• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.413-413
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• 2014

In this paper, we present a fabrication method of functionalized gold nanostructures on flexible substrate that can be implemented for plasmonic sensing application. For biomolecular sensing, many researchers exploit unconventional lithography method like nanoimprint lithography (NIP), contact transfer lithography, soft lithography, colloidal transfer printing due to its usability and easy to functionalization. In particular, nanoimprint and contact transfer lithography need to have anti-adhesion layer for distinctive metallic properties on the flexible substrates. However, when metallic thin film was deposited on the anti-adhesion layer coated substrates, we discover much aggravation of the mold by repetitive use. Thus it would be impossible to get a high quality of metal nanostructure on the transferred substrate for developing flexible electronics based transfer printing. Here we demonstrate a method for nano-pillar mold and transfer the controllable nanoparticle array on the flexible substrates without an anti-adhesion layer. Also functionalization of gold was investigated by the different length of thiol applied for effectively localized surface plasmonic resonance sensing. First, a focused ion beam (FIB) and ICP-RIE are used to fabricate the nanoscale pillar array. Then gold metal layer is deposited onto the patterned nanostructure. The metallic 130 nm and 250 nm nanodisk pattern are transferred onto flexible polymer substrate by bi-layer functionalized contact imprinting which can be tunable surface energy interfaces. Different thiol reagents such as Thioglycolic acid (98%), 3-Mercaptopropionic acid (99%), 11-Mercaptoundecanoic acid (95%) and 16-Mercaptohexadecanoic acid (90%) are used. Overcoming the repeatedly usage of the anti-adhesion layer mold which has less uniformity and not washable interface, contact printing method using bi-layer gold array are not only expedient access to fabrication but also have distinctive properties including anti-adhesion layer free, functionalized bottom of the gold nano disk, repeatedly replicate the pattern on the flexible substrate. As a result we demonstrate the feasibility of flexible plasmonic sensing interface and anticipate that the method can be extended to variable application including the portable bio sensor via mass production of stable nanostructure array and other nanophotonic application.

• Journal of the Korean Recycled Construction Resources Institute
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• v.2 no.2
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• pp.128-136
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• 2014

It is known that the best way to recycle fly ash is to use in concrete. It is impossible to bury in the ground this fly ash recently, so it is trying to use high volume fly ash concrete. Nevertheless, recent main research topics are focused in the part of material only. However, it is necessary to perform the researches about elasticity modulus, stress-strain relationship and structural behavior. Therefore, in this paper, 18 test members were manufactured with 3 test variables, namely fly ash replacement ratio 0, 35, 50%, concrete compressive strength 20, 40, 60MPa and 2 tensile steel ratio. 18 test members were tested for flexural behavior. From the test results, there were no differences between 35, 50% high volume fly ash cement concrete and ordinary concrete without fly ash (FA=0%). In order to evaluate the HVFAC flexural behavior, Analytical model was proposed and the computer program was developed. There were no differences between test results and analysis results. So, the proposed analytical model was reasonable.

• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.408-418
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• 2008

The rectangular resonant cavity was designed and characterized as a microwave plasma source for focused ion beam. The optimum cavity was calculated analytically and analyzed in detail by using HFSS(High Frequency Structure Simulator). Since the resonant cavity can be affected by the permittivity of quartz chamber and plasma, the cavity is designed to be changeable in one direction. By observing the microwave input power at which the breakdown begins, the optimum cavity length for breakdown is measured and compared with the calculated one, showing in good agreement with the optimum length reduced by 10cm according to the permittivity change in the presence of quartz chamber. The shape of breakdown power curve as a function of pressure appears to be similar to Paschen-curve. After breakdown, plasma densities increase with microwave power and the reduced effective permittivity in the cavity with plasma results in larger optimum length. However, it is not possible to optimize the cavity condition for high density plasmas with increased input power, because too high input power causes expansion of density cutoff region where microwave cannot penetrate. For more accurate microwave cavity design to generate high density plasma, plasma column inside and outside the density cutoff region needs to be treated as a conductor or dielectric.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05a
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• pp.135-138
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• 2005

