• 전자공학회논문지A
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• 제33A권6호
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• pp.127-135
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• 1996

To increase the sensitivity and the selectivity of the sensors to TMA gas, the composition ratio and the growth conditions of the ZnO films are studied. Annealing of the ZnO films in the various time ranges and temperatures in the oxygen is carried out to enhance the stbility of the electrical resistance. Pt/Ti heater deposited on backside of the substrates in used to control the operating temperature of th esensor. The ZnO thin film sensors doped to 4.0 wt% $Al_{2}$O$_{3}$ 1.0wt.% TiO$_{2}$ and 0.2wt.% V$_{2}$O$_{5}$ exhibited a high sensitivity and an excellent selectivity for TMA gas. The sensors made with the thin films annealed at 700$^{\circ}$C for 60 minutes in the oxygen atmosphere had a good stability and linearity. The heater deposited in the ratio of 1 to 1 (Pt:Ti) had a good heating properties. The sensors fabricated using above conditions showed a good response to the actual gases of a mackerel at a step of deterioration after death.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 제5회 압연심포지엄 신 시장 개척을 위한 압연기술
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• pp.249-257
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• 2004

Drying and curing characteristics of PCM resins using the induction heater and short-wave infrared emitter module was studied to develop a compact oven system for the high speed CCL and post-treatment equipment. Drying of the polyester resins using the induction heater and infrared heater showed that the blistering tendency of polyester resin coating increased regardless of additives and colors of resins as the heating rate and/or dry film thickness increased. The blistering of polyester resin coating layer occurred when the heating speed was over than $25^{\circ}C/sec$ for the dry film thickness of $19\~20um$, which is the typical thickness of finish coating in CCL. So did it when the heating speed was over than $40^{\circ}C/sec$ for the dry film thickness over than 10 um. The heating efficiency of paint coated steels by the infrared heating was strongly dependent on the colors of paint coating and generally increased for the dark surface and/or coating. But the faster drying of the PCM resin coatings increased the blistering tendency of coating layer. The blistering limit for the typical finish coating by the infrared heating was estimated as the heating rate slower than $20^{\circ}C/sec$ regardless of colors of PCM resins.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.254-259
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• 2005

In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential 3$\omega$ method. Also, verification of differential 3$\omega$ method has been accomplished with various proposed criteria. The target film for measurement is 300 nm silicon dioxide and this thin film is covered with various thicknesses of upper protective layer. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. However, the verification of differential 3$\omega$ method has not been conducted. Thus we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential 3$\omega$ method is verified to be reliable as long as the proposed preconditions are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between upper protective layer thickness and width of the heater line due to heat spreading effect.

• 한국광학회지
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• 제19권4호
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• pp.315-319
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• 2008

열광학 장주기 격자를 이용한 노치 필터의 파워 소모를 이론적으로 살펴 보았다. 여기서 열광학 장주기 격자는 주기적인 히터들과 패드들로 구성된 히터 배열에 의해 유발된다. 히터 배열에서 소모되는 파워는 열광학 장주기 격자를 유발하는 줄(joule) 열로 전환되기 때문에, 그 파워를 조절함으로써 노치 필터의 특성을 동적으로 제어할 수 있다. 적절한 결합 효율을 얻기 위해 히터 배열에 가하는 파워는 히터 배열의 인자들에 의존하는데, 이 인자들은 히터의 폭과 길이, 패드의 폭, 그리고 히터 배열을 구성하는 금속 박막의 두께이다. 이 인자들이 파워 소모에 미치는 영향을 이론적으로 해석하는 근사적인 방법을 설명하고, 설명한 방법을 사용하여 인자들의 변화에 따른 파워 소모의 변화를 해석한다. 해석 결과로부터 파워 소모를 줄이기 위해 필요한 인자 선택의 기준을 도출한다.

• 전기전자학회논문지
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• 제20권4호
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• pp.412-415
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• 2016

본 연구에서는 노인의 온열치료에 적용가능한 웨어러블 면상발열체를 제작하고, 그 발열특성을 조사하였다. 웨어러블 면상발열체는 인듐 주석 산화물 나노입자를 유리섬유위에 코팅하고, 에코플렉스 안에 삽입하여 제작하였다. 제작된 면상발열체는 30%의 신축 스트레인상태에서도 발열온도 변화가 10%이내로 안정적으로 동작하였다. 또한 웨어러블 면상발열체를 사람의 손목에 부착하여 동작시켰을 때, 2분 안에 손목의 온도가 $35^{\circ}C$에서 $43^{\circ}C$로 상승하였다.

• 정보저장시스템학회논문집
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• 제2권1호
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• pp.85-90
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• 2006

In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential $3\omega$ method. Also, verification of differential $3\omega$ method has been accomplished with various proposed criteria. The target film for the measurement is 300 nm thick silicon dioxide which is covered with upper protective layer of various thicknesses. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. Since the verification of differential $3\omega$ method has not been conducted yet, we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential $3\omega$ method is verified to be reliable as long as the proposed preconditions of the samples are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between thickness of the upper protective layer and width of the heater line due to heat spreading effect.

• Transactions on Electrical and Electronic Materials
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• 제17권4호
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• pp.189-195
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• 2016

Micro Hotplate (MHP) is the key component in micro-sensors, particularly gas sensors. Indeed, in metal oxide gas sensors MOX, micro-heater is used as a hotplate in order to control the temperature of the sensing layer which should be in the requisite temperature range over the heater area, so as to detect the resistive changes as a function of varying concentration of different gases. Hence, their design is a very important aspect. In this paper, we have presented the design and simulation results of a meander micro heater based on three different materials - platinum, titanium and tungsten. The dielectric membrane size is 1.4 mm × 1.6 mm with a thickness of 1.4 μm. Above the membrane, a meander heating film was deposed with a thickness of 100 nm. In order to optimize the geometry, a comparative study by simulating two different heater thicknesses, then two inter track widths has also been presented. Power consumption and temperature distribution were determined in the micro heater´s structure over a supply voltage of 5, 6, and 7 V.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.798-807
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• 2004

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

• KSTLE International Journal
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• 제7권1호
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• pp.22-26
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• 2006

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

• 설비공학논문집
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• 제11권5호
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• pp.570-578
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• 1999

An experimental study has been performed on heat and mass transfer in a falling film absorber with a strong lithium bromide solution in small-sized household absorption chiller/heater. Components were concentrically arranged in a cylindrical form. from the center, low temperature generator, absorber and evaporator. This arrangement of helical-typed heat exchangers allows to make the machine much more compact than conventional one. Experimental measurements were conducted with a helical absorber and the obtained data were compared with data in the literatures. The comparison revealed that the helical absorber tube provides a similar performance to existing tube bundle absorber in heat and mass transfer. As a result, the heat and mass transfer characteristics of helical type absorber showed the possibility of the reduction in size and weight of small] capacity absorption chiller/heater.