• Title/Summary/Keyword: FeRAM

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A study on the characteristics of MEM structure of $SrBi_2Ta_2O_9$ thin films by RE magnetron sputtering (RF 마그네트론 스퍼터링법에 의한 MFM 구조의 $SrBi_2Ta_2O_9$ 박막 특성에 관한 연구)

  • 이후용;최훈상;최인훈
    • Journal of the Korean Vacuum Society
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    • v.9 no.2
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    • pp.136-143
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    • 2000
  • $SrBi_2Ta_2O_9;(SBT)$ films were deposited on p-type Si(100) at room temperature by rf magnetron sputtering method to confirm the possibility of application of $Pt/SBT/Pt/Ti/SiO_2/Si$ structure (MFM) for destructive read out ferroelectric RAM (random access memory). Their structural characteristics with the various annealing times and Ar/$O_2$ gas flow ratios in sputtering were observed by XRD (X-ray diffractometer) and the surface morphologies were observed by FE-SEM (field emission scanning electron microscopy), and their electrical properties were observed by P-V (polarization-voltage measurement) and I-V (current-voltage measurement). The Ar/$O_2$ gas flow ratios of sputtering gas were changed from 1 : 4 to 4 : 1 and SBT thin films were deposited at room temperature. The films show (105), (110) peaks of SBT by XRD measurement. SBT thin films deposited at room temperature were crystallized by furnace annealing at 80$0^{\circ}C$ in oxygen atmosphere during either one hour or two hours. Among their electrical properties, P-V curves showed shaped hysteresis curves, but the SBT thin films showed the asymmetric ferroelectric properties in P-V curves. When Ar/$O_2$ gas flow ratios are 1 : 1, 2: 1, the leakage current density values of SBT thin films are good, those values of 3 V, 5 V, and 7 V are respectively $3.11\times10^{-8} \textrm{A/cm}^2$, $5\times10^{-8}\textrm{A/cm}^2$, $7\times10^{-8}\textrm{A/cm}^2$.After two hours of annealing time, their electrical properties and crystallization are improved.

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Quality characteristics of kimchi with Allium hookeri root powder added (삼채뿌리분말 첨가 김치의 품질 특성)

  • You, Bo Ram;Kim, Eugene;Jang, Ja-Young;Choi, Hak-Jong;Kim, Hyun Ju
    • Food Science and Preservation
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    • v.20 no.6
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    • pp.863-870
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    • 2013
  • This study was conducted to investigate the quality characteristics of kimchi with Allium hookeri powder (AHP) added during eight weeks fermentation at $4^{\circ}C$. AHP was added to salted cabbage at concentrations of 0, 0.1, 1, and 5% (w/w). The quality characteristics of the AHR-added kimchi were determined by measuring pH, acidity, salinity, reducing sugar, microbial amounts, and sensory properties. The vitamin $B_1$ and vitamin C contents of the Allium hookeri root were 0.04 mg/100 g and 5.76 mg/100 g, respectively. As for the mineral contents, the K content was highest, followed by the Ca, Mg, and Fe contents. The pH was higher in the kimchi with 0.1%, 1%, and 5% AHP than in the kimchi without AHP during the eight-week fermentation. The salinity ranged from 2.02% to 2.37% over the eight weeks. The microbial cells and lactobacilli increased rapidly throughout the fermentation in the exponential phase and hardly increased in the stationary phase. In the sensory evaluations, the overall acceptance, taste, and texture of the kimchi with 1% AHP added were highest. In conclusion, the kimchi with 0.1%, 1%, and 5% AHP generally showed better quality than the kimchi without AHP. Especially, the kimchi with 1% AHP had the best scores in quality and overall acceptance during the fermentation.

