• Journal of the Semiconductor & Display Technology
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• v.18 no.3
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• pp.144-149
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• 2019

This paper describes the results of a study on the unmanned maintenance robot that simultaneously performs the cleaning and inspection of the photovoltaic panels. The robot has a special adsorptive device, an infrared sensor, a vacuum level sensor and a camera. The robot uses two SSC (Sliding Suction Cup) adsorptive devices to move up and down the slope. First, the forces generated when the robot moves up the slope are mechanically analyzed, and the required design and control of the adsorption system are suggested. The robot was designed and manufactured to operate stably by using the presented results. Next, the normal force between the panel and the wheel was measured to confirm that the robot was manufactured and operated as intended, and the robot motion was tested on the inclined panel. It has been proven that robots are well designed and built to clean and inspect sloped panels.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.41-45
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• 2008

We studied the electrical characteristics of low-k SiOCR interlayer dielectric(ILD) films fabricated by plasma enhanced chemical vapor deposition (PECVD). The precursor bis-trimethylsilylmethane (BTMSM) was introduced into the reaction chamber with the various flow rates. The absorption intensities of Si-O-$CH_x$, bonding group and Si-$CH_x$, bonding group changed synchronously for the variation of precursor flow rate, but the intensity of Si-O-Si(C) responded asynchronously with the $CH_x$, combined bonds. The SiOCH films revealed ultra low dielectric constant around 2.1(1) and reduced further below 2.0 by heat treatments.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.41 no.6
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• pp.1-10
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• 2004

A haptic rendering system is proposed for a puncture task of a virtual vertebra model. To build a mesh model from medical images, Delaunay triangulation is applied and physical models are based on elasticity theory. Also, a redundant actuated 6 DOF parallel type haptic device is designed to display large force and to resolve the singularity problem of parallel type mechanisms. Haptic feeling of puncture task and the performance of the proposed haptic device are tested by two puncture task experiments.

• Journal of the Semiconductor & Display Technology
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• v.10 no.2
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• pp.83-89
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• 2011

In this study, we investigated the effects of shutter control by Reactive Magnetron Sputtering using Inductively-Coupled Plasma(ICP) for obtaining ZnO thin films with high purity. The surface morphologies and structure of deposited ZnO thin films were characterized using Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and X-ray Diffractometer (XRD). Also, optical and chemical properties of ZnO thin films were analyzed by Spectroscopic Ellipsometer (SE) and X-ray Photoelectron spectroscopy (XPS). As a result, it observed that ZnO thin films grown at reactive sputtering using shutter control and ICP were higher density, lower surface roughness, better crystallinity than other conventional sputtering deposition methods. For obtaining better quality deposition ZnO thin films, we will investigate the effects of substrate temperature and RF power on shutter control by a reactive magnetron sputtering using inductively-coupled plasma.

• Journal of Information Display
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• v.4 no.1
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• pp.34-37
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• 2003

We investigate the solid phase crystallization of amorphous Si films on glass substrates under alternating magnetic field induction. The kinetics of crystallization are found to be greatly enhanced by alternating magnetic field. While complete crystallization takes heat treatment of more than 14 hours at 570$^{\circ}C$, it can be reduced by applying the megnetic field to 20 minutes. It is assumed that the enhancement of crystallization is associated with an electromotive force voltage generated by alternating magnetic field. This electric field applied in the amorphous Si may possibly be the reason for acceleration of the atomic mobility of crystallization through the modification of atomic potentials

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.10
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• pp.844-849
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• 2009

The moving behavior of particle with voltage biasing is studied by analyzing the displacement current generated in electrodes and the drift current by moving particles in cell gap. These currents are ascertained by optical reflectivity on the panel. We obtained the saturated current after a peak in threshold voltage which is coincide with reflectivity of 80%. These saturated optical reflectivity and its drift current offer optimum q/m of particles and driving voltage and can be analytically studied on grey scale methods. Especially regional analysis is useful to aging and driving voltage and the understanding of operating mechanism of charged particle type display.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.64-71
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• 2023

If an impedance mismatch occurs between the source and load in a Radio Frequency transmission system, reflected power is generated. This results in incomplete power transmission and the generation of Reflected Power, which returns to the Radio Frequency generator. To minimize this Reflected Power, Impedance matching is performed. Fast and efficient Impedance matching, along with converging reflected power towards zero, is advantageous for achieving desired plasma characteristics in semiconductor processes. This paper explores Impedance matching by adjusting the Vacuum Variable Capacitor of an L-type Matching Module based on the trends observed in the voltage of the Phase Sensor and Electromotive Force voltage. After assessing the impedance matching characteristics, the findings are described.

• Journal of the HCI Society of Korea
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• v.7 no.2
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• pp.25-34
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• 2012

A veterinary student learns and experiences veterinary processes though experiments and practices using real animals. However, animal protection laws regulate animal experiments and restrict number of the experiments on laboratory animals, veterinary students would have less chances of the experiments and the practices for their veterinary training with real animals. This paper proposes a simulator for veterinary education based on augmented reality (AR). We selected an intravenous injection procedure for the simulation because the injection procedure is the most frequently used procedure during veterinary training and the most difficult stage for beginning veterinary students. The proposed AR simulator provides with a tangible prop, of which shape looks like a leg of a real dog. It also has a injection simulator, which receives user's input and sends force feedbacks to indicate results of the injection simulation. We developed a WorkBench type AR system with an LED display and cameras for visual information processing. Finally, we evaluated its performance through experiments and user studies to check its acceptance level and usability of the proposed system. We compared the proposed system with a traditional video based education and an AR based system using a head mounded display (HMD). The results that the proposed system showed better performances over these systems.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• v.1
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• pp.357-362
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• 2006

The wedge type rail clamp compresses with small clamping force at first, and with large clamping force when the wind speed increases because of the wedge working. At this time in order to display the wedge working, the rail clamp slips along a rail. If the supporter is not installed in the rail clamp when the wind speed increases more and more, the structure will occur overload which leads the structure to fracture. So the supporter has to be installed in the rail clamp. The proper position of this supporter is determined by the initial clamping force and the wege angle. Therefore in this study we adopted 5-kinds of wedge angle as the design parameters, and carried out the finite element analysis, in order to analyze the relationship between the initial clamping force and the proper position of supporter in the wedge type rail clamp.

• Journal of Navigation and Port Research
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• v.31 no.1 s.117
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• pp.65-70
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• 2007

The wedge type rail clamp compresses with small clamping force at first, and with large clamping force when the wind speed increases bemuse of the wedge working. At this time in order to display the wedge working, the rail clamp slips along a rail. If the supporter is not installed in the rail clamp when the wind speed increases more and more, the structure will occur overload which leads the structure to fracture. So the supporter has to be installed in the rail clamp. The proper position of this supporter is determined by the initial clamping force and the wege angle. Therefore in this study we adopted 5-kinds of wedge angle as the design parameters, and carried out the finite element analysis, in order to analyze the relationship between the initial clamping force and the position of supporter in the wedge type rail clamp.