanning rate. To enhance the system's capability, two schemes for tuning the system's OTF, structural tuning and defocused object tuning, are also developed and verified with the MTF measurements and computer calculations.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.5
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• pp.516-521
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• 2011

The basilar membrane, an important functional part of the cochlea, is responsible for spectral separation of vibration signals transmitted from the stapes. In current study, scaled-up polymer membranes designed by mimicking the human basilar membrane were used for investigation of the frequency-separation characteristic. Displacement field formed on each polymer membrane was acquired by Laser Doppler scanning vibrometer and post-processed frequency-wise. The locations of the maximum displacement along the centerline were identified and collected for individual frequency range to produce the frequency-position map of individual polymer membrane. The influences of the membrane thickness and material properties on the variation of the frequency separability were discussed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.6
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.263-268
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• 2003

This paper presents a result of performance evaluation fur non-contact scanning probe microscopy with respect to the vibration characteristics of cantilevers with tips. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made fur the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.5
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• pp.437-443
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• 2010

In recent years, as nano scale structured thin film technology has emerged in various fields such as the materials, biomedical and acoustic sciences, the quantitative nondestructive adhesion evaluation of thin film interfaces using ultra high frequency scanning acoustic microscopy(SAM) has become an important issue in terms of the longevity and durability of thin film devices. In this study, an effective technique for investigating the interfaces of nano scale structured thin film systems is described, based on the focusing of ultrasonic waves, the generation of leaky surface acoustic waves(LSAWs), V(z) curve simulation and ultra high frequency acoustical imaging_ Computer simulations of the V(z) curve were performed to estimate the sensitivity of detection of micro flaws(i.e., delamination) in a thin film system. Finally, experiments were conducted to confirm that a SAM system operating at a frequency of 1 GHz can be useful to visualize the micro flaws in nano structured thin film systems.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.181-182
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• 2008

In this paper, we present the design of an electromagnetic scanning mirror with rotated serpentine springs. We considered three types of torsional springs: simple beam springs (SBS), classic serpentine springs (CSS), and rotated serpentine springs (RSS). The analysis was done for an electrical resistance, differences in the mode-frequency, and resonances regarding to spring thickness. Electromagnetic coils under the mirror plate were also analyzed for power consumption and the mechanical deflection. From the analysis result, RSS and electromagnetic coils were designed for the silicon scanning mirror.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.6
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• pp.459-466
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• 2005

The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects, By monitoring the amplitude and frequency changes of the ultrasound generated as the SLS scans over a defect, the SLS technique has provided enhanced signal-to-noise performance compared to the traditional pitch-catch or pulse-echo ultrasonic methods, An extension of the SLS approach to map defects in microdevices is proposed by bringing both the generator and the receiver to the near-field scattering region of the defects, To facilitate near-field ultrasound measurement, silicon microcantilever probes are fabricated using microfabrication technique and their acoustical characteristics are investigated, Then, both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.935-939
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• 2012

3D vibration measurement is achieved using one laser scanning vibrometer(LSV) and Laser scanner(LS) by moving the LSV to three arbitrarily locations from the principle that vibration analysis based on the frequency domain is independent of the vibration signal based on time domain. The proposed system has the same effect as using three sets of LSVs. It has an advantage of reducing equipment costs. Analytical approach of obtaining in-plane and out-of-plane vibration of surface is introduced using geometrical relations between three LSV coordinates and vibration measured at three different locations.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.28-33
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• 2008

In a scanning electron microscope (SEM), outside acoustic noise causes image noise that distorts observations of the specimen being examined. A SEM that is less sensitive to acoustic noise is highly desirable. This paper investigates the image noise problem by addressing the mode shapes of the base plate and the transmission path of the acoustic noise and vibration. By arranging the position of the rib, a new SEM base plate was developed that had twisting as the 1st and 2nd modes. In those two twisting modes, vibration nodes existed near the center of the base plate where the specimen chamber is placed. Less vibration was transmitted to the chamber and to the specimen by the twisting modes compared to bending ones, which are the 2nd and 3rd modes for a rectangular plain base plate. An SEM with the developed base plate installed exhibited a significant reduction of image noise when exposed to acoustic noises below 250 Hz.