Study of a Mixed Finite Element Model for the Analysis of a Geometrically Nonlinear Plate (기하학적 비선형 판재 해석을 위한 혼합형 FE Model 연구)

  • Kim, Woo-Ram;Choi, Youn-Dae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.10
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    • pp.1427-1435
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    • 2010
  • A mixed finite element model was developed using the classical plate theory to analyze the nonlinear bending of a plate. The appropriate weight functions for the constraints integrated over the domain were determined by the Lagrange multiplier method by using the principle of minimum virtual energy; which provides the constitutive relations between force-like variables and strains. All of detail terms of element wise coefficient matrices and associate tangent matrices to be used in the Newton iterative method are presented. Then, the linear solutions of the current model and those of the traditional displacement model under the SS (simple support) boundary conditions were compared with the existing analytical solution. The post-processed images of the nonlinear results of the force-like variables are presented to show the continuity of the solutions at the joint of the element boundaries. Finally, the converged nonlinear finite element solutions of the current model are compared with those of existing traditional displacement model.

Characteristics of Memory Windows of MFMIS Gate Structures (MFMIS 게이트 구조에서의 메모리 윈도우 특성)

  • Park, Jun-Woong;Kim, Ik-Soo;Shim, Sun-Il;Youm, Min-Soo;Kim, Yong-Tae;Sung, Man-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.319-322
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    • 2003
  • To match the charge induced by the insulators $CeO_2$ with the remanent polarization of ferro electric SBT thin films, areas of Pt/SBT/Pt (MFM) and those of $Pt/CeO_2/Si$ (MIS) capacitors were ind ependently designed. The area $S_M$ of MIS capacitors to the area $S_F$ of MFM capacitors were varied from 1 to 10, 15, and 20. Top electrode Pt and SBT layers were etched with for various area ratios of $S_M\;/\;S_F$. Bottom electrode Pt and $CeO_2$ layers were respectively deposited by do and rf sputtering in-situ process. SBT thin film were prepared by the metal orgnic decomposition (MOD) technique. $Pt(100nm)/SBT(350nm)/Pt(300nm)/CeO_2(40nm)/p-Si$ (MFMIS) gate structures have been fabricated with the various $S_M\;/\;S_F$ ratios using inductively coupled plasma reactive ion etching (ICP-RIE). The leakage current density of MFMIS gate structures were improved to $6.32{\times}10^{-7}\;A/cm^2$ at the applied gate voltage of 10 V. It is shown that in the memory window increase with the area ratio $S_M\;/\;S_F$ of the MFMIS structures and a larger memory window of 3 V can be obtained for a voltage sweep of ${\pm}9\;V$ for MFMIS structures with an area ratio $S_M\;/\;S_F\;=\;6$ than that of 0.9 V of MFS at the same applied voltage. The maximum memory windows of MFMIS structures were 2.28 V, 3.35 V, and 3.7 V with the are a ratios 1, 2, and 6 at the applied gate voltage of 11 V, respectively. It is concluded that ferroelectric gate capacitors of MFMIS are good candidates for nondestructive readout-nonvolatile memories.

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Microstructure and Electrical Properties of $(Bi,La)_4Ti_3O_{12}$ Thin Film Fabricated by Pulsed Laser Deposition Method (펄스 레이저 증착법으로 제작한 $(Bi,La)_4Ti_3O_{12}$ 박막의 미세구조 및 전기적 특성)

