• Polymer(Korea)
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• v.32 no.5
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• pp.497-500
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• 2008

Polystyrene foam (styrofoam) was treated with low-temperature oxygen plasma by means of immobilization and grafting techniques in order to modify its hydrophobic surface property to hydrophilic one using hydrophilic monomers of acrylic acid and acrylamide, and its surface chemical structure, morphology, and hydrophilicity were examined by ESCA, field emission scanning electron microscope (FESEM), and contactangle meter. The experimental evidences, such as the increases of O/C and N/C ratios in ESCA spectrum, thin film deposition, decrease in contact-angle, strongly suggested that the plasma treatments were useful methods for the preparation of hydrophilic surface. Contact angle diminished drastically from $84^{\circ}$ to $18{\sim}19^{\circ}$. Acrylamide, compared to acrylic acid, appeared to play a decisive role, and to be more powerful agent for improving its surface hydrophilicity.

• Corrosion Science and Technology
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• v.21 no.6
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• pp.476-486
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• 2022

Recently, aluminum 6061 instead of copper alloy is used for cooling heat exchangers used in the internal combustion of engines due to its economic feasibility, lightweight, and excellent thermal conductivity. In this study, aluminum 6061 alloy was anodized with oxalic acid, phosphoric acid, or chromic acid as an anodizing electrolyte at the same concentration of 0.3 M. After the third anodization, FDTS, a material with low surface energy, was coated to compare hydrophobic properties and anti-icing characteristics. Aluminum was converted into an anodization film after anodization on the surface, which was confirmed through Energy Dispersive X-ray Spectroscopy (EDS). Pore distance, interpore distance, anodization film thickness, and solid fraction were measured with a Field Emission Scanning Electron Microscope (FESEM). For anti-icing, hydrophobic surfaces were anodized with oxalic acid, phosphoric acid, or chromic acid solution. The sample anodized in oxalic acid had the lowest solid fraction. It had the highest contact angle for water droplets and the lowest contact hysteresis angle. The anti-icing contact angle showed a tendency to decrease for specimens in all solutions.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.441-442
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• 2012

SnNb2O6 nanoplates were prepared by a solvothermal synthesis with water and ethanol mixed solvent. For improvement of their properties, as-prepared SnNb2O6 nanoplates also were calcined. The prepared powder was characterized by X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), Transmission electron microscope (TEM), UV-vis spectroscopy, Raman spectrometer, Brunauer-Emmett-Teller (BET). The calcined nanoplates have a smaller surface area than the as-prepared nanoplates have. Nevertheless, in the case of the optical absorption properties, the calcined nanoplates could absorb more photon energy, due to their smaller band gaps. The Raman analysis revealed that the Nb-O bond length in the calcined nanoplates was longer than that in the as-prepared nanoplate. The higher optical absorption capability of the calcined nanoplates was attributed to the local structure variation within them. Furthermore the high crystallinity of the calcined nanoplates is effective in improving the generation of charge carriers. So, It was found that the calcined nanoplates exhibited superior photocatalytic activity for the evolution of H2 from an aqueous methanol solution than the as-prepared nanoplates under UV and visible irradiation. Therefore, the enhanced photocatalytic activity of the calcined nanoplate powder for H2 evolution was mainly attributed to its high crystallinity and improved optical absorption property resulting from the variation of the crystal structure.

• Applied Microscopy
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• v.40 no.4
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• pp.177-183
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• 2010

A focused ion beam (FIB) system produces a beam of positive ions (usually gallium) which are heavier than electrons and can be focused by electrostatic lenses into a spot on the specimen. With its ability milling of the specimen material by 10 to 100 nm with each pass of the beam, FIB is widely adopted in materials science, semiconductor industry, and ceramics research. Recently, FIB has been increasingly employed in the field of biomedical sciences. Here we provide a brief introduction to FIB and its applications for a wide variety of biomedical research. The surface of specimen can be in situ processed and quasi-real time visualized by two beam combination of FIB and field emission scanning electron microscope (FESEM). Due to its milling process, internal structures can be exposed and analyzed: yeast cells, fungus-inoculated wheat leaf, mannitol particles in inhalation aerosols, and oyster shell. Serial blockface tomography with the system kindles 3-dimensional reconstruction researches in the realm of nervous system and life sciences. Two-beam system of FIB/FESEM is a versatile tool to be utilized in the biomedical sciences, especially in 3-dimensional reconstruction studies.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.4
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• pp.49-53
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• 2011

