• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.756-760
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• 2011

This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.3 s.168
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• pp.61-67
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• 2005

A dynamic model for flexure hinge-based compliant mechanisms is derived. The dynamic model of the previous works do not well describe the behaviors of rigid bodies in the compliant mechanism when the length of the flexure hinge is long. In this study, the effect on the length of the flexure hinge is pointed out and then the dynamic model is derived to overcome the length effect. For verification, modal analyses are carried out using the proposed dynamic model and FEM (Finite Element Method). Finally they are compared by the terms of modal frequency. As the result, the proposed dynamic model can be used in design and analysis of the compliant mechanism.

• Journal of the Korean Society of Industry Convergence
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• v.26 no.6_1
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• pp.993-999
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• 2023

In this paper, a novel polishing tool mechanism with 3-axis compliance is presented, which consists of 2-axis rotational and 1-axis linear compliances in series. The 2-axis rotational compliance mechanism is made up of four cantilever beams for adjusting rotational stiffness and one flexure universal joint at the center for constraining the z-axis deflection. The 2-axis rotational compliance can mechanically adjust the polishing tool to machined surfaces. The polishing press force can be simply controlled by using a linear spring along the z-axis. The 2-axis rotational and 1-axis linear compliance design is decoupled. The stiffness analysis of the 2-axis compliance mechanism was performed based on link compliance matrix and rigid body transformation. A 3-axis polishing tool was designed by configuring the 2-axis compliance mechanism and one linear spring.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.404-409
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• 2002

A newly devised linear flexure bearing (KIMM-LFB) for reciprocating machines is disclosed having improved tight gas clearance maintaining capability for better system performance. KIMM-LFB is an integrated device comprising an axially moving diaphragm with circumferentially arranged arc-shaped flexure blades secured between rim and hub spacers, which turn out to have higher radial stiffness than the one with circumferential tangent cantilever flexure blades. It is expected for KIMM-LFB to play a key role in designing long life, special purpose reciprocating machines such as spacecraft borne cryogenic refrigerators (cryocoolers) by providing frictionless, non-wearing, linear movement and radial support for the machines as well as a gas clearance seal by maintaining extremely tight clearances between piston and cylinder.

• Structural Engineering and Mechanics
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• v.13 no.3
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• pp.241-260
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• 2002

The effect of shear coupled with axial force variation on the inelastic seismic behaviour of reinforced concrete bridge piers is investigated in this paper. For this purpose, a hysteretic axial-shear interaction model was developed and implemented in a nonlinear finite element analysis program. Thus, flexure-shear-axial interaction is simulated under variable amplitude reversed actions. Comparative studies for shear-dominated reinforced concrete columns indicated that a conventional FE model based on flexure-axial interaction only gave wholly inadequate results and was therefore incapable of predicting the behaviour of such members. Analysis of a reinforced concrete bridge damaged during the Northridge (California 1994) earthquake demonstrated the importance of shear modelling. The contribution of shear deformation to total displacement was considerable, leading to increased ductility demand. Moreover, the effect of shear with axial force variation can significantly affect strength, stiffness and energy dissipation capacity of reinforced concrete members. It is concluded that flexure-shear-axial interaction should be taken into account in assessing the behaviour of reinforced concrete bridge columns, especially in the presence of high vertical ground motion.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.742-745
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• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• Journal of the Korean Society of Industry Convergence
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• v.12 no.2
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• pp.107-112
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• 2009

The effective reinforcement methods of structure is required to improve the durability of existing structures. Recently, the continuous fiber sheets to the concrete structures are widely used in the earthquake-proof reinforcement method. This study examines suitability and effect to concrete structure of fiber by FEM analysis. The result of analysis is as follows; All specimens occurred bending tensile failure at the middle span. Ultimate strength of specimen in the RC and reinforced RC specimen were 53.9 kN, 56.3 kN respectively and it was some low by degree 0.89, 0.82 to compare with calculated result. The deflection of specimen at the middle span occurred in approximately 0.2 mm, and did linear behavior in load 20 kN by seat reinforcement. Stiffness did not decrease by occurrence in the finer crack and reinforcement beam's flexure stiffness was increased until reach in failure. To compare calculated value and analysis value, it almost equal behavior in the elastic reign and can confirm effectiveness of analysis. Crack was distributed uniformly by reinforcement of fiber seat at failure and it do not occurred stiffness decreases.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.217-217
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• 2003

• Structural Engineering and Mechanics
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• v.50 no.2
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• pp.163-180
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• 2014

Inaccurate predictions of effective stiffness for reinforced concrete (RC) columns having plain (undeformed) longitudinal rebars may lead to unsafe performance assessment and strengthening of existing deficient frames. Currently utilized effective stiffness models cover RC columns reinforced with deformed longitudinal rebars. A database of 47 RC columns (33 columns had continuous rebars and the remaining had spliced reinforcement) that were longitudinally reinforced with plain rebars was compiled from literature. The existing effective stiffness equations were found to overestimate the effective stiffness of columns with plain rebars for all levels of axial loads. A new approach that considers the contributions of flexure, shear and bond slip to column deflections prior to yielding was proposed. The new effective stiffness formulations were simplified without loss of generality for columns with and without lap-spliced plain rebars. In addition, the existing stiffness models for the columns with deformed rebars were improved while taking poor bond characteristics of plain rebars into account.