• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.279-286
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• 2008

Numerical analysis is done to investigate which would be the most influencing process parameter in determining the uniformity of deposition thickness in TiN ICP-CVD(inductively coupled plasma chemical vapor deposition). Two configurations of ICP antenna are modeled; side and top planar. Side and top gas inlets are considered with each ICP antenna geometries. Precursor for TiN deposition was TDMAT(Tetrakis Diethyl Methyl Amido Titanium). Two step volume dissociation of TDMAT is used and absorption, desorption and deposition surface reactions are included. Most influencing factors are H and N concentration dissociated by electron impact collisions in plasma volume which depends on the relative positions of gas inlet and ICP antenna generated hot plasma region. Low surface recombination of N shows hollow type concentration, but H gives a bell type distribution. Film thickness at substrate edges is sensitive to gas flow rate and at high pressures getting more dependent on flow characteristics.

• Electrical & Electronic Materials
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• v.8 no.6
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• pp.774-779
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• 1995

Process optimization experiments based on the Taguchi method were performed in order to set up the optimal process conditions for the contact oxide etching process module which was built in order to be attached to the cluster system of multi-processing purpose. In order to compare with Taguchi method, the contact oxide etching process carried out with different process parameters(CHF$_{3}$/CF$_{4}$ gas flow rate, chamber pressure, RF power and magnetic field intensity). Optimal etching characteristics were evaluated in terms of etch rate, selectivity, uniformity and etched profile. In this paper, as a final analysis of experimental results the optimal etching characteristics were obtained at the process conditions of CHF3/CF4 gas flow rate = 72/8 sccm, chamber pressure = 50 mTorr, RF power = 500 watts, and magnetic field intensity = 90 gauss.

• Tribology and Lubricants
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• v.30 no.3
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• pp.139-145
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• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• Geomechanics and Engineering
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• v.14 no.2
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• pp.131-139
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• 2018

The preparation of repeatable and uniformly reconstituted soil specimens up to the specified conditions is an essential requirement for the laboratory tests. In this study for large samples replication, the simultaneous usage of the traveling pluviation and curtain raining technique is used to develop a new method, called the curtain travelling pluviator (CTP). This simple and cost effective system is based on the air pluviation approach, whilst reducing the sample production time, can reproduce uniform samples with relative densities ranging from 25% to 96%. In order to investigate the resulting suitability and uniformity from the proposed method, a series of tests is performed. The effect of curtain traveling velocity, curtain width, drop height, and flow rate on the parameters of the sample is thoroughly investigated. Increase in the curtain velocity and drop height leads to the increase in relative density for the sand specimen. Increase in curtain width typically resulted in the reduction of relative density. Test results reveal that the terminal drop height for the sand specimen in this study is more than 500 mm. Relative density contour lines are presented that can be utilized in optimizing the drop height and curtain width parameters. Sample uniformity in the vertical and horizontal orientation is investigated through the sampling containers. Increasing relative density tends to result in the higher sample repeatability and uniformity.

• Transactions on Electrical and Electronic Materials
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• v.12 no.3
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• pp.115-118
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• 2011

Process characterization of the chemical mechanical polishing (CMP) process for undensified phosphosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been addressed to experimenters to understand the relationship between input variables and responses of interest in a simple and efficient way. It is typically beneficial for determining the adequate size of experiments with multiple process variables and making statistical inferences for the responses of interests. Equipment controllable parameters to operate the machine include the down force (DF) of the wafer carrier, pressure on the backside of the wafer, table and spindle speed (SS), slurry flow rate, and pad condition. None of them is independent; thus, the interaction between parameters also needs to be indicated to improve process characterization in CMP. In this paper, we have selected the five controllable equipment parameters, such as DF, back pressure (BP), table speed (TS), SS, and slurry flow (SF), most process engineers recommend to characterize the CMP process with respect to material removal rate (RR) and film uniformity as a percentage. The polished material is undensified PSG. PSG is widely used for the plananization in multi-layered metal interconnects. We identify the main effect of DF, BP, and TS on both RR and film uniformity, as expected, by the statistical modeling and analysis on the metrology data acquired from a series of $2^{5-1}$ fractional factorial design with two center points. This revealed the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that the process control based on better understanding of the process is the key to success in semiconductor manufacturing, typically when the wafer size reaches 300 mm and is continuously scheduled to expand up to 450 mm in or little after 2012.

