• 한국정밀공학회지
• /
• 제26권3호
• /
• pp.25-31
• /
• 2009

Femto-second laser ablation with the various feed velocities of the Invar alloy and the micro surface milling for the processing condition were studied. We used a regenerative amplified Ti:sapphire laser with a 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Femto-second laser pulse was irradiated on the Invar alloy with the air blowing at the condition of various laser peak powers and feed velocities. An ablation characteristic according to feed velocity of the Invar alloy was appeared as the non-linear type at different zone of energy fluence. The micro surface milling of the Invar alloy using a mapping method was investigated. The optimal condition of micro surface milling was laser peak power of 22.8mW, feed velocity of 1 mm/s, beam gap of $1{\mu}m$. With the optimal processing condition, the fine rectangular shape without burr and thermal damage was achieved. Using the femto-second laser system, it demonstrates excellent tool for micro surface milling of the Invar alloy without heat effects and poor edge.

• 한국정보통신학회:학술대회논문집
• /
• 한국해양정보통신학회 2001년도 춘계종합학술대회
• /
• pp.479-482
• /
• 2001

본 연구는 DC 전압에 따른 테라헤르츠 전자기 펄스의 변화를 측정하였다. 펨토초(femto-second)로 여기 되는 레이저 펄스를 transmitter chip에 입사시키고, 두 개의 transmission line에 DC 전압을 최소 5 Volt에서 최대 90 Volt 까지 변화시켜 테라헤르츠 전자기 펄스의 크기와 스팩트럼의 변화를 관찰하였다. 전압이 증가할수록 상대적으로 스펙트럼의 크기가 고주파 쪽으로 증가되었으며, 신호 대 잡음비(SNR) 역시 250:1에서 10,000:1로 개선 할 수 있음을 알 수 있었다.

• 조명전기설비학회논문지
• /
• 제18권6호
• /
• pp.31-36
• /
• 2004

본 논문에서는 인체에 무해하며 고분해능의 단층영상과 저가격 및 소형으로 제작이 가능하여 전세계적으로 많은 연구가 진행중인 광영상 단층촬영기(Optical coherence tomography system : OCT)의 분해능 향상에 관한 것이다. 고분해능 단층영상을 얻기 위하여 펨토초 레이저를 이용한 OCT 시스템을 구성하였다. 펨토초레이저의 펄스폭을 측정하기 위하여 자체상관법(Autocorrelator function)를 이용하여 펄스폭을 측정하였으며, 이론식과 기준시편을 이용한 측정으로 실제 분해능을 측정하였다. 또한 SLD(superluminescent diode) 광원과의 비교분석을 통해 분해능이 약 1.5배 향상됨을 확인하였으며 단층영상 비교의 경우 보다 선명한 단층영상을 얻을 수 있을 것이다.

• 전기전자학회논문지
• /
• 제9권2호
• /
• pp.115-122
• /
• 2005

모드잠금 고리형 광섬유 레이저 출력의 단열 쏠리톤 펄스압축에 의해 $1545{\sim}1550\;nm$ 파장영역에서 400 ??토초의 안정성이 뛰어난 변환제한급의 10 GHz의 광 펄스를 발생시켰다. 특별한 슈퍼모드 선택소자를 사용하지 않고도 -123 dB/Hz 이하의 슈퍼모드 비팅 잡음 억제에 의해 $1\;kHz{\sim}100\;MHz$의 잡음대역에서 100 ??토초 미만의 낮은 시간 지터를 얻었다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.569-572
• /
• 2005

Technological feasibility of using recently-available femtosecond ultra short pulse lasers for advanced precision length metrology is investigated with emphasis on absolute distance measurements with $10{\mu}m$ ??resolution over extensive ranges. The idea of using femtosecond lasers for the measurement of absolute distances is based on the fact that a short pulse train is a mode-locked combination of discrete monochromatic light components spanning a wide spectral bandwidth. The synthetic wavelength is created from the repetition frequency, $f_r$ of the femtosecond laser and for more precise resolution, higher-order harmonics of the repetition frequency may be selected as the synthetic wavelength by using appropriate electronic filters.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2005년도 추계학술대회 논문집
• /
• pp.171-174
• /
• 2005

To improve the strength of glass is being studied in order to contribute to weight saving of flat panel displays. Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness by the formation of a heterogeneous Phase inside glass. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by crystallization using femto-second laser pulse. UV/VIS, Spectroscope, XRD, nano-indenter and SEM etc. irradiation of laser pulse without heat-treated samples was analyzed. Samples irradiated by laser had higher value$(4.4\~4.56{\ast}10-3Pa)$ of elastic modulus which related with strength of glass than values heat-treated samples and these are $1.2\~1.5$ times higher values than them of mother glass. This process can be applicable to the strengthening of thinner glass plate, and it has an advantage over traditional heat-treatment and ion-exchange method.