현재 널리 상용되어 있는PDP는 3전극 변방전형이다. 3전극 면장전형 PDP는 주방전이 유전체 아래에 서로 평행하게 위치하고 있는 ITO투명전극 사이에서 발생한다. 따라서 방전시의 전기장은 MgO 보호막 위에서 아치형태로 형성되게 된다. 플라스마 방전 시 전자에 의해 이온화된 이온 입자들은 전기장에 의해 그 방전경로가 정해지게 된다. 물론 전기장은 표면에서 수직이지만 전기장에 의해 가속되어진 이온입자들은 MgO 보호막에 기울어져서 입사하게 된다. 따라서 플라스마 방전시의 이온들의 MgO 보호막으로의 입사각은 매우 다양하다. $\gamma$-FIB (Focused ion beam) 시스템은 이온입사에 의한 물질의 이차전자방출계수 측정에 효과적인 장비이다. 본 실험은 이러한 $\gamma$-FIB 시스템을 이용하여 다양한 각도로 입사하는 이온빔에 의한 MgO 보호막의 이차전자방출계수를 측정하였다. 또한 이온화 에너지가 다른 여러 종류의 불활성 기체를 사용하여 이온의 입사하는 각도에 따른 MgO 보호막의 일함수를 측정하였다. 이온빔의 입사각은 각각 $0^{\circ}$, $10^{\circ}$, $20^{\circ}$, $30^{\circ}$로 변화시키면서 이차전자방출계수 및 일함수를 측정하였다. 이러한 실험을 통해 입사각이 클수록 이차전자방출계수는 증가하고 일수는 감소하는 것을 확인 할 수 있었다.

• Korean Journal of Optics and Photonics
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• v.34 no.2
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• pp.53-60
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• 2023

We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.

• Progress in Medical Physics
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• v.21 no.2
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• pp.232-237
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• 2010

The shielding materials designed for replacement of lead equivalent materials for lighter apron than that of lead in diagnostic photon beams. The absorption characteristics of elements were applied to investigate the lead free material for design the shielding materials through the 50 kVp to 110 kVp x-ray energy in interval of 20 kVp respectively. The idea focused to the effect of K-edge absorption of variable elements excluding the lead material for weight reduction. The designed shielding materials composited of Tin 34.1%, Antimon 33.8% and Iodine 26.8% and Polyisoprene 5.3% gram weight account for 84 percent of weight of lead equivalent of 0.5 mm thickness. The size of lead-free shielder was $200{\times}200{\times}1.5\;mm^3$ and $3.2\;g/cm^3$ of density which is equivalent to 0.42 mm of Pb. The lead equivalent of 0.5 mm thickness generally used for shielding apron of diagnostic X rays which is transmitted 0.1% for 50 kVp, 0.9% for 70 kVp and 3.2% for 90 kVp and 4.8% for 110 kVp in experimental measurements. The experiment of transmittance for lead-free shielder has showed 0.3% for 50 kVp, 0.6% for 70 kVp, 2.0% for 90 kVp and 4.2% for 110 kVp within ${\pm}0.1%$. respectively. Using the attenuation coefficient of experiments for 0.5 mm Pb equivalent of lead-free materials showed 0.1%. 0.3%, 1.0% and 2.4%, respectively. Furthermore, the transmittance of lead-free shielder for scatter rays has showed the 2.4% in operation energy of 50 kVp and 5.9% in energy of 110 kVp against 2.4% and 5.1% for standard lead thickness within ${\pm}0.2%$ discrepancy, respectively. In this experiment shows the designed lead-free shielder is very effective for reduction the apron weight in diagnostic radiation fields.

