Statistical Qualitative Analysis on Chemical Mechanical Polishing Process and Equipment Characterization |
Hong, Sang-Jeen
(Department of Electronic Engineering, Myongji University)
Hwang, Jong-Ha (Department of Electronic Engineering, Myongji University) Seo, Dong-Sun (Department of Electronic Engineering, Myongji University) |
1 | P. Y. Chen, C. J. Wu, C. N. Ko, and J. T. Jeng, Artif. life Robot. 14, 62 (2009) [DOI: 10.1007/s10015-009-0269-6]. DOI |
2 | S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, 2nd ed. Vol. 4: Deep-Submicron Process Technology (Lattice Press, Sunset Beach, 2002). |
3 | G. E. P. Box, W. G. Hunter, and J. S. Hunter, Statistics for Experiments (John Wiley & Sons, New York, 1978). |