• Journal of the Korean housing association
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• v.13 no.6
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• pp.89-99
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• 2002

The purpose of this research is to analyze the characteristics of flow rate distribution in hot-water piping networks in the apartment building. A 14-story apartment house was selected as a sample building and analyzed numerically by Hardy-Cross method. Two different piping networks, one has three vertical zones and the other of a single zone with automatic balancing valves, were compared. Some of research results are as follows; As the temperature of supply hot-water increases, the flow rate of it does by buoyancy effect, but this effect is not found in the piping network with automatic balancing valves. Non-uniformity in hot-water flow distributions to all stories in the piping system of single vertical zone can be completely reformed by the installation of either manually operated or automatic balancing valves in every story.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.770-775
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• 2001

Numerical calculation has been performed to investigate the fluid flow, heat transfer and local mass fraction of chemical species in the MOCVD (metalorganic chemical vapor deposition) manufacturing process. The mixing of reactants (trimethylgallium with hydrogen gas and ammonia) was presented by the concentration of each reactants to predict the uniformity of film growth. Effects of inlet size, location, mass flow rate and susceptor/cold wall tilt angle on the concentration were reported. The newly developed reactor, that precursors were supplied at separated inlet to prevent from premixing, was investigated to obtain the quantitative verification. As a results, the optimum mass flow rate, wall tilt angle and inlet conditions were proposed.

• Journal of ILASS-Korea
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• v.6 no.4
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• pp.14-21
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• 2001

Rotary atomizer is widely used in practical application ranging from combustion, cooling, spray drying, agriculture, chemical system. Rotary cup atomizer has some advantages such as extreme versatility and liquid atomization successfully varying widely in viscosity. In rotary atomization, the feed liquid is centrifugally accelerated to high velocity and the liquid extends over the rotating surface as a thin film before being discharged into an atmosphere. The degree of rotary atomization depends upon peripheral speed, feed rate, liquid properties and atomizer design. An important asset is that thickness and uniformity of the liquid sheet can readily be controlled by regulating the liquid flow rate and the rotational speed. LDPA(Laser Diffraction Particle Analyser) and image aquisition system are used to measure drop size distribution and spray pattern. The atomization characteristics of the rotary cup atomizer is investigated experimentally by varing the liquid feed rate, rotary cup speed and air velocity for atomization. As a results, the effect of air velocity on the atomization characteristics such as drop size and spray uniformity is considerably greater than variation of those with liquid feed rate.

• Journal of Bio-Environment Control
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• v.18 no.3
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• pp.215-224
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• 2009

A survey on the actual state of heating, cooling, ventilation, and air-flow and experimental measurement of temperature and humidity distribution in tomato greenhouse were performed to provide fundamental data required in the development of air-flow control technology. In single-span plastic houses, which account for most of 136 tomato greenhouses surveyed, roof windows, ventilation and air-flow fans were installed in a low rate, and installation specs of those facilities showed a very large deviation. There were no farms installed greenhouse cooling facilities. In the hot air heating system, which account for most of heating type, installation specs of hot air duct showed also a large deviation. The exhaust air temperature and wind speed in hot air duct also were measured to have a big difference depending on the distance from the heater. We are using the maximum difference as indicator to determine whether temperature distribution is uniform. However if the temperature slope is not identical in greenhouse, it can't represent the uniformity. We analyzed relation between the maximum difference and the uniformity of temperature and humidity distribution. The uniformity was calculated using the mean and standard deviation of data from 12 measuring points. They showed high correlation but were represented differently by linear in the daytime and quadratic in the nighttime. It could see that the uniformity of temperature and humidity distribution was much different according to greenhouse type and heating method. The installation guidelines for ventilation and air-flow fan, the spread of greenhouse cooling technology for year-round stable production, and improvement of air duct and heating system, etc. are needed.

• Journal of the Korean Society of Combustion
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• v.21 no.4
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• pp.6-15
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• 2016

The oxygen fuel MILD (Moderate or Intense Low-oxygen Dilution) combustion has been considered as one of the promising combustion technology for flame stability, high thermal efficiency, low emissions and improved productivity. In this paper, the effect of oxygen and fuel injection condition on formation of MILD combustion was analyzed using lab scale oxygen fuel MILD combustion furnace. The results show that the flame mode was changed from a diffusion flame mode to a split flame mode via a MILD combustion flame mode with increasing the oxygen flow rate. A high degree of temperature uniformity was achieved using optimized combination of fuel and oxygen injection configuration without the need for external oxygen preheating. In particular, the MILD combustion flame was found to be very stable and constant flame temperature region at 7 KW heating rate and oxygen flow rate 75-80 l/min.