• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.523-523
• /
• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• Journal of Aerospace System Engineering
• /
• v.13 no.2
• /
• pp.26-33
• /
• 2019

Control moment gyro (CMG) employed as satellite actuators, generates a large torque through the steering of its gimbals. Although each gimbal holds a high-speed rotating wheel, the wheel imbalances induces disturbance and degrades the satellite control quality. Therefore, the disturbances ought to be detected and identified as a precaution against actuator faults. Among the method used in detecting disturbances is the state observers. In this paper, we apply a continuous second order sliding mode observer to detect single disturbances/faults in CMGs. Verification of the algorithm is also done on the hardware satellite simulator where four CMGs are installed.

• Journal of Mechanical Science and Technology
• /
• v.18 no.9
• /
• pp.1537-1548
• /
• 2004

This paper presents a novel diagnostic technique for monitoring the system conditions and detecting failure modes and precursors based on wavelet-packet analysis of external noise/vibration measurements. The capability is based on extracting relevant features of noise/vibration data that best discriminate systems with different noise/vibration signatures by analyzing external measurements of noise/vibration in the time-frequency domain. By virtue of their localized nature both in time and frequency, the identified features help to reveal faults at the level of components in a mechanical system in addition to the existence of certain faults. A prima-facie case is made via application of the proposed approach to fault detection in scroll and rotary compressors, although the methods and algorithms are very general in nature. The proposed technique has successfully identified the existence of specific faults in the scroll and rotary compressors. In addition, its capability of tracking the severity of specific faults in the rotary compressors indicates that the technique has a potential to be used as a prognostic tool.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.61 no.6
• /
• pp.810-816
• /
• 2012

As wind power has increased steadily, the importance of a condition monitoring system is being emphasized to maximize the availability and reliability of a wind turbine. To develop the advanced algorithms for fault detection and lifespan estimation, a wind turbine simulator is essential for verification of the proposed algorithms before applying them to a condition diagnosis & integrity prognosis system. The developed new-type simulator in this paper includes blades and various sensors as well as a motor, a gearbox and a generator of which the existing simulators generally consist. It also has similarity with a 3MW class wind turbine and can be used to acquire operational data from various operation conditions. This paper presents a design method of control logic for the wind turbine simulator, which gives a wind generation method and similar dynamic characteristics with the 3MW wind turbine. Finally, the proposed control logic is verified through experiments.

• International Journal of Control, Automation, and Systems
• /
• v.4 no.3
• /
• pp.372-381
• /
• 2006

The purpose of this study was to develop a process management system to manage ingot fabrication and improve ingot quality. The ingot is the first manufactured material of wafers. Trace parameters were collected on-line but measurement parameters were measured by sampling inspection. The quality parameters were applied to evaluate the quality. Therefore, preprocessing was necessary to extract useful information from the quality data. First, statistical methods were used for data generation. Then, modeling was performed, using the generated data, to improve the performance of the models. The function of the models is to predict the quality corresponding to control parameters. Secondly, rule extraction was performed to find the relation between the production quality and control conditions. The extracted rules can give important information concerning how to handle the process correctly. The dynamic polynomial neural network (DPNN) and decision tree were applied for data modeling and rule extraction, respectively, from the ingot fabrication data.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.24 no.8
• /
• pp.55-61
• /
• 2010

In this paper, we proposed selective extraction method of frequency information and PCA-ELM based diagnosis system for three-phase induction motors. As the first step for diagnosis procedure, DFT is performed to transform the acquired current signal into frequency domain. And then, frequency components are selected according to discriminate order calculated by variance As the next step, feature extraction is performed by principal component analysis (PCA). Finally, we used the classifier based on Extreme Learning Machine (ELM) with fast learning procedure. To show the effectiveness, the proposed diagnostic system has been intensively tested with the various data acquired under different electrical and mechanical faults with varying load.

• The Transactions of the Korean Institute of Electrical Engineers D
• /
• v.49 no.9
• /
• pp.504-511
• /
• 2000

The reliability of system is to become a important concern in developed industry. The controller based on the reliability is so important position. PPC(Plant Protection Controller) is for plant protection and human life by fault detection and control action against the transient condition of plant. The protection system of the nuclear reactor and chemical reactor are representative of PPC. This paper presents analysis of PPC relaibility formal problem statement of optimal redundancy based on the reliability for PPC. And the problem is optimized by genetic algorithm, The genetic algorithms is useful algorithm in case of large searching complex gradient existence local minimum. The genetic algorithms is useful algorithm is case of large searching complex gradient existence local minimum. The ability and effectiveness of the proposed optimization is demonstrated by the target reliability of one channel. PPC. using the failure rate based on the MIL-HDBK-217

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.31 no.4
• /
• pp.255-260
• /
• 2018

In recent years, increasing electricity use has led to considerable interest in green energy. In order to effectively supply, cut off, and operate an electric power system, many electric power facilities such as gas insulation switch (GIS), cable, and large substation facilities with higher densities are being developed to meet demand. However, because of the increased use of aging electric power facilities, safety problems are emerging. Electromagnetic wave and leakage current detection are mainly used as sensing methods to detect live-line partial discharges. Although electromagnetic sensors are excellent at providing an initial diagnosis and very reliable, it is difficult to precisely determine the fault point, while leakage current sensors require a connection to the ground line and are very vulnerable to line noise. The partial discharge characteristic in particular is accompanied by statistical irregularity, and it has been reported that proper statistical processing of data is very important. Therefore, in this paper, we present the results of analyzing ${\Phi}-q-n$ cluster distributions of partial discharge characteristics by using K-means clustering to develop an expert partial discharge diagnosis system generated in a GIS facility.

• Journal of Positioning, Navigation, and Timing
• /
• v.12 no.1
• /
• pp.11-22
• /
• 2023

In this paper, we propose an efficient satellite selection method for multi-constellation GNSS. The number of visible satellites has increased dramatically recently due to multi-constellation GNSS. By the increased availability, the overall GNSS performance can be improved. Whereas, due to the increase of the number of visible satellites, the computational burden in implementing advanced processing such as integer ambiguity resolution and fault detection can be increased considerably. As widely known, the optimal satellite selection method requires very large computational burden and its real-time implementation is practically impossible. To reduce computational burden, several sub-optimal but efficient satellite selection methods have been proposed recently. However, these methods are prone to the local optimum problem and do not fully utilize the information redundancy between different constellation systems. To solve this problem, the proposed method utilizes the inter-system biases and geometric assignments. As a result, the proposed method can be implemented in real-time, avoids the local optimum problem, and does not exclude any single-satellite constellation. The performance of the proposed method is compared with the optimal method and two popular sub-optimal methods by a simulation and an experiment.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.20 no.2
• /
• pp.50-59
• /
• 2006

In this paper, We are going to propose the fire protection system using CAN(Controller Area Network). The larger, higher and deeper buildings an, the more dangerous people are when fire happens. We should be aware of the problems of prior fire protection system. Therefore, we construct the embedded system based on CAN communication that is capable of N to N communication, and build independent fire protection system. If the fire is occurred on the building, the problem is that how fast we can detect the fire and put it on by using available system, this is major factor that reduces damage of our wealth. Therefore in this studies, We would like to design more stable system than current system. This system is based on CAN communication which is available N to N communication constructs and designed to compensate for each fault, so that our aim is to reduce the wires of system, cost of installation and to suppose future type fire protection system.