• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.22 no.1
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• pp.9-19
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• 2012

Objectives: The aim of this study is to critically review the exposure surrogates and estimates used to associate health effects in wafer fabrication workers such as spontaneous abortion and cancer, as well as to identify the limitations of retrospective exposure assessment methods Methods: Epidemiologic and exposure-assessment studies of wafer fabrication operations in the semiconductor industry were collected. Retrospective exposure-assessment methods used in cancer risk and mortality and reproductive toxicity were reviewed. Results: Eight epidemiologic papers and two reports compared cancer risk among workers in wafer fabrication facilities in the semiconductor industry with the risk of the general population. Exposure surrogates used in those cancer studies were fabrication(vs. non-fabrication), employment duration, manufacturing eras, job title (operator vs. maintenance worker) and qualitative classifications of agents without assessing specific agent or job-specific exposure. In contrast, specific operation, job title and agents were used to classify the exposure of fabrication workers, contributing to finding a significant association with spontaneous abortion (SAB). Conclusion: Further epidemiologic studies of fabrication workers using more refined exposure assessment methods are warranted in order to examine the associations between fabrication work, environment, and specific agents with cancer risk or mortality as used in SAB epidemiologic studies.

• Journal of Technologic Dentistry
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• v.41 no.1
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• pp.9-19
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• 2019

Purpose: This study was conducted to comparative evaluate the marginal and internal gap of three-unit metal frameworks(Co-Cr) fabricated by wax milling method and digital light projection method of CAD/CAM systems. Methods: All the specimens were fabricated by three different fabrication methods: conventional wax up with casting(CWC), milled wax block with casting(MWC), digital light projection with casting(DLPC) (n=10 each). The marginal and internal fits of specimens were examined using a replica technique. The light-body silicone thickness was measured at 8 reference points(each abutment: 16 measurements). All measurements were conducted by a stereomicroscope. Digital photo were taken at $150{\times}$ magnification and then analyzed using a measurement software. The Mann-Whitney test was used for analyzing the results. Results: Statistically significant differences were found between the fabrication methods(p<0.001). The mean(SD) is ${\mu}m$ for fabrication methods, the mean marginal fit were recorded respectively, CWC 63(38), MWC group 50(33), DLPC 103(54) and the mean internal fit CWC 96(47), MWC group 116(41), DLPC 138(66). Conclusion : The marginal and internal fit were statistically different according to the fabrication methods(p<0.001). In all fabrication methods, the greatest misfit was found the occlusal area of all specimens.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.351-355
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• 2003

In this paper, a new barrier rib forming method of embossed barrier rib (EBR) formation process for the PDP rear panel was introduced. The process is mainly composed of green sheet fabrication, lamination of the green sheet on the rear glass panel having data electrodes, and roll embossing followed by firing. The EBR process has two advantages over the conventional barrier rib forming methods. One is the process requires less equipment investment than the conventional methods by about 20% of the current rear panel fabrication equipment investment owing to the simplified fabrication process. The other advantage is its reduced rear panel manufacturing cost by eliminating the time consuming and complicated processes and waste of materials in the conventional methods. In this study, general procedure of EBR fabrication process is described and the characteristics of prototype PDP using EBR panel are discussed.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.391-396
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• 1999

KSTAR vacuum vessel mockup was fabricated by Korea Heavy Industries. The fabrication technology chosen for the mockup is introduced and assessed in this paper. KSTAR vacuum vessel is a huge vacuum chamber of 52 cubic meters never built in this country. Through the experiency of the KSTAR mockup fabrication, welding methods for obtaining both ultra high vacuum and structural integrity of the large vacuum chamber are extracted. The fabrication and assembly techniques for the complicated structure composed of reinforced ribs, double walls and various ports are also developed. A nondestructive test on the welding spot was performed and the results show that no major leaks violating the criterion were found. The one of the main objectives of the mockup fabrication is to measure the dimensions of the structure before and after fabrication, which plays an important role in the fabrication and the assembly. By assaying the problems occurred during mockup fabrication, the KSTAR mockup will provide the techniques for the fabrication of the main vacuum vessel.