  • Kim, Young-Min;Yoo, Hyo-Sun;Kang, Il;Kim, Nam-Je;Jang, Gun-Eik;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.277-277
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    • 2007
  • $(Bi,La)_4Ti_3O_{12}$ (BLT) 물질은 결정 방향에 따른 강한 이방성의 강유전 특성을 나타낸다. 따라서 BLT 박막을 이용하여 FeRAM 소자 등을 제작하기 위해서는 결정의 방향성을 세심하게 제어하는 것이 매우 중요하다. 현재까지 연구된 BLT 박막의 방향성 조절 결과를 보면, BLT 박막을 스핀 코팅 법 (spin coating method)으로 중착하고, 핵생성 열처리 단계를 조절하여 무작위 방향성 (random orientation)을 갖는 박막을 제조하는 방법이 일반적이었다. 그런데 이러한 스핀 코팅법에서의 핵생성 단계의 제어는 공정 조건 확보가 너무 어려운 단점이 있다. 이러한 어려움을 극복할 수 있는 대안은 스퍼터링 증착법 (sputtering deposition method), PLD법 (pulsed laser deposition method) 등과 같은 PVD (physical vapor deposition) 법의 증착방법을 적용하는 것이다. PVD 법으로 증착하는 경우에는 이미 박막 내에 무수한 결정핵이 존재하기 때문에 핵생성 단계가 필요 없게 된다. PVD 증착법의 적용을 위해서는 타겟 (target)의 제조 및 평가 실험이 선행되어야 한다. 그런데 벌크 BLT 재료의 소결공정 조건과 전기적 특성에 관한 연구 결과는 거의 발표 되지 않고 있다. 본 실험에서는 $Bi_2O_3$, $TiO_2$ and $La_2O_3$ 분말을 이용하여 최적의 조성을 구하기 위하여 Bi양을 변화시키며 타겟을 제조 하였다. 혼합된 분말을 하소 후 pallet 형태로 성형하여 소결을 실시하였다. 시편을 1mm 두께로 연마하고, 표면에 silver 전극을 인쇄하여 전기적 특성을 측정하였다. Bi양이 3.28몰 첨가된 조성에서 최대의 잔류분극 (2Pr) 값을 얻었고, 이때의 값은 약 $18{\mu}C/cm^2$ 정도였다. 최적화된 조성 ($Bi_{3.28}La_{0.75}Ti_3O_{12}$)으로 BLT 타겟을 제조하여 PLD법으로 박막을 제조하였다. 박막 제조 시 압력은 $1{\times}10^{-1}\;{\sim}\;1{\times}10^{-4}\;Torr$ 범위에서 변화시켰다. $1{\times}10^{-1}\;Torr$ 압력을 제외하고는 모든 압력에서 BLT 박막이 증착되었다. 중착된 박막을 $650\;{\sim}\;800^{\circ}C$에서 30분간 열처리를 실시하고 전기적 특성을 평가한 결과, $1{\times}10^{-2}\;Torr$에서 증착한 박막에서 양호한 P-V (polarization-voltage) 이력곡선을 얻을 수 있었고, 이때의 잔류분극 (2Pr) 값은 약 $6\;{\mu}C/cm^2$ 이었다. 주사전자현미경 (SEM)을 이용하여 BLT 박막 표면의 미세구조도 관찰하였는데, 스핀코팅 법으로 증착한 경우에 관찰되었던 조대화된 입자들은 관찰되지 않았고, 상당히 양호한 입자 크기 균일도를 나타내었다.

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Evaluation of $SrRuO_3$ Buffer Layer for $Pb(Zr,Ti)O_3$ Ferroelectric Capacitor ($Pb(Zr,Ti)O_3$ 강유전체 커패시터에 적용하기 위한 $SrRuO_3$ 버퍼 층의 특성 평가)

