VME bus based control system for step & scan exposure tool

VME bus를 이용한 Step & Scan형 노광장비의 Control System 구성

This paper proposes a structure of the control system for the step & scan exposure tool. The step & scan exposure tool is used for the manufacturing process of the semiconductor DRAM memory of giga bit. The control system employs the VME bus instead of the conventional ISA bus so that all control signals and data can be managed separately by the 4 VME-PCs for fast and fault-free flow of signals for multi-tasking. A high speed I/O card is equipped for the real-time monitoring and control of the sub module equipment. Then all the subsystems are integrated and aligned for the operation of the step & scan exposure tool with the VME bus and, I/O card.