• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.161-166
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• 2021

Errors in the semiconductor process are generated by a change in the state of the equipment, and errors usually arise when the state of the equipment changes or when parts that make up the equipment have flaws. In this investigation, we anticipated that aging of the mass flow controller in the plasma enhanced chemical vapor deposition SiO2 thin film deposition method caused a minute flow rate shift. In seven cases, fourier transformation infrared film quality analysis of the deposited thin film was used to characterize normal and pathological processes. The plasma condition was monitored using optical emission spectrometry data as the flow rate changed during the procedure. Preprocessing was used to apply the collected OES data to the artificial immune system algorithm, which was then used to process diagnosis. Through comparisons between datasets, the learning algorithm compared classification accuracy and improved the method. It has been confirmed that data characterized as a normal process and abnormal processes with differing flow rates may be discriminated by themselves using the artificial immune system data mining method.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.305-308
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• 2006

For controlling micro-flows inside a LOC (lab-on-a-chip) a syringe pump or an electronic device for EOF(electro-osmotic flow) have been used in general. However, these devices are so large and heavy that they are burdensome in the development of a portable micro-TAS (total analysis system). In this study, a new flow control system employing pressure chambers, digital switches and speed controllers was developed. This system could effectively control the micro-scale flows inside a LOC without any mechanical actuators or electronic devices We also checked the feasibility of this new control system by applying it to a LOC of micro-mixer type. Performance tests show that the developed control system has very good performance. Because the flow rate in LOC is controlled easily by throttling the speed controller, the flows in complicate microchannels network can be also controlled precisely.

• 한국철도학회논문집
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• 제3권4호
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• pp.177-184
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• 2000

In this paper, a HVAC controller which has a bilinear system is designed to control the air temperature in building room and a saving of energy on the HVAC system. For modeling of the HVAC bilinear system, AHU(Air Handling Unit) is modeled on the control of inside-outside air flow using three dampers in a duct. A heat exchanger and the single room are also modeled by the energy conservation law. Under the modeling of the HVAC bilinear system, the control's law of the bilinear HVAC system is derived by Lyapunov's non-linear theory and Deress's the linear feedback laws for bilinear system. In this paper it was proved that the controller of the HVAC bilinear system is able to control the air temperature with a disturbance in order to get a target of temperature in the building room by the computer simulation when the control inputs regulate the air flow rate and a capacity of the heat exchanger.

• 한국생산제조학회지
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• 제23권4호
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• pp.385-391
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• 2014

A control system for ultrasonic spray pyrolysis deposition was developed that can coat a large size glass panel with a transparent conductive oxide. It consists of several ultrasonic atomizer devices to cover a large area and a host computer for individually controlling the devices. The sub-controller in an ultrasonic atomizer device can adjust the flow rate of the atomized conductive oxide gas by setting the flow rate of the solution and regulating the level of the solution in the tank. To construct a feedback control loop for level regulation, a level sensor that utilized an infrared distance sensor and an electric circuit for adjusting the ultrasonic oscillator were developed. The host program was also developed, which can monitor and control the sub-controllers. A proportional-integral controller was developed for a simplified model, and its operation was verified through an experiment.

• 제어로봇시스템학회논문지
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• 제4권3호
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• pp.321-328
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• 1998

When we control the level of the steam generator in the nuclear power plants, a swell and shrink arises from many disturbances such as feed water rate, feed water temperature, main steam flow rate, and coolant temperature. If we use the conventional type of PI controller in this system, we will not have stability during controlling at lower power, the removal function of disturbances, and a load follow-up control effectively. In this paper, we study the application of a 2-Degree of Freedom(2-DOF) PID controller to the level control of the steam. generator of nuclear power plants through the simulation and the experimental steam generator. We use the parameters $\alpha$, $\beta$, $\gamma$ of the 2-DOF PID controller for the removal of disturbances and the parameters Kp,Ti,Td of the conventional type of PID controller for controlling setpoint. The back-propagation learning algorithm of neural network is used for tuning the 2-DOF PID controller. We can find satisfactory results of the removal of the disturbances and the tracking function in the change of setpoint through the simulation and experimental steam generator.