High-speed Cu filling into a through-silicon-via (TSV) and simplification of bumping process by electroplating for three dimensional stacking of Si dice were investigated. The TSV was prepared on a Si wafer by deep reactive ion etching, and $SiO_2$, Ti and Au layers were coated as functional layers on the via wall. In order to increase the filling rate of Cu into the via, a periodic-pulse-reverse wave current was applied to the Si chip during electroplating. In the bumping process, Sn-3.5Ag bumping was performed on the Cu plugs without lithography process. After electroplating, the cross sections of the vias and appearance of the bumps were observed by using a field emission scanning electron microscope. As a result, voids in the Cu-plugs were produced by via blocking around via opening and at the middle of the via when the vias were plated for 60 min at -9.66 $mA/cm^2$ and -7.71 $mA/cm^2$, respectively. The Cu plug with a void or a defect led to the production of imperfect Sn-Ag bump which was formed on the Cu-plug.

• Journal of the Korean Wood Science and Technology
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• v.39 no.2
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• pp.187-195
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• 2011

In this study, dilute acid pretreatment of $Liriodendron$ $tulipifera$ was performed for enzymatic hydrolysis. As the pretreatment temperature was increased, enzymatic hydrolysis and enzyme adsorption yield also increased. The highest enzymatic hydrolysis yield was 57% (g/g) and enzyme adsorption was 44% (g/g). Enzymatic hydrolysis yield was determined with weight loss of pretreated biomass by enzyme, and enzyme adsorption was a percentage of enzyme weight attaching on pretreated biomass compared with input enzyme weight. When $L.$ $tulipifera$ was pretreated with 1% sulfuric acid at $160^{\circ}C$ for 5 min., hemicellulose was significantly removed in pretreatment, but the lignin contents were constant. Other changes in surface morphology were detected on biomass pretreated at $160^{\circ}C$ by a field emission scanning electron microscope (FESEM). A large number of spherical shapes known as lignin droplets were observed over the entire biomass surface after pretreatment. Hemicellulose removal and morphological changes improved enzyme accessibility to cellulose by increasing cellulose exposure to enzyme. It is thus evidence that enzyme adsorption is a significant factor to understand pretreatment effectiveness.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.32.2-32.2
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• 2011

반도체 생산공정에서 CMP (Chemical-mechanical planarization) 공정은 우수한 전기전도성 재료인 Cu의 사용과 다층구조의 소자를 형성하기 위해서 도입되었으며, 최근 소자의 집적도가 증가함에 따라 CMP 공정 비중은 점점 높아지고 있다. Cu CMP 공정에서 연마제인 슬러리는 금속 표면과의 물리적 화학적 반응을 동시에 사용하여 표면을 연마하게 되며, 연마특성을 향상시키기 위해 산화제, 부식방지제, 분산제 및 다양한 계면활성제가 첨가된다. 하지만 슬러리는 Cu 표면을 평탄화하는 동시에 오염입자, 유기오염물, 스크레치, 표면부식 등을 발생시키며 결과적으로 소자의 결함을 야기시킨다. 특히 부식방지제로 사용되는 BTA (Benzotriazole)은 Cu CMP 공정 중 Cu-BTA 형태로 표면에 흡착되어 오염원으로 작용하며 입자오염을 증가시시고 건조공정에서 물반점 등의 표면 결함을 발생시킨다. 이러한 문제점을 해결하기 위해 Cu 표면에서 식각과 부식반응을 최소화하며, 오염입자 제거 및 유기오염물을 효과적으로 제거하기 위한 Post-CMP 세정 공정과 세정액 개발이 요구된다. 본 연구에서는 오염입자 및 유기물 제거와 동시에 표면 거칠기와 부식현상을 제어할 수 있는 post Cu CMP 세정액을 개발 평가하였다. 오염입자 및 유기오염물을 제거하기 위해서 염기성 용액인 TMAH 사용하였으며, Cu 이온을 용해할 수 있는 Chelating agent와 표면 부식을 억제하는 부식 방지제를 사용하여 세정액을 합성하였다. 접촉각 측정과 FESEM(field Emission Scanning Electron Microscope) 분석을 통하여 CMP 공정에서 발생하는 유기오염물과 오염입자의 흡착과 제거를 확인하였으며 Cu 웨이퍼 세정 전후의 표면 거칠기의 변화와 식각량을 AFM(Atomic Force Microscope)과 4-point probe를 사용하여 각각 평가하였다. 또한 세정액 내에서의 연마입자의 zeta-potential을 측정 및 조절하여 세정력을 향상시켰다. 개발된 세정액과 Cu 표면에서의 화학반응 및 부식방지력은 potentiostat를 이용한 전기화학 분석법을 통해서 chelating agent와 부식방지제의 농도를 최적화 시켰다. 개발된 세정액을 적용함으로써 Cu-BTA 형태의 유기오염물과 오염입자들이 효과적으로 제거됨을 확인하였다.

