Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Digital Microflow Controllers Using Fluidic Digital-to-Analog Converters with Binary-Weighted Flow Resistor Network

이진가중형 유체 디지털-아날로그 변환기를 이용한 고정도 미소유량 조절기

  • 윤상희 (한국과학기술원 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원 디지털나노구동연구단)
  • Published : 2004.12.01
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Abstract

This paper presents digital microflow controllers(DMFC), where a fluidic digital-to-analog converter(DAC) is used to achieve high-linearity, fine-level flow control for applications to precision biomedical dosing systems. The fluidic DAC, composed of binary-weighted flow resistance, controls the flow-rate based on the ratio of the flow resistance to achieve high-precision flow-rate control. The binary-weighted flow resistance has been specified by a serial or a parallel connection of an identical flow resistor to improve the linearity of the flow-rate control, thereby making the flow-resistance ratio insensitive to the size uncertainty in flow resistors due to micromachining errors. We have designed and fabricated three different types of 4-digit DMFC: Prototype S and P are composed of the serial and the parallel combinations of an identical flow resistor, while Prototype V is based on the width-varied flow resistors. In the experimental study, we perform a static test for DMFC at the forward and backward flow conditions as well as a dynamic tests at pulsating flow conditions. The fabricated DMFC shows the nonlinearity of 5.0% and the flow-rate levels of 16(2$^{N}$) for the digital control of 4(N) valves. Among the 4-digit DMFC fabricated with micromachining errors, Prototypes S and P show 27.2% and 27.6% of the flow-rate deviation measured from Prototype V, respectively; thus verifying that Prototypes S and P are less sensitive to the micromachining error than Prototype V.V.

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References

  1. Shoji, S. and Esashi, M, 1994, 'Microflow Devices and Systems,' Journal of Micromechanics and Microengineering, Vol. 4, No.4, pp. 157-171 https://doi.org/10.1088/0960-1317/4/4/001
  2. Zdeblick, M. J., Barth, P. P. and Angell, J. B., 1998, 'A Microminiature Fluidic Amplifier,' Sensors and Actuators, Vol. 15, pp. 427-433 https://doi.org/10.1016/0250-6874(88)81511-7
  3. Henning, A. K., Fitch, J., Hopkins, D., Lilly, L., Faeth, R., Falsken, E. and Zdeblick, M, 1997, 'A Thermopneumatically Actuated Microvalve for Liquid Expansion and Proportional Control,' International Conference on Solid State Sensors and Actuators, Vol. 2, pp. 825-828 https://doi.org/10.1109/SENSOR.1997.635228
  4. Vandelli, N., Wroblewski, D., Velonis, M. and Bifano, T., 1998, 'Development of a MEMS Microvalve Array for Fluid Flow Control,' Journal of Microelectromechanical Systems, Vol. 7, No.4, pp. 395-403 https://doi.org/10.1109/84.735347
  5. Lee, W. Y., Wong, M. and Zohar, Y., 2002, 'Pressure Loss in Constriction Microchannels,' Journal of Microelectromechanical Systems, Vol. 11, No.3, pp. 236-244 https://doi.org/10.1109/JMEMS.2002.1007402
  6. Toshiyoshi, H., Kobayashi, D., Mita, M, Hashiguchi, G., Fujita, H. and Endo, J., 2000, 'Microelectromechanical Digital-to-Analog Converters of Displacement for Step Motion Actuators,' Journal of Microelectromechanical Systems, Vol. 9, No.2, pp. 218-225 https://doi.org/10.1109/84.846702