• JSTS:Journal of Semiconductor Technology and Science
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• v.4 no.2
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.

• Corrosion Science and Technology
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• v.5 no.3
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• pp.112-116
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• 2006

This study has been conducted to monitor the corrosion rate of cathodically protected structure and corrosion inhibited system using multi-line thin-film electrical resistance (TFER) sensor in various environments. The field test data of TFER sensor for the corrosion monitoring of cathodically protected underground pipeline in soil environments and of corrosion inhibited gas heaters were also presented. The sensor was found to be a powerful method to commit the sensitive pick-up of small corrosion rate which can be observed in the cathodically protected and corrosion inhibited systems.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.12 no.1
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• pp.51-57
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• 2013

Leak detection, the system is controlled by humanity's precious water resources, prepare for natural disasters and prevent damage to buildings and various industrial facilities. Especially because it causes serious environmental pollution, chemicals or oil spills, leak detection of various liquid(oil, water), the point at which the liquid leak is detected early on, and minimize environmental pollution, prevent damage of the equipment due to the leak, and the country's precious water resources to be used safely. In this paper, we solve these problems by using specialized film sensor, any person who is not a skilled technician, equipment or walls anywhere can be easily installed. also reduce unnecessary circuit, If film sensor is connected to operate, have a big competitive price, the detection of liquid and the surrounding environment according to, the sensor film that can set the sensitivity control, and monitoring system was implemented.

• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.262-267
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• 2000

This paper describes a weight in motion(WIM) sensor to measure the weight of a vehicle in motion. The main sensing element of the WIM sensor is the PVDF(Polyvinylidene fluoride) film that shows rapid response to an external excitation. Due to the property of rapid response, it is possible to measure the weight of a vehicle in motion with high speed. In the development of the WIM sensor, the dominant target value was the uniformity of the sensor. To increase the uniformity, We employed shrinkable tube made of rubber to enhance the uniformity, and performed the rolling of the brass tube repeatedly. The uniformity of the sensor was examined experimentally. It was comparable to that of a WIM sensor of the MSI which was the benchmark of this development. This paper also describes the mechanical modeling of the sensor and the suitable charge amplifier for the sensor.

• Proceedings of the IEEK Conference
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• 2004.06b
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• pp.387-390
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• 2004

Thick film alcohol gas sensors were fabricated. Their electrical properties and gas sensing characteristics were investigated. The sensitivity of $1wt.\%$ Pd-doped ${\gamma}-Fe_2O_3$ thick film heat treated at $400^{\circ}C$, 2hrs was $74\%$ to 500ppm alcohol gas at the operating temperature of $250^{\circ}C$. The selectivity of the film to alcohol was good. It showed fast response time to low concentrations of alcohol in air, hence this sensor can be used as a breath sensor.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.3
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• pp.268-274
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• 2004

Patch type piezo-polymer sensors for smart structures were experimented to detect elastic wave. The pencil lead braking test was performed to analyze the characteristics of patch-type piezo-polymer sensors such as polyvinyliden fluoride (PVDF) and polyvinylidene fluoride trifluorethylene (P(VDF-TrFE)) for several test specimens with various elastic wave velocities and acoustical impedances. The characteristics of the patch-type piezo-polymer sensor were compared with the commercial PZT acoustic emission (AE) sensor. The vacuum grease and epoxy resin were used as a couplant for the acoustic impedance matching between the sensor and specimen. The peak amplitude of elastic wave increased as the diameter of piezo-film and acoustical impedance of the specimen increased. The frequency detection range of the piezo-film sensors decreased with increasing diameter of the piezo-film sensor. The P(VDF-TrFE) sensor was more sensitive than the PVDF sensor.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.272-272
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• 2014

SnO thin films, 100 nm in thickness, were deposited on glass substrates by RF magnetron sputtering. A stack structure of $SnO_2/SnO$, where few nanometers of $SnO_2$ were determined on the SnO thin film by X-ray photoelectron spectroscopy. In addition, XPS depth profile analysis of the pristine and heat treated thin films were introduced. The electrical behavior of the as-sputtered films during the annealing was recorded to investigate the working conditions for the SnO sensor. Subsequently, The NH3 sensing properties of the SnO sensor at operating temperature of $50-200^{\circ}C$ were examined, in which the p-type semiconducting sensing properties of the thin film were noted. The sensor shows good sensitivity and repeatability to $NH_3$ vapor. The sensor properties toward several gases like $H_2S$, $CH_4$ and $C_3H_8$ were also introduced. Finally, a sensing mechanism was proposed and discussed.