• IE interfaces
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• v.22 no.1
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• pp.73-84
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• 2009

In this paper, we propose a dispatching algorithm for constructing a Factory Operating System (FOS) which can operate semiconductor fabrication factories more efficiently and effectively. We first define ten dispatching criteria and propose two methods to apply the defined dispatching criteria sequentially and simultaneously (i.e. fixed dispatching architecture). However the fixed type methods cannot apply the criteria adaptively by considering changes in the semiconductor fabrication factories. To overcome this type of weakness, an adaptive dispatching architecture is proposed for applying the dispatching criteria dynamically based on the factory status. The status can be determined by combining evaluation results from the following three status criteria; target movement, workload balance, and utilization rate. Results from the shop floor in past few periods showed that the proposed methodology gives a good performance with respect to the productivity, workload balance, and machine utilization. We can expect that the proposed adaptive dispatching architecture will be used as a useful tool for operating semiconductor fabrication factories more efficiently and effectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.119-123
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• 2006

The ionic-polymer-metal-composite actuators have the best merit for bio-mimetic locomotion because of their large bending performance. Especially, they have the advantage for mimicking a fish-like motion because IPMCs are useful to be actuated in water. So we have developed IPMC actuators with multiple electrodes for realization of biomimetic motion. Generally, the IPMC actuator has been fabricated in electroless plating technique, while it needs very long fabrication time and shows poor repeatability in the actuation performance owing to the variables in chemical fabrication process. Therefore, the novel fabrication methods were investigated by combining electroless plating and electroplating techniques capable of patterning precisely. On the whole, two different methods were compared and analyzed with similar thickness level of Platinum electrodes. Present results show that mixing chemical reduction and electroplating can be a promising candidate for electrode patterning.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1101-1106
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• 2005

The purpose of this study was to develop a process management system to manage ingot fabrication and the quality of the ingot. The ingot is the first manufactured material of wafers. Operating data (trace parameters) were collected on-line but quality data (measurement parameters) were measured by sampling inspection. The quality parameters were applied to evaluate the quality. Thus, preprocessing was necessary to extract useful information from the quality data. First, statistical methods were employed for data generation, and then modeling was accomplished, using the generated data, to improve the performance of the models. The function of the models is to predict the quality corresponding to the control parameters. The dynamic polynomial neural network (DPNN) was used for data modeling that used the ingot fabrication data.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.254-256
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• 2009

The performances of proton exchange membrane (PEM) water electrolysis depend on many factors such as materials, geometries, fabrication methods, operating conditions, and so forth. The fabrication method is concerned, membrane electrode assemblies (MEA) are a most important part to show different performances by different fabrication methods. The performance change of PEM water electrolysis was experimentally measured according to the fabrication differences of the anode electrodes. One point of view is the catalyst intrusion rate to the anode gas diffusion layer (GDL), and the other point of view is the catalyst loading distribution in depth of the anode GDL. Results show that the performances of MEA with deep intrusion of the catalysts are better in the range of low current densities but worse at higher current densities. The catalyst loading distribution does not affect significantly to the performance of PEM water electrolyser.

• New & Renewable Energy
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• v.5 no.4
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• pp.75-78
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• 2009

The performances of proton exchange membrane (PEM) water electrolysis depend on many factors such as materials, geometries, fabrication methods, operating conditions, and so forth. The fabrication method is concerned, membrane electrode assemblies (MEA) are a most important part to show different performances by different fabrication methods. The performance change of PEM water electrolysis was experimentally measured according to the fabrication differences of the anode electrodes. One point of view is the catalyst intrusion rate to the anode gas diffusion layer (GDL), and the other point of view is the catalyst loading distribution in depth of the anode GDL. Results show that the performances of MEA with deep intrusion of the catalysts are better in the range of low current densities but worse at higher current densities. The catalyst loading distribution does not affect significantly to the performance of PEM water electrolyser.