• Applied Microscopy
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• 제46권3호
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• pp.155-159
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• 2016

This paper analyses the relationship between the distribution of a dielectric layer on the apex of a metal field electron emitter and the distribution of electron emission. Emitters were prepared by coating a tungsten emitter with a layer of epoxylite resin. A high-resolution scanning electron microscope was used to monitor the emitter profile and measure the coating thickness. Field electron microscope studies of the emission current distribution from these composite emitters (Tungsten-Clark Electromedical Instruments Epoxylite resin [Tungsten/CEI-resin emitter]) have been carried out. Two forms of image have been observed: bright single-spot images, thought to be associated with a smooth substrate and a uniform dielectric layer; and multi-spot images, though to be associated with irregularity in the substrate or the dielectric layer.

• 진공이야기
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• 제2권1호
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• pp.17-20
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• 2015

In this article, a historical and scientific review on the development of an ultrafast electron microscope is supplied, and the challenges in further improvement of time resolution under sub-picosecond or even sub-femtosecond scale is reviewed. By combining conventional scanning electron microscope and femtosecond laser technique, an ultrafast electron microscope was invented. To overcome its temporal resolution limit which originates from chromatic aberration and Coulomb repulsion between individual electrons, a generation of electron pulse via strong-field photoemission has been investigated thoroughly. Recent studies reveal that the field enhancement and field accumulation associated with the near-field formation at sharply etched metal nanoprobe enabled such field emission by ordinary femtosecond laser irradiation. Moreover, a considerable acceleration reaching 20 eV with near-infrared laser and up to 300 eV acceleration with mid-infrared laser was observed, and the possibility to control the amount of acceleration by varying the incident laser pulse intensity and wavelength. Such findings are noteworthy because of the possibility of realizing a sub-femtosecond, few nanometer imaging of nanostructured sample.in silicon as thermoelectric materials.

• Bulletin of the Korean Chemical Society
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• 제34권3호
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• pp.892-898
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• 2013

A field emission projection microscope was constructed to investigate the atomic and chemical-bonding structure of molecules using electron in-line holography. Fringes of carbon nanotube images were found to be interferograms equivalent to those created by the electron biprism in conventional electron microscopy. By exploiting carbon nanotubes as the filament of the electron biprism, we measured the transverse coherence length of the electron beam from tungsten field emitters. The measurements revealed that a partially coherent electron-beam was emitted from a finite area.

• Applied Microscopy
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• 제47권1호
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• pp.55-62
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• 2017

This paper describes experiments aimed at characterizing the behavior of field electron emitters fabricated by coating carbon fibers with epoxylite resin. Polyacrylonitrile carbon fibers of type VPR-19, thermally treated at $2,800^{\circ}C$, were used. Each was initially prepared in a "uncoated" state, by standard electro polishing and cleaning techniques, and was then examined in a scanning electron microscope. The fiber was then baked overnight in a field electron microscope (FEM) vacuum chamber. Current-voltage characteristics and FEM images were recorded on the following day or later. The fiber was then removed from the FEM, coated with resin, "cured" by baking, and replaced in the FEM. After another overnight bake, the FEM characterization measurements were repeated. The coated fibers had significantly better performance than uncoated fibers. This confirms the results of earlier experiments, and is thought to be due in part to the formation of a conducting channel in the resin over layer. For the coated fiber, lower voltages were needed to obtain the same emission current. The coated fibers have current-voltage characteristics that show smoother trends, with greater stability and repeatability. No switch-on phenomena were observed. In addition, the emission images on the phosphor-coated FEM screen were more concentrated, and hence brighter.

• Applied Microscopy
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• 제33권2호
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• pp.93-104
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• 2003

본고에서는 유리의 확대력 발견으로부터 현재까지 이르는 전자현미경과 관련된 중요한 이론 및 개발 과정들을 시대별로 검토하였다. Jansen에 의한 최초의 광학현미경 제작으로부터, 분해능의 한계를 해결하려는 노력들, 짧은 광원을 찾는 노력, 그리고 보다 양질의 해상력과 확대력을 얻으려는 여러 과학자들의 부단한 노력들을 특히 전자현미경 원리 및 TEM과 SEM의 초기 개발과정에 초점을 맞추어 생명과학적 측면에서 고찰하고, 아울러 우리나라의 전자현미경 도입 과정을 살펴보았다.

• Applied Microscopy
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• 제46권4호
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• pp.227-237
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• 2016

This investigation deals with the process of field electron emission from composite microemitters. Tested emitters consisted of a tungsten or carbon-fiber core, coated with a dielectric material. Two coating materials were used: (1) Clark Electromedical Instruments Epoxylite resin and (2) Epidian 6 Epoxy resin (based on bisphenol A). Various properties of these emitters were measured, including the current-voltage characteristics, which are presented as Fowler-Nordheim plots, and the corresponding electron emission images. A field electron microscope with a tip (cathode) to screen (anode) distance of 10 mm was used to electrically characterize the emitters. Measurements were carried out under ultra-high vacuum conditions with a base pressure of $10^{-6}$ Pascal ($10^{-8}$ mbar).

• Applied Microscopy
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• 제46권4호
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• pp.244-252
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• 2016

This paper describes a new design of carbon nanotube tip. $Nanocly^{TM}$ NC 7000 Thin Multiwall Carbon Nanotubes of carbon purity (90%) and average diameter tube 9.5 nm with a high aspect-ratio (>150) were used. These tips were manufactured by employing a drawing technique using a glass puller. The glass microemitters with internal carbon nanotubes show a switch-on effect to a high current level (1 to $20{\mu}A$). A field electron microscope with a tip (cathode)-screen (anode) separation at ~10 mm was used to characterize the electron emitters. The system was evacuated down to a base pressure of ${\sim}10^{-9}$ mbar when baked at up to ${\sim}200^{\circ}C$ overnight. This allowed measurements of typical Field Electron Emission characteristics; namely the current-voltage (I-V) characteristics and the emission images on a conductive phosphorus screen (the anode). Fowler-Nordheim plots of the current-voltage characteristics show current switch-on for each of these emitters.

• 대한기계학회논문집A
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• 제30권12호
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• pp.1557-1563
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• 2006

A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

• 한국정밀공학회지
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• 제24권9호
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1875-1878
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with electron beam gun head unit is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included ceramic isolation plate and main body which are essentially constructed for electron beam gun head unit are designed and manufactured. And this electron beam gun head unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.