Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Computer Simulation and Control performance evaluation for Feedback System of Ultra Precision Positioning by using Laser Interferometer

Laser Interferometer를 이용한 초정밀위치결정 피드백시스템의 컴퓨터 시뮬레이션 및 제어성능 평가

  • Kim, Jae-Yeol ;
  • Kim, Young-Seok ;
  • Yoon, Sung-Un ;
  • Kwac, Lee-Ku ;
  • Han, Jae-Ho ;
  • You, Sin
  • 김재열 (조선대학교 기계공학부) ;
  • 김영석 (조선대학교 기계공학부) ;
  • 윤성운 (조선대학교 기계공학부) ;
  • 곽이구 (조선대학교 정밀기계공학과 대학원) ;
  • 한재호 (조선대학교 정밀기계공학과 대학원) ;
  • 유신 (목포과학대학)
  • Published : 2001.10.01
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Abstract

This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMULINK including various functions those are composed of pre-design and system modeling.

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