• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.10
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• pp.1976-1981
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• 2009

Transparent conducting aluminum-doped zinc oxide (AZO) thin films were deposited on Coming glass substrate using an Gun-type rf magnetron sputtering deposition technology. The AZO thin films were fabricated with an AZO ceramic target (Zn: 98wt.%, $Al_2O_3$: 2wt.%). The AZO thin films were deposited with various growth conditions such as the substrate temperature, oxygen pressure. X -ray diffraction (XRD), UV/visible spectroscope, atomic force microscope (AFM), and Hall effect measurement system were done in order to investigate the properties of the AZO thin films Among the AZO thin films prepared in this study, the one formed at conditions of the substrate temperature $100^{\circ}C$, Ar 50 sccm, $O_2$ 5 sccm and working pressure 5 motor showed the best properties of an electrical resistivity of $1.763{\times}10^{-4}\;[{\Omega}{\cdot}cm]$, a carrier concentration of $1.801{\times}10^{21}\;[cm^{-3}]$, and a carrier mobility of $19.66\;[cm^2/V{\cdot}S]$, which indicates that it could be used as a transparent electrode for thin film transistor and flat panel display applications.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.722_723
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• 2009

본 논문은 FEM(Finite elements Method)을 활용하여 가로축길이/외경지름 비가 약 2 정도로, 넓적한 평판형 전동기 해석을 할 때 고려해야 할 사항이다. 즉, 오차 발생 요인중의 하나인 축방향 누설을 고려한 해석 방법으로, 이를 위해 2차원해석과 3차원해석을 비교함은 기본이고, 일반적으로 사용하는 방법보다 효율적인 방법을 제안한다. 그후 일반화의 가능 여부와 다른 방안들을 고려하여 본다.

• The Transactions of the Korean Institute of Power Electronics
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• v.20 no.5
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• pp.456-463
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• 2015

Nowadays, small quantity batch production, which is so-called a flexible manufacturing system, is a major trend in the modern factory automation industry. The demands for new transportation system are increased gradually, with which multiple passive carriers carrying materials and semi-products are precisely and individually controlled along a single closed rail. Thus, a new type of permanent magnet linear synchronous motor (PMLSM), which consists of state coils on a single rail and PM movers as many as carriers, is proposed in this paper. The rail can be segmented as modules with pairs of coils and a current amplifier, which makes the transportation system simple; therefore, the rail can be easily extended and repaired. A design method of the new PMLSM with a single carrier is proposed, which can be thought as a new version of PMLSM, a coil-segmented coreless PMLSM (CS-CLPMLSM). Experimental setup for it is made, and propulsion results show that with the help of a new effective coil selection and switching algorithms, the conventional current-based vector control is sufficient to fulfill the position and velocity control of the new PMLSM. The proposed PMLSM is expected to fulfill seamless servo-control of multiple carriers also in process line, such as a new generation of flat panel display manufacturing line.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.44-48
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• 2007

In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.8
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• pp.344-349
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• 2017

Wall-climbing robots have been developed for various purposes, such as cleaning skyscraper windows, maintaining large structures, and welding vessels. Conventional wall-climbing robots use movement systems based on wheels or legs. However, wheeled robots suffer from slipping effects, while legged systems require many actuators and control systems for the complex linkage structure, which also increases the weight of the robot. To overcome these disadvantages, we propose a new wall-climbing robot that walks based on gorilla locomotion. The proposed robot consists of a DC drive motor, a vacuum pump for adsorption, and a micro controller for controlling the system. The performance of the robot was experimentally verified on vertical and horizontal flat surfaces. The robot could be used for various functions in industrial sites or disaster areas.

• Transactions of the Korean Society of Automotive Engineers
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• v.18 no.2
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• pp.83-90
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• 2010

The windshield wiper consists of 4 parts: a blade, an arm, a linkage and a motor. The wiper blade makes contact with the windshield and is designed to be operated normally at an angle of 30~50 degrees to the front glass. If the contact pressure between the wiper blade and windshield surface is too high, noise and wear of the rubber will result. On the other hand, if the contact pressure is too low, the performance will do badly, since foreign substances such as dust and stains will not be removed well. The pressure and friction of the wiper blade has a great influence on its effectiveness in cleaning the front window. This is due to the contact of the rubber with the window. This paper presents the dynamic analysis method to estimate the performance of the flat type blade of the wiper system. The blade has a nonlinear characteristic since the rubber is an incompressible hyper-elastic and visco-elastic material. Thus, Structural dynamic analysis using a complex contact model for the blade is performed to find the characteristics of the blade. The flexible multi-body dynamic model is verified by the comparison between test and analysis result. Also, the optimization using the central composite design table is performed.

• Journal of rehabilitation welfare engineering & assistive technology
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• v.10 no.1
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• pp.65-72
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• 2016

In this study, a fully active transfemoral prothesis with a knee joint is designed considering stair walking conditions. Since the torque at the knee joint required for stair walking condition is relative high compared with the one in normal walking condition, the proposed design has high torque generating mechanism. Moreover, the transfemoral prothesis is designed in compact size to reduce its weight, which is related to comfortable fit and fatigue of patients. Flat type BLDC motor is used for simple and compact structure and various components are used to generate required torque with target working angle and speed. The weight reduction of structure is carried out using optimization method after the initial design process is complete. The optimization is conducted under the load conditions of stair walking. The optimized design is validated via finite element analysis and experiments. As a result, the weight is reduced using topology and shape optimization but maintaining the safety of structure. Also the space efficiency is improved due to its compact size.

• Journal of Electrical Engineering and Technology
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• v.9 no.2
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• pp.514-522
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• 2014

A new type of high precision electromagnetic suspension (EMS) which can support heavy tray along long stroke rail is proposed in this paper. Compared with the conventional EMS, the suggested moving-core typed EMS has the levitation electromagnets (EMs) on the fixed rail. This scheme has high load capability caused by iron-core and enables simple tray structure. Also it does not have precision degradation caused by heat generation from EMs, which is a drawback of conventional EMS. With these merits, the proposed EMS can be an optimal contactless linear bearing in next generation flat panel display (FPD) manufacturing process if the ability of long stroke movement is proved. So a special Section Switching Algorithm (SSA) is derived from the resultant force and moment equations of the levitated tray which enables long stroke movement of the tray. In order to verify the feasibility of the suggested SSA, a simple test-setup of the EMS with 2 Section-changes is made up and servo-controlled in the simulation and experiment. The simulation shows the perfect changeover the EMs, and the experiment shows overall control performance of under ${\pm}40{\mu}m$ gap deviations. These results reveal that the newly suggested contactless linear bearing can simultaneously achieve high load capability and precision gap control as well as long stroke.