• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.32-38
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• 2008

This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.253-254
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.77-78
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.14 no.10
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• pp.50-57
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• 1997

A fast tool servo (FTS) for diamond turning improves machining accuracy by quickly compensating relative position errors between the cutter and the workpiece. Therefore, the FTS needs to have large band-width with good tracking performance. Serious hysteresis nonlinearity of PZT actuators used in the FTS, however, deteriorates fast tracking performance. Several types of feedforward hysteresis compensators and feedback controllers are tested to improve tracking performance. Through simulations and experiments, control structure which yields the smallest tracking error is selected. The maximum peak to peak error in tracking a sinusoidal waveform is reduced by one fifth compared to that of a regular PID controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.348-353
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• 1994

Magnetic Servo Levitation (MSL) has been proposed as a method to drive a fast-tool servo system. This paper discusses some fundamental control and modeling issues in the development of a long-range high-bandwidth fast-tool servo based on MSL. A resursive linear model is developed to describe the system's dynamics linear model is developed to describe the system's dynamics, and further used to discuss controller design. For a given controller architecture, the performance of two controllers is then compared, one based on an approximation to the inverse plant dynamics, the second based on a adaptive neural network.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.35-44
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• 2009

Long stroke Fast Tool Servo (LFTS) with maximum stroke of $432{\mu}m$ is designed, manufactured and tested for fabrication of optical free-form surfaces. The large amount of stroke in LFTS has been realized by utilizing the hinge and lever mechanisms which enable the displacement amplification ratio of 4.3. In this mechanism the peculiar shape was devised for maximizing the displacement of end tip in LFTS and special mechanical spring has been mounted to provide the sufficient preload to the piezoelectric actuator. Also, its longitudinal motion of tool tip can be measured by capacitive type displacement sensor and closed-loop controlled to overcome the nonlinear hysteresis. In order to verify the static and dynamic characteristics of designed LFTS, several features including step response, frequency response and cut-off frequency in closed-loop mode were experimentally examined. Also, basic machining result shows that the proposed LFTS is capable of generating the optical free-form surface as an additional axis in diamond turning machine.

• Journal of the Korea Society for Simulation
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• v.8 no.1
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• pp.63-76
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• 1999

Recently in manufacturing environment, manufacturing order is characterized by unstable market demand, shorter product life cycle, a variety of product and shorter production lead time. In order to adapt this manufacturing order, flexible manufacturing systems(FMS) in manufacturing technology advances into the direction that machines become further versatile functionally and that tools are controlled by fast tool delivery device. Unlike conventional FMS to mainly focus on part flow, it is important to control tool flow in single-stage multimachine systems(SSMS), consisting of versatile machines and fast tool delivery device. This research is motivated by the thought that exact estimation of tool competition at part release in SSMS enhances the system performance. In this paper, in SSMS under dynamic tool allocation strategy to share tools among machines, we propose real-time part release and tool allocation algorithms which can apply real factory and which can improve system performance.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1997.04a
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• pp.62-67
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• 1997

This paper reprdsents a new scheme of neural network control system analysis the robustues of robot manipulator using digital signal processors. Digtal signal processors, DSPs, are micro-processors that are particularly developed for fast numerical computations involving sums and products of variables. Digital version of most advanced control algorithms can be defined as sums and products of measured variables, thus it can be programmed and executed through DSPs. In additions, DSPs are a s fast in computation as most 32-bit micro-processors and yet at a fraction of their prices. These features make DSPs a viable computational tool in digital implementation of sophisticated controllers. Durng past decade it was proposed the well-established theorys for the adaptive control of linear systems, but there exists relatively little general theory for the adaptive control of nonlinear systems. The proposed neuro network control algorithm is one of learning a model based error back-propagation scheme using Lyapunov stability analysis method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.672-675
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• 1997

This paper proposes a structure of the control system for the step & scan exposure tool. The step & scan exposure tool is used for the manufacturing process of the semiconductor DRAM memory of giga bit. The control system employs the VME bus instead of the conventional ISA bus so that all control signals and data can be managed separately by the 4 VME-PCs for fast and fault-free flow of signals for multi-tasking. A high speed I/O card is equipped for the real-time monitoring and control of the sub module equipment. Then all the subsystems are integrated and aligned for the operation of the step & scan exposure tool with the VME bus and, I/O card.