  • Kweon, Soon-Yong;Choi, Ji-Hye;Son, Young-Jin;Hong, Suk-Kyoung;Ryu, Sung-Lim
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.280-280
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    • 2007
  • $Pb(Zr,Ti)O_3$ (PZT) 강유전체 박막은 높은 잔류 분극 (remanent polarization) 특성 때문에 현재 강유전체 메모리 (FeRAM) 소자에 적용하기 위하여 가장 활발히 연구되고 있다. 그런데 PZT 물질은 피로 (fatigue) 및 임프린트 (imprint) 등의 장시간 신뢰성 (long-term reliability) 특성이 취약한 단점을 가지고 있다. 이러한 신뢰성 문제를 해결할 수 있는 효과적인 방법 중의 하나는 $IrO_2$, $SrRuO_3$(SRO) 등의 산화물 전극을 사용하는 것이다. 많은 산화물 전극 중에서 SRO는 PZT와 비슷한 pseudo-perovskite 결정구조를 갖고 격자 상수도 비슷하여, PZT 커패시터의 강유전 특성 및 신뢰성을 향상시키는데 매우 효과적인 것으로 알려져 있다. 따라서 본 연구는 PZT 커패시터에 적용하기 위하여 SRO 박막을 증착하고 이의 전기적 특성 및 미세구조를 분석하고자 하였다. 또 실제로 SRO 박막을 상부전극과 PZT 사이의 버퍼 층 (buffer layer)으로 적용한 경우의 커패시터 특성도 평가하였다. 먼저 다결정 SRO 박막을 $SiO_2$/Si 기판 위에 DC 마그네트론 스퍼터링 법 (DC magnetron sputtering method)으로 증착하였다. 그 다음 이러한 SRO 박막의 미세구조, 결정성 및 전기적 특성이 증착 조건들의 변화에 따라서 어떤 경향성을 보이는지를 평가하였다. 기판 온도는 $350\;{\sim}\;650^{\circ}C$ 범위에서 변화시켰고, 증착 파워는 500 ~ 800 W 범위에서 변화시켰다. 또 Ar+$O_2$ 혼합 가스에서 산소의 혼합 비율을 20 ~ 50% 범위에서 변화시켰다. 이러한 실험 결과 SRO 박막의 전기적 특성 및 미세 구조는 기판의 증착 온도에 따라서 가장 민감하게 변함을 관찰할 수 있었다. 다른 증착 조건과 무관하게 $450^{\circ}C$ 이상의 온도에서 증착된 SRO 박막은 모두 주상정 구조 (columnar structure)를 형성하며 (110) 방향성을 강하게 나타내었다. 가장 낮은 전기 저항은 $550^{\circ}C$ 증착 온도에서 얻을 수 있었는데, 그 값은 약 $440\;{\mu}{\Omega}{\cdot}cm$ 이었다. SRO 버퍼 충을 적용하여 제작한 PZT 커패시터의 잔류 분극 (Pr) 값은 약 $30\;{\mu}C/cm^2$ 정도로 매우 높은 값을 나타내었고, 피로 손실 (fatigue loss)도 $1{\times}10^{11}$ 스위칭 사이클 후에 약 11% 정도로 매우 양호한 값을 나타내었다.

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Isolation and Characteristics of a Phenol-degrading Bacterium, Rhodococcus pyridinovorans P21 (페놀분해세균 Rhodococcus pyridinovorans P21의 분리 및 페놀분해 특성)

  • Cho, Kwang-Sik;Lee, Sang-Mee;Shin, Myung-Jae;Park, Soo-Yun;Lee, Ye-Ram;Jang, Eun-Young;Son, Hong-Joo
    • Journal of Life Science
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    • v.24 no.9
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    • pp.988-994
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    • 2014
  • The effluents of chemical and petroleum industries often contain non-biodegradable aromatic compounds, with phenol being one of the major organic pollutants present among a wide variety of highly toxic organic chemicals. Phenol is toxic upon ingestion, contact, or inhalation, and it is lethal to fish even at concentrations as low as 0.005 ppm. Phenol biodegradation has been studied in detail using bacterial strains. However, these microorganisms suffer from substrate inhibition at high concentrations of phenol, whereby growth is inhibited. A phenol-degrading bacterium, P21, was isolated from oil-contaminated soil. The phenotypic characteristics and a phylogenetic analysis indicated the close relationship of strain P21 to Rhodococcus pyridinovorans. Phenol biodegradation by strain P21 was studied under shaking condition. The optimal conditions for phenol biodegradation by strain P21 were 0.09% $KNO_3$, 0.1% $K_2HPO_4$, 0.3% $NaH_2PO_4$, 0.015% $MgSO_4{\cdot}7H_2O$, 0.001% $FeSO_4{\cdot}7H_2O$, initial pH 9, and $20-30^{\circ}C$, respectively. When 1,000 ppm of phenol was added to the optimal medium, the strain P21 completely degraded it within two days. Rhodococcus pyridinovorans P21 could grow in up to 1,500 ppm of phenol as the sole carbon source in a batch culture, but it could not grow in a medium containing above 2,000 ppm. Moreover, strain P21 could utilize toxic compounds, such as toluene, xylene, and hexane, as a sole carbon source. However, no growth was detected on chloroform.

