• 한국전기전자재료학회논문지
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• 제13권11호
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• pp.969-975
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• 2000

Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

• 한국분말재료학회지
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• 제17권1호
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• pp.36-43
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• 2010

In present work, amorphous TiCuNi powders were fabricated by mechanical alloying process. Amorphization and crystallization behaviors of the TiCuNi powders during high-energy ball milling and subsequent microstructure changes were studied by X-ray diffraction and transmission electron microscope. TEM samples were prepared by the focused ion beam technique. The morphology of powders prepared with different milling times was observed by field-emission scanning electron microscope and optical microscope. The powders developed a fine, layered, homogeneous structure with milling times. The crystallization behavior showed that glass transition, $T_g$, onset crystallization, $T_x$, and super cooled liquid range ${\Delta}T=T_x-T_g$ were 628, 755 and 127K, respectively. The as-prepared amorphous TiCuNi powders were consolidated by spark plasma sintering process. Full densified TiCuNi samples were successfully produced by the spark plasma sintering process. Crystallization of the MA powders happened during sintering at 733K.

• Applied Microscopy
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• 제50권
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• pp.24.1-24.11
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• 2020

The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

• Applied Microscopy
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• 제50권
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• pp.22.1-22.6
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• 2020

In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years. The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO). However, the FIB-milled thin-foil specimens are inevitably contaminated with Ga⁺ ions. When these specimens are heated for real time observation, the Ga⁺ ions influence the reaction or aggregate in the protection layer. An effective method of removing the Ga residue by Ar⁺ ion milling within FIB system was explored in this study. However, the Ga residue remained in the thin-foil specimen that was extracted by EXLO from the trench after the conduct of Ar⁺ ion milling. To address this drawback, the thin-foil specimen was attached to an FIB lift-out grid, subjected to Ar⁺ ion milling, and subsequently transferred to an MEMS-based chip by EXLO. The removal of the Ga residue was confirmed by energy dispersive spectroscopy.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 합동 추계학술대회 논문집 정보 및 제어부문
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• pp.187-190
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• 2001

A new ultrasound imaging technique based on simultaneous multiple transmit focusing using orthogonal modified Golay codes is presented. modified Golay codes are used to increase signal-to-noise-ratio(SNR) and maximize the transmit power efficiency(TPE). Conventional Golay codes consist of a pair of complementary codes with same length and can be compressed into a delta-like signal due to their complementary property. In the present work, two modified Golay codes focused at different depths are transmitted at the same time, which are mutually orthogonal. On receive, these orthogonal modified Golay codes are separately compressed into two short pulses and individually focused. These two focused beam are combined to form a frame of image with improved lateral resolution. Computer simulations are performed to verity the proposed method improves the lateral resolution of image compared with the conventional echo system.

• Applied Microscopy
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• 제46권1호
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• pp.14-19
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• 2016

Currently, focused ion beams (FIB) are widely used for specimen preparation in atom probe tomography (APT), which is a three-dimensional and atomic-scale compositional analysis tool. Specimen preparation, in which a specific region of interest is identified and a sharp needle shape created, is the first step towards successful APT analysis. The FIB technique is a powerful tool for site-specific specimen preparation because it provides a lift-out technique and a controllable manipulation function. In this paper, we demonstrate a general procedure containing the crucial points of FIB-based specimen preparation. We introduce aluminum holders with moveable pin and an axial rotation manipulator for specimen handling, which are useful for flipping and rotating the specimen to present the backside and the perpendicular direction. We also describe specimen preparation methods for nanowires and nanopowders, using a pick-up method and an embedding method by epoxy resin, respectively.

• 한국의학물리학회:학술대회논문집
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• 한국의학물리학회 2002년도 Proceedings
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• pp.90-93
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• 2002

In particle radiotherapy, a shape of the beam to conform the irradiation field is statically defined by the compensator, collimator and potal devices at the outside of the patient body. However the target such as lung or liver cancer moves along with respiration. This increases the irradiated volume of normal tissue. Prior discussions about organ motions along with respiration have been mainly focused on inferior-superior movement that was usually perpendicular to beam axis. On the other hand, the change of the target depth along the beam axis is very important especially in particle radiotherapy, because the range end of beam (Bragg peak) is so sharp as to be matched to distal edge of the target. In treatment planning, the range of the particle beam inside the body is calculated using a calibration curve relating CT number and water equivalent path length (WEL) to correct the inhomogeneities of tissues. The variation in CT number along the beam path would cause the uncertainties of range calculation at treatment planning for particle radiotherapy. To estimate the uncertainties of the range calculation associated with patient breathing, we proposed the method using sequential CT images with respiration waveform, and analyzed organ motions and WELs at patients that had lung or liver cancer. The variation of the depth along the beam path was presented in WEL rather than geometrical length. In analyzed cases, WELs around the diaphragm were remarkably changed depending on the respiration, and the magnitude of these WEL variations was almost comparable to inferior-superior movement of diaphragm. The variation of WEL around the lung was influenced by heartbeat.

• Journal of Welding and Joining
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• 제15권3호
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• pp.88-98
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• 1997

Welding defects, such as porosity and spike, have sometimes occurred in deep penetration electron beam welds. These defects are known to be one of the serious problem in electron beam welds. So, effects of active parameters ($a_b$) on bead shape and occurrence of defects in electron beam welds of heavy section 9%Ni steel plates were investigated. Partial penetration welding in flat position, and deep penetration welding of 10 ~ 28mm depth were investigated in this study. It is desirable to select low accelerating voltage and above the surface focus position $a_b$$\geq$1.2 at which a wine-cup shaped bead is obtained to avoid the welding defects such as spike and root porosity. When the accelerating voltage of electron beam was low (90kV), active parameter ($a_b$) did not influence on the bead width, penetration depth and weld defects significantly. However, in case of high voltage ($\geq$120kV), active parameter ($a_b$) was sensitively associated with penetraton depth and weld defects, i.e. when the active parameter (($a_b$) was in the range of 0.6 to 1.0, the depth of penetration was always over the target (23mm), while the depth of penetration was dramatically decreased with further increase of active parameter ($a_b$). The weld defects were decreased with the increase of active parameter $a_b$ resulting in the decrease of energy density of the focused beam in the root part of fusion zone.

• Earthquakes and Structures
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• 제4권4호
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• pp.429-449
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• 2013

Current Design Codes for Reinforced Concrete (RC) interior beam-column joints are based on limited experimental studies on the seismic behavior of eccentric joints. To supplement existing information, an experimental study was conducted that focused on the effect of eccentricity of the deeper beams with respect to the shallow beams. A total of eight one-third scale interior joints with beams of different depths were subjected to reverse cyclic loading. The primary variables in the test specimens were the amount of joint transverse reinforcement and the cross section of the shallow beams. The overall performance of each test assembly was found to be unsatisfactory in terms of joint shear strength, stiffness, energy dissipation and shear deformation. The results indicated that the vertical eccentricity of spandrel beams in this type of joint led to lower capacity in joint shear strength and severe damage of concrete in the joint core. Increasing the joint shear reinforcement was not effective to alter the failure mode from joint shear failure to beam yielding which is favorable for earthquake resistance design, whereas it was effective to reduce the crack width at the small loading stages. Based on the observed behavior, the shear stress of the joint core was suggested to be kept as low as possible for a safe and practical design of this type of joint.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1186-1189
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• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.