• Journal of Biomedical Engineering Research
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• v.25 no.5
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• pp.403-414
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• 2004

In the accompanying paper, we proposed a real. time volumetric imaging method using a cross array based on receive dynamic focusing and synthetic aperture focusing along lateral and elevational directions, respetively. But synthetic aperture methods using spherical waves are subject to beam spreading with increasing depth due to the wave diffraction phenomenon. Moreover, since the proposed method uses only one element for each transmission, it has a limited transmit power. To overcome these limitations, we propose a new real. time volumetric imaging method using cross arrays based on synthetic aperture technique with linear wave fronts. In the proposed method, linear wave fronts having different angles on the horizontal plane is transmitted successively from all transmit array elements. On receive, by employing the conventional dynamic focusing and synthetic aperture methods along lateral and elevational directions, respectively, ultrasound waves can be focused effectively at all imaging points. Mathematical analysis and computer simulation results show that the proposed method can provide uniform elevational resolution over a large depth of field. Especially, since the new method can construct a volume image with a limited number of transmit receive events using a full transmit aperture, it is suitable for real-time 3D imaging with high transmit power and volume rate.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.4
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• pp.1-7
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• 2017

Cobalt silicide was used as a counter electrode in order to confirm its reliability in dye-sensitized solar cell (DSSC) devices. 100 nm-Co/300 nm-Si/quartz was formed by an evaporator and cobalt silicide was formed by vacuum heat treatment at $700^{\circ}C$ for 60 min to form approximately 350 nm-CoSi. This process was followed by etching in $80^{\circ}C$-30% $H_2SO_4$ to remove the cobalt residue on the cobalt silicide surface. Also, for the comparison against Pt, we prepared a 100 nm-Pt/glass counter electrode. Cobalt silicide was used for the counter electrode in order to confirm its reliability in DSSC devices and maintained for 0, 168, 336, 504, 672, and 840 hours at $80^{\circ}C$. The photovoltaic properties of the DSSCs employing cobalt silicide were confirmed by using a simulator and potentiostat. Cyclic-voltammetry, field emission scanning electron microscopy, focused ion beam scanning electron microscopy, and energy dispersive spectrometry analyses were used to confirm the catalytic activity, microstructure, and composition, respectively. The energy conversion efficiency (ECE) as a function of time and ECE of the DSSC with Pt and CoSi counter electrodes were maintained for 504 hours. However, after 672 hours, the ECEs decreased to a half of their initial values. The results of the catalytic activity analysis showed that the catalytic activities of the Pt and CoSi counter electrodes decreased to 64% and 57% of their initial values, respectively(after 840 hours). The microstructure analysis showed that the CoSi layer improved the durability in the electrolyte, but because the stress concentrates on the contact surface between the lower quartz substrate and the CoSi layer, cracks are formed locally and flaking occurs. Thus, deterioration occurs due to the residual stress built up during the silicidation of the CoSi counter electrode, so it is necessary to take measures against these residual stresses, in order to ensure the reliability of the electrode.

• Journal of Bio-Environment Control
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• v.5 no.2
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• pp.215-235
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• 1996