• 한국세라믹학회지
• /
• 제42권6호
• /
• pp.377-383
• /
• 2005

Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness, as compared with the original glass. This improvement is due to the microstructure consisting of very small crystals. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by the crystallization using Femto second laser Pulses. Through the UV/VIS spectroscope, XRD, Nano-indenter and SEM etc., heat-treated and irradiation of laser pulses without heat-treated samples were analyzed. Two kinds of samples, heat-treated and laser irradiated without heat-treated samples, showed the peaks in the same wavelength near 360 nm. Especially, samples irradiated by 140 mW laser with XYZ stage having at the rate of 100$\~$l000 $\mu$m/s had the largest absorption peak among them, and heat-treated samples was shown lower absorption range than over 90 mW laser irradiated samples. Moreover, samples irradiated by laser had higher values ($4.4\~4.56{\times}10^{-3}(Pa)$) of elastic modulus which related with strength of glass than values of heat-treated samples and these are 1.2$\~$1 .5 times higher values than them of mother glass.

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2006년 추계학술발표대회 개요집
• /
• pp.190-192
• /
• 2006

The 3-dimensional(3D) chip stacking technology is one of the leading technologies to realize a high density and high performance system in package(SIP). It could be found that it is the advanced process of through-hole via formation with the minimum damaged on the Si-wafer. Laser ablation is very effective method to penetrate through hole on the Si-wafer because it has the advantage that formed under $100{\mu}m$ diameter through-hole via without using a mask. In this paper, we studied the optimum method for a formation of through-hole via using femto-second laser heat sources. Furthermore, the processing parameters of the specimens were several conditions such as power of output, pulse repetition rate as well as irradiation method and time. And also the through-hole via form could be investigated and analyzed by microscope and analyzer.

• 한국정밀공학회지
• /
• 제27권11호
• /
• pp.17-23
• /
• 2010

Titanium alloy is one of the hard processing materials made by the traditional manufacturing method because of the excellent mechanical strength. Ablation of titanium alloy is investigated by using a femtosecond laser which is a regenerative amplified Ti:sapphire laser with 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Experiments are carried out under various ablation conditions with different pulse overlap ratios for the rectangular shape and micro hole. Test results show that the ablation characteristic according to pulse overlap ratio of titanium alloy seems to be as non-linear type at the different zone of energy fluence. The optimal condition of rectangular shape processing is obtained at the laser peak power 1.3mW, pulse overlap ratio of 90%, beam gap of $1\;{\mu}m$. The micro hole has a good quality from the pulse overlap ratio of 99% at the same laser peak power. With the optimal processing condition, the fine rectangular shape and micro hole without burr and thermal damage are achieved.

• 마이크로전자및패키징학회지
• /
• 제14권3호
• /
• pp.29-36
• /
• 2007

본 논문에서는 펨토초 레이저를 사용하여 정밀하고 효과적인 레이저 어블레이션 작업이 가능한지를 확인하기위한 수치 해석 및 가공 작업을 수행하였다. 이를 위하여 Si 재료 내부의 에너지 전달 메커니즘에 대한 수치해석을 실시하였으며, Si 웨이퍼에 각각 다른 조건으로 적용된 레이저 플루언스 값으로 $100\;{\mu}m$ 직경의 미세 관통 홀을 형성한 후, 광학현미경과 3차원 표면 형상 측정 장비를 사용하여 형성된 미세 관통 홀의 가공성과 열영향부의 발생 정도를 관찰하고 분석하였다. 실험 결과를 통해 레이저 플루언스 조건에 따른 열영향부의 발생 정도를 분석하였으며, 또한 최소한의 열영향부를 가지며 우수한 홀 가공성을 보이는 최적의 미세 관통 홀 가공 조건을 도출하였다.