• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.351-352
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• 2009

On-demand ejection of ultra-fine droplets that uses both electrohydrodynamic (EHD) force and mechanical actuation is presented. The liquid meniscus was controlled by a piezoelectric actuator and droplets were ejected by EHD force. Through these effects, it was possible to obtain a high operational jetting frequency of 5kHz with a short delay-time (about 50 us) when compared with existing on-demand EHD jetting methods, such as the pulsating jet mode (3-10 msec) and the pulsed-voltage cone-jet mode(3.6 msec). Also, we obtained ultra-fine droplets at a volume that was at the femto-liter level simultaneously. The jetting characteristics were examined for both hydrophobicity and hydrophilicity of the surface of a capillary.

• 한국자동차공학회논문집
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• 제2권3호
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• pp.33-39
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• 1994

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.

• 한국소음진동공학회논문집
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• 제20권3호
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• pp.279-286
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• 2010

In this paper, we provide a robust track-following controller design method for the stable coarse seek control. Due to the inaccurate velocity control during a coarse seek, the shake of fine actuator is generated and thus a gain-up track-following control is required to complete stably the coarse seek. To this end, a loop gain adjustment algorithm is introduced to estimate accurately the shake of fine actuator. A weighting function can be properly selected from a minimum tracking gain-up open-loop gain, calculated from the estimated shake quantity of fine actuator. A robust tracking gain-up controller is designed by considering a robust $H_{\infty}$ control problem using the weighting function. The proposed design method is applied to the coarse seek control system of an optical rewritable drive and is evaluated through the experimental results.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.68-74
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• 2001

This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMULINK including various functions those are composed of pre-design and system modeling.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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• pp.605-610
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• 1994

This paper discusses the solution to the precise positioning control problem applied to a simple model of a dual stage or redundant positioner. The dual stage actuator presented here uses a VCM(Voice Coil Motor) as a coarse actuator and a piezoelectric actuator as a fine actuator. By adopting controllers with two-degree-of-freedom and by optimizing H$_{2}$ faster precise tracking can be realized. Experimental and numerical results are presented to demonstrate the control effects.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.362-365
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• 2004

'Coil' occupies a much important position in delivering driving force of optical pick-up actuators. Up to now the main stream has been a winding coil type actuator, but actuators using FP-Coil(Fine Pattern Coil) have been considered for the more compacted and simple manufacturing process and have variously spreaded the application fields by product. We have tried to design actuators using PCB-Coil(Printed Circuit Board Coil) which has benefits in terms of price and manufacturing process. Especially this research has two main things those are to reduce the vibration of sub-resonance and to assure the do sensitivity in the performance of asymmetric optical pick-up actuator with PCB-Coil.

• 한국정밀공학회지
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• 제21권3호
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• Journal of Mechanical Science and Technology
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• 제17권11호
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• pp.1616-1627
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• 2003

This paper describes a mini linear optical pickup actuator. To reduce the size, inner yokes are designed to guide the mover and outer yokes of permanent magnets are removed. Magnetic circuit method is used to determine the thrust force. Virtual path method is proposed to analyze the open magnetic circuit analysis. The magnetic circuit of the proposed actuator can be a closed circuit due to the virtual path model of the outer magnetic flux. The validity of virtual path method is evaluated by comparing to the FEM analysis. Structural vibration is investigated using FEM and the design of the mover is modified to improve the vibration characteristic. Dynamic characteristic experiments shows that the performance of the proposed actuator is enough to be used as a coarse and fine seeking actuator simultaneously and the thrust force margin for loading a focusing actuator is guaranteed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.454-457
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• 1995

In optical disc system, tracking actuator is consisted of coarse actuator and fine tracking actuator. This, two-stage actuator, requires many devices and two servos for large stroke and precisional displacement. These complicate configuration increases moving mass. So dynamic characteristics become bad, that is, sensitivity of high frequency gain decrease. In this paper, frequency performance is willing to be better as so one dimensional tracking actuator is designed. In order to investigate the performance of the proposed tracking actuator, the Bode diagram is plotted with Dynamic analyzer and friction characteristic is explained. Finally, tracking error performance is ins investigated into 0.1 .mu.m resolution with MATLAB simulation.