• 대한기계학회논문집A
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• 제28권12호
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• pp.1923-1930
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• 2004

This paper presents digital microflow controllers(DMFC), where a fluidic digital-to-analog converter(DAC) is used to achieve high-linearity, fine-level flow control for applications to precision biomedical dosing systems. The fluidic DAC, composed of binary-weighted flow resistance, controls the flow-rate based on the ratio of the flow resistance to achieve high-precision flow-rate control. The binary-weighted flow resistance has been specified by a serial or a parallel connection of an identical flow resistor to improve the linearity of the flow-rate control, thereby making the flow-resistance ratio insensitive to the size uncertainty in flow resistors due to micromachining errors. We have designed and fabricated three different types of 4-digit DMFC: Prototype S and P are composed of the serial and the parallel combinations of an identical flow resistor, while Prototype V is based on the width-varied flow resistors. In the experimental study, we perform a static test for DMFC at the forward and backward flow conditions as well as a dynamic tests at pulsating flow conditions. The fabricated DMFC shows the nonlinearity of 5.0% and the flow-rate levels of 16(2$^{N}$) for the digital control of 4(N) valves. Among the 4-digit DMFC fabricated with micromachining errors, Prototypes S and P show 27.2% and 27.6% of the flow-rate deviation measured from Prototype V, respectively; thus verifying that Prototypes S and P are less sensitive to the micromachining error than Prototype V.V.

• 제어로봇시스템학회논문지
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• 제5권3호
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• pp.363-369
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• 1999

In this paper, we design the robust $H_{\infty}$ controller for water level control of steam generator using a mixed $H_{\infty}$ optimization with model-matching method. Firstly we choose the desired model which has good disturbance rejection performance. Secondly we design a stabilizing controller to keep the model-matching error small and also provide sufficiently large stability margin against additive perturbations of the nominal plant. Simulation results show that proposed robust $H_{\infty}$ controller at specific power operation has satisfactory performances against the variations of load power, steam flow rate, primary circuit coolant temperature, and feedwater temperature. It can be also observed that the proposed robust $H_{\infty}$ controller exhibits better robust stability than conventional PI controller.

• 한국항공우주학회지
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• 제38권10호
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• pp.992-997
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• 2010

과학기술위성3호(STSAT-3)용 홀추력시스템(HPS)의 추력제어모듈(PCM)은 압력정밀도 5%이하와 유량정밀도 3%이하를 목표로 한다. 압력제어기는 비례유량제어밸브(PFCV)와 저압압력센서를 사용하여 목표압력을 제어하도록 하고, 유량제어기는 PFCV와 홀추력기의 에노우드(anode) 전류를 이용하여 유량을 조절한다. 제어형태로는 비례,적분(PI) 제어기를 선택하고, PI 이득은 Matlab 시뮬레이션을 통하여 정한다. 시험결과 압력정밀도 <${\pm}$5%와 유량정밀도 <${\pm}$1.87%를 얻었다. 본 논문은 홀추력 제어모듈의 설계, 구현, 그리고 성능시험 결과를 기술한다.

• 한국정밀공학회지
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• 제14권8호
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• pp.146-154
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• 1997

Solenoid-folw control type ABS is used with a 'dump and reapply' pressure control arrangement instead of using 2/2 (normal open/close) solenoid valves in convensional systems(sol. -sol. control type), a flow control valve is used which replaces the (no) inlet valve. The flow control valve controls fluid flow providing a nearly constant reapply rate( .theta. ) after the dump plase of ABS operation. In this study, to investigate a characteristics of brake pressure by PWM control, test rig was consisted of ABS hydraulic modulator, digital controller, pneumatic power supply and brake master cylinder. For comparison with experi- mental results, system modelling and computer simulation were performed. As a result, experiment results showed fairly agreement with the simulation. Also, it is shown that the pressure gradient (tan .theta. ) is affected by pressure, frequency, duty ratio and expressed with an exponential funtion.

• 설비공학논문집
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• 제7권3호
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• pp.538-545
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• 1995

The heat transfer model of ondol heating system is derived in the linear form. The step responses of On-Off controller, PID controller and Position type fuzzy controllers are compared in the sense of several aspects : variation of temperature feedback variable, variation of supplied heat quantity by the boiler, variation of flow rate, variation of thickness of the base, variation of the outdoor temperature.