The thermal analysis by mathematical model simulation makes it possible to reasonably predict heating and/or cooling requirements of certain greenhouses located under various geographical and climatic environment. It is another advantages of model simulation technique to be able to make it possible to select appropriate heating system, to set up energy utilization strategy, to schedule seasonal crop pattern, as well as to determine new greenhouse ranges. In this study, the control pattern for greenhouse microclimate is categorized as cooling and heating. Dynamic model was adopted to simulate heating requirements and/or energy conservation effectiveness such as energy saving by night-time thermal curtain, estimation of Heating Degree-Hours(HDH), long time prediction of greenhouse thermal behavior, etc. On the other hand, the cooling effects of ventilation, shading, and pad ||||&|||| fan system were partly analyzed by static model. By the experimental work with small size model greenhouse of 1.2m$\times$2.4m, it was found that cooling the greenhouse by spraying cold water directly on greenhouse cover surface or by recirculating cold water through heat exchangers would be effective in greenhouse summer cooling. The mathematical model developed for greenhouse model simulation is highly applicable because it can reflects various climatic factors like temperature, humidity, beam and diffuse solar radiation, wind velocity, etc. This model was closely verified by various weather data obtained through long period greenhouse experiment. Most of the materials relating with greenhouse heating or cooling components were obtained from model greenhouse simulated mathematically by using typical year(1987) data of Jinju Gyeongnam. But some of the materials relating with greenhouse cooling was obtained by performing model experiments which include analyzing cooling effect of water sprayed directly on greenhouse roof surface. The results are summarized as follows : 1. The heating requirements of model greenhouse were highly related with the minimum temperature set for given greenhouse. The setting temperature at night-time is much more influential on heating energy requirement than that at day-time. Therefore It is highly recommended that night- time setting temperature should be carefully determined and controlled. 2. The HDH data obtained by conventional method were estimated on the basis of considerably long term average weather temperature together with the standard base temperature(usually 18.3$^{\circ}C$). This kind of data can merely be used as a relative comparison criteria about heating load, but is not applicable in the calculation of greenhouse heating requirements because of the limited consideration of climatic factors and inappropriate base temperature. By comparing the HDM data with the results of simulation, it is found that the heating system design by HDH data will probably overshoot the actual heating requirement. 3. The energy saving effect of night-time thermal curtain as well as estimated heating requirement is found to be sensitively related with weather condition: Thermal curtain adopted for simulation showed high effectiveness in energy saving which amounts to more than 50% of annual heating requirement. 4. The ventilation performances doting warm seasons are mainly influenced by air exchange rate even though there are some variations depending on greenhouse structural difference, weather and cropping conditions. For air exchanges above 1 volume per minute, the reduction rate of temperature rise on both types of considered greenhouse becomes modest with the additional increase of ventilation capacity. Therefore the desirable ventilation capacity is assumed to be 1 air change per minute, which is the recommended ventilation rate in common greenhouse. 5. In glass covered greenhouse with full production, under clear weather of 50% RH, and continuous 1 air change per minute, the temperature drop in 50% shaded greenhouse and pad ＆ fan systemed greenhouse is 2.6$^{\circ}C$ and.6.1$^{\circ}C$ respectively. The temperature in control greenhouse under continuous air change at this time was 36.6$^{\circ}C$ which was 5.3$^{\circ}C$ above ambient temperature. As a result the greenhouse temperature can be maintained 3$^{\circ}C$ below ambient temperature. But when RH is 80%, it was impossible to drop greenhouse temperature below ambient temperature because possible temperature reduction by pad ||||&|||| fan system at this time is not more than 2.4$^{\circ}C$. 6. During 3 months of hot summer season if the greenhouse is assumed to be cooled only when greenhouse temperature rise above 27$^{\circ}C$, the relationship between RH of ambient air and greenhouse temperature drop($\Delta$T) was formulated as follows : $\Delta$T= -0.077RH＋7.7 7. Time dependent cooling effects performed by operation of each or combination of ventilation, 50% shading, pad ＆ fan of 80% efficiency, were continuously predicted for one typical summer day long. When the greenhouse was cooled only by 1 air change per minute, greenhouse air temperature was 5$^{\circ}C$ above outdoor temperature. Either method alone can not drop greenhouse air temperature below outdoor temperature even under the fully cropped situations. But when both systems were operated together, greenhouse air temperature can be controlled to about 2.0-2.3$^{\circ}C$ below ambient temperature. 8. When the cool water of 6.5-8.5$^{\circ}C$ was sprayed on greenhouse roof surface with the water flow rate of 1.3 liter/min per unit greenhouse floor area, greenhouse air temperature could be dropped down to 16.5-18.$0^{\circ}C$, whlch is about 1$0^{\circ}C$ below the ambient temperature of 26.5-28.$0^{\circ}C$ at that time. The most important thing in cooling greenhouse air effectively with water spray may be obtaining plenty of cool water source like ground water itself or cold water produced by heat-pump. Future work is focused on not only analyzing the feasibility of heat pump operation but also finding the relationships between greenhouse air temperature(T$_{g}$ ), spraying water temperature(T$_{w}$ ), water flow rate(Q), and ambient temperature(T$_{o}$).