Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation |
Bae Hyeon
(School of Electrical and Computer Engineering, Pusan National University)
Kim Sung-Shin (School of Electrical and Computer Engineering, Pusan National University) Woo Kwang-Bang (Automation Technology Research Institute, Yonsei University) May Gary S. (School of Electrical and Computer Engineering, Georgia Institute of Technology) Lee Duk-Kwon (Dept. of Computer System, MEMC Korea Co.) |
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