• Journal of Adhesion and Interface
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• v.12 no.4
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• pp.144-150
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• 2011

The effect of low profile agent and release agent on the surface and mechanical properties of bulk mold compound were investigated. Atomic content and contact angle of surface were characterized using X-ray photoelectron spectroscopy and contact anglemeter. Surface morphology and surface roughness were obtained using field emission scanning electron microscope and atomic force microscope, respectively. As increasing the low profile agent from 0 to 9.2 wt%, the volume shrinkage and surface roughness decreased from 0.35% to 0.05%, and from $0.27{\mu}m$ to $0.12{\mu}m$, respectively. The increase of release agent from 1.8 wt% to 3.6 wt% resulted in the migration of release agent to sample surface and it increased the surface roughness. The flexural strength and impact strength were decreased approximately 30% as the low profile agent increasing from 5.0 wt% to 9.0 wt%.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.200.2-200.2
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• 2013

Yttrium (Y)이 도핑 된 ZnO 나노 구조물을 수열합성법으로 제작하였다. 먼저 졸겔법으로 SiO2/Si 기판 위에 seed layer (Y-doped ZnO ; Y0.02Zn0.98O)를 제작하였으며 5번의 코팅을 진행하여 박막의 두께는 약 180 nm로 측정이 되었다. 그 후 진공 분위기에서 RTA를 이용하여 $500^{\circ}C$에서 3분간 열처리가 진행되었다. 이어서 수열합성법으로 mole 농도를 0.5~1.0 M 범위에서 변화시키며 YZO 시료를 제작하였다. X-ray diffraction (XRD)을 통해서 Y2O3 또는 결함과 관련된 피크는 관찰이 되지 않았으며, 모든 구조물에서 압축응력이 존재하는 알 수 있었으며, field emission scanning electron microscope (FESEM)에서 나노 구조물의 크기와 형태는 수열합성법의 mole 농도에 많은 영향을 받는 것으로 나타났다. Hall effect 측정을 통해서 모든 구조물은 n-type 전도 특성을 가지는 것으로 나타났다. 또한 광학적 특성인 photoluminescence (PL)에서는 수열합성법의 화학식을 고려할 때 Zn가 rich한 상태에서는 Zn interstitial로 존재하는 것으로 나타났고, mole 농도가 높아 질수록 free exciton에 의한 재결합인 UV emission이 우세하게 나타났다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.3
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• pp.112-117
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• 2018

The metal alkoxide, CuCo-glycerate nanospheres (NSs), were successfully synthesized as Cu-Co bimetallic sulfides hierarchical multi-shelled hollow nanospheres ($CuCo_2S_4$ HMHNSs) through solvothermal synthesis. In this reaction mechanism, the solvothermal temperature and the amount of glycerol as a cosurfactant play significant role to optimize the morphology of CuCo-glycerate NSs. Furthermore, $CuCo_2S_4$ HMHNSs were obtained under optimized sulfurization reaction time of 10 h via anion exchange reaction between glycerate and sulfur ions. Finally, the structural and chemical compositions of CuCo-glycerate NSs and $CuCo_2S_4$ HMHNSs were confirmed through field emission scanning electron microscopy (FESEM), transmission electron microscope (TEM), X-ray diffraction (XRD) and electrochemical performances.