Properties of Nutritional Compositions and Antioxidant Activity of Acorn Crude Starch by Geographical Origins (도토리묵 제조용 조전분의 원산지별 성분 및 항산화 특성)

  • Yang, Kee-Heun;Ahn, Jang-Hyuk;Kim, Hyo-Jin;Lee, Ji-Yeon;You, Bo-Ram;Song, Jung-Eun;Oh, Hye-Lim;Kim, Na-Yeon;Kim, Mee-Ree
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.40 no.7
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    • pp.928-934
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    • 2011
  • Nutritional compositions of acorn crude starch were analyzed according to country of origin, especially the mineral and sugar contents. Regarding the three kinds of starch of domestic (South Korea, KAS), Chinese (CAS), and North Korea (NAS) origins in the Korean market, NAS had the lowest moisture content as well as the highest contents of crude protein, crude fat, and carbohydrate. Regarding mineral contents, NAS contained the highest amounts of magnesium, calcium, sodium, potassium, and phosphorous, whereas CAS contained the highest iron and zinc contents. There were no significant differences in acidity and pH. Analysis of the monosaccharide contents of the starches showed that glucose was the highest in KAS while sucrose was the highest in CAS. The Hunter color L value was the lowest in NAS, whereas a and b values were the lowest in CAS. Total phenolic content was the highest in NAS. NAS had the highest DPPH and hydroxyl radical scavenging activities ($IC_{50}$: 47.0 mg/mL for DPPH, 0.038 mg/mL for hydroxyl) whereas KAS had similar DPPH ($IC_{50}$: 73.7 mg/mL for CAS, 86.8 mg/mL for KAS) and hydroxyl radical activities ($IC_{50}$: 0.041 mg/mL for CAS, 0.044 mg/mL for KAS) as compared to CAS.

Electrochemical Treatment of Dye Wastewater Using Fe, RuO2/Ti, PtO2/Ti, IrO2/Ti and Graphite Electrodes (RuO2/Ti, PtO2/Ti, IrO2/Ti 및 흑연전극을 이용한 염료폐수의 전기화학적 처리)

  • Kim, A Ram;Park, Hyun Jung;Won, Yong Sun;Lee, Tae Yoon;Lee, Jae Keun;Lim, Jun Heok
    • Clean Technology
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    • v.22 no.1
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    • pp.16-28
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    • 2016
  • Textile industry is considered as one of the most polluting sectors in terms of effluent composition and volume of discharge. It is well known that the effluents from textile dying industry contain not only chromatic substances but also large amounts of organic compounds and insolubles. The azo dyes generate huge amount of pollutions among many types of pigments. In general, the electrochemical treatments, separating colors and organic materials by oxidation and reduction on electrode surfaces, are regarded as simpler and faster processes for removal of pollutants compared to other wastewater treatments. In this paper the electrochemical degradation characteristics of dye wastewater containing CI Direct Blue 15 were analyzed. The experiments were performed with various anode materials, such as RuO2/Ti, PtO2/Ti, IrO2/Ti and graphite, with stainless steel for cathode. The optimal anode material was located by changing operating conditions like electrolyte concentration, current density, reaction temperature and initial pH. The degradation efficiency of dye wastewater increased in proportion to the electrolyte concentration and the current density for all anode materials, while the temperature effect was dependent on the kind. The performance orders of anode materials were RuO2/Ti > PtO2/Ti > IrO2/Ti > graphite in acid condition and RuO2/Ti > IrO2/Ti > PtO2/Ti > graphite in neutral and basic conditions. As a result, RuO2/Ti demonstrated the best performance as an anode material for the electrochemical treatment of dye wastewater.