• International Journal of Precision Engineering and Manufacturing
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• v.5 no.3
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• pp.19-25
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• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2445-2450
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• 2003

Recently, biological technology industry shows great development. Instruments and systems related biological technology have been developed actively. In this paper, we developed a new micro end-effector for biological cell manipulation. The existing micro end-effector for biological cell manipulation has not any force sensing mechanism. Usually, excessive contact force occurring when the end-effector and a cell collide might make a damage on the cell. However, unfortunately, user can not notice the condition in case of using the existing end-effector. In order to overcome we proposed the improved micro end-effector having a force sensing mechanism. This paper presents the design concepts of the new micro end-effector. We carried out calibration of the force sensor and tested the performance of the proposed micro end-effector. Through a series of experiments the new micro end-effector shows the possibility of application for precision biological cell manipulation such as DNA operation

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.231-234
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• 2004

Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

• Journal of the Korean Geotechnical Society
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• v.40 no.2
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• pp.115-123
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• 2024

Stress is an invisible physical quantity, necessitating the use of earth pressure cells for its measurement within theground. Traditional strain-gauge type earth pressure cells, due to their rigidity, can distribute stress within the ground and subsequently affect the accuracy of earth pressure measurements. In contrast, force sensing resistors are thin and flexible, enabling the minimization of stress disturbance when measuring stress within the ground. This study developed a system that utilizes force sensing resistors to measure ground stress. It involved constructing a soil chamber for calibrating the force sensing resistors, assessing the variability of measurements from resistors embedded in sand ground, and verifying the attachment of pucks to the sensing area of the resistors.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.3
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• pp.237-242
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• 2013

This paper proposes a thermal peripheral blood flowmeter integrated with a force sensor that is capable of contact force compensation. We fabricate this blood flowmeter using a nickel RTD (resistance temperature detector) and piezoresistive force sensor by using microfabrication technology. In an experiment, we obtained a decreasing trend for the blood flow under an increasing contact force with a linear tendency of 31.7%/N. We then performed a compensation process based on this obtained trend. As a result, the maximum variance in the blood flow at 1-3N was 9.8%. Thus we achieved consistent blood flow measurement independent of the contact force. In this work, we verified that the thermal blood flowmeter integrated with a force sensor has the ability to accurately measure the blood flow independent of the contact force.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.411-417
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• 2022

In this paper, we propose a sensor with a C-shaped load cell to detect force change when a person sitting on the chair in an electrical transport-convenience vehicle is pushing ground by both heels. The load cell built in the vehicle is mechanically deformed by the vertical force owing to the human weight and the horizontal force by ground-pushing feet. The deformation rate of the load cell and its distribution are simulated using finite element analysis. In the simulation, the applied loads are preset in the range of 10 kg - 100 kg with a step size of 10 kg, and the ground-pushing force by feet is increased to 40 N with a step size of 5 N with respect to each applied load level. The resistance change of the load cell was observed to be linear in simulation as well as in measurement. the maximum difference between simulation and measurement was 0.89 % when the strain gauge constant was 2.243. The constant has a large influence on the difference. The proposed sensor was fabricated by connecting an instrument amplifier and a microcontroller to a load cell and used to detect the force by ground-pushing feet. To detect foot driving, the reference signal was set to 130% of the load, and the duration of the sensor output signal exceeding the reference signal was set to 0.6 s. In a test of a vehicle built with the proposed sensor, the footpushing force by the worker could be successfully detected even when the worker was working.

• Journal of Auto-vehicle Safety Association
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• v.9 no.4
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• pp.20-25
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• 2017

Dynamo based vehicle inspection device is end of line device for automobile industry. The device is utilized as implementing vehicle functionality inspection such as brake force, cruise control, kick-down acceleration, CAN inspection. As dynamo based inspection device is broadly adopted in automobile industry, the dynamic study is required to verify the vehicle test equipment reliability. This research recommends appropriate dynamic brake force inspection procedure and theoretical background for developed equipment. Dynamic characteristic of brake force implementation to roller is simplified. With simplified characteristics, the indirect brake force measurement strategy is developed and adopted. Comparison of each brake force result, the appropriate brake force inspection criterion is given.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.485-489
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• 2004

Cutting force is important to understand cutting process in milling. To measure cutting force, tool dynamometer is widely used but it is hard to apply in workshop condition. Cutting force measurement which doesn't affect cutting process is needed. Using relations between cutting force and spindle displacement, cutting force can be predicted. Cylindrical capacitive sensor was used to measure spindle displacement during cutting. And signals from tool dynamometer collected to compare with spindle displacement. The result shows spindle displacement has a linear relation with cutting force. Using this result, a simple method to predict cutting force could be applied at workshop condition.

• Journal of the Korean GEO-environmental Society
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• v.16 no.10
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• pp.15-22
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• 2015

In this study, to evaluate the long-term behavior characteristics and the loss of prestress force, the long-term measurement of the tensile anchors in the actual construction was performed and the results were analyzed comparing with the existing estimation. As the reinforcement member used for the purpose of slope stability or uplift-resisting of the permanent structure, etc, the permanent anchor should maintain the functions during the performance period of the structure differently from the temporary anchor. However, as the time passes by, since the relaxation and the creep of the anchor occur constantly, the management for the loss of tensile force is essential to perform the functions stably. So far, the loss of the tensile force has been estimated according to the reduction of the prestress using elasticity theory and using the relaxation value according to the type of tension member and the test using the long-term measurement is limited. Therefore, in this study, the site condition and the ground were investigated for the tensile anchor in the actual construction and the long-term measurement results more than 500 days was analyzed by installing the loadcell, inclinometer and the groundwater level gauge. In addition, the long-term behavior characteristics were evaluated by comparing the disposition of the measured earth retaining wall and the tension force loss of the anchor with the existing interpretation results. In the evaluation results, the most of the tension force loss occurs within 90 days and the loss was measured less than the estimated values.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.9
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• pp.749-755
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• 2016

A new method for measuring the 3-axis cutting forces of a pick cutter by substituting costly 3-D load cells is proposed in this paper. The proposed cutting force measurement method is capable of estimating the 3-axis cutting forces through mechanical constraints using four single-axis compressive load cells and shoulder bolts. The feasibility of the proposed method was verified by finite element analysis, and the accuracy of the force measurement of the developed force measurement device was investigated by conducting linear rock cutting tests. The tests showed that the new cutting force measurement method is able to measure 3-axis cutting forces with a relative error of approximately 6%. These results imply that the new method could be a suitable alternative to conventional 3-D load cells. In addition, it will allow a significant reduction of approximately 20-30% in the costs required for measuring the cutting force when compared to conventional 3-D load cells.