Effect of Al content and heat treatment on the temperature coefficient of resistance of Cr1-xAlxN film deposited by magnetron-sputtering (마그네트론 스퍼터링에 의해 제조된 Cr1-xAlxN 박막의 Al 함량과 열처리에 따른 온도저항계수)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2012.11a
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- pp.187-188
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- 2012