• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.11-15
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• 2004

Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

• Bulletin of the Korean Chemical Society
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• v.31 no.10
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• pp.2939-2942
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• 2010

A new high-temperature pH sensor has been successfully developed by reforming the internal reference systems of the pH sensors based on oxygen-ion conducting ceramic membrane. The conventional internal reference system, a mixture of Ni and NiO, has been replaced with partially oxidized Ni powders, where Ni and NiO coexist on the surface of particles, in order to avoid the cumbersome mixing step of Ni and NiO particles. The partially oxidized Ni particles were made by oxidizing Ni under air atmosphere at $600^{\circ}C$ and characterized by X-ray diffraction (XRD) and FTIR spectroscopy. The viability of the pH sensor developed was assessed in boric acid (1000 ppm-B)/ lithium hydroxide (1 to 3 ppm-Li) buffer solutions at $280^{\circ}C$. The pH sensor showed excellent accuracy with a small error less than ${\pm}0.2$ pH units.

• Proceedings of the KSR Conference
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• 2005.11a
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• pp.777-782
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• 2005

In this paper, we designed and fabricated a partial discharge (PD) detector to diagnose the soundness of CNCV cables by analyzing PD pulses and to predict discharge locations. The PD detector is consisted of a coupling network with a discharge free capacitor and a detection impedance, a voltage follower and a low noise amplifier. Lower cut-off frequency of the detector is adjusted at 175kHz to block AC voltage and to pass discharge pulse only. The discharge location could be obtained by the time of arrival method using travelling wave propagation theory. In a laboratory test on an eighty meter CV cable, we could position the discharge location within a two meter error.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.88-91
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• 2005

Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and uncertainty. I'll propose the method of changing the natural frequency through the imposing the axial force on the anchor part to separate the sensing part and the tuning part. When the shape of section is the form of rectangular, the degree of the natural frequencies' change under axial force appears D be different. Applying a tuning force of 30 $\mu$N, the natural frequencies' difference can be reduced by 5 percent.

• Current Optics and Photonics
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• v.5 no.5
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• pp.506-513
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• 2021

An arrayed diffractive optical element design for the beam-shaping of a multi-array light source is proposed. This is an essential device for recent optical security and face recognition applications. In practice, we devise a DC noise reduction technique featuring high fabrication error tolerance regarding the multi-array light source diffractive optical elements, as a necessary part of the proposed design method. The spherical diverging illumination leads to DC-conjugate noise spreading. The main idea is tested experimentally, and the multi-array light source diffraction pattern is investigated numerically.

• ETRI Journal
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• v.43 no.4
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• pp.728-745
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• 2021

Carbon nanotube field-effect transistors (CNTFETs) have been widely studied as a promising technology to be included in post-complementary metal-oxide-semiconductor integrated circuits. Despite significant advantages in terms of delay and power dissipation, the fabrication process for CNTFETs is plagued by fault occurrences. Therefore, developing a fast and accurate method for estimating the reliability of CNTFET-based digital circuits was the main goal of this study. In the proposed method, effects related to faults that occur in a gate's transistors are first represented as a probability transfer matrix. Next, the target circuit's graph is traversed in topological order and the reliabilities of the circuit's gates are computed. The accuracy of this method (less than 3% reliability estimation error) was verified through various simulations on the ISCAS 85 benchmark circuits. The proposed method outperforms previous methods in terms of both accuracy and computational complexity.

• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.328-341
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• 2022

Area selective atomic layer deposition (AS-ALD) is a bottom-up nanopattern fabrication method that can grow the ALD films only on the desired substrate areas without using photolithography and etching processes. Particularly, AS-ALD has attracted great attention in the semiconductor manufacturing process due to its advantage in reducing edge placement error by fabricating self-aligned patterns. In this paper, the basic principles and characteristics of AS-ALD are described. In addition, various approaches for achieving AS-ALD with excellent selectivity were comprehensively reviewed. Finally, the technology development to overcome the selectivity limit of AS-ALD was introduced along with future prospects.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2021.05a
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• pp.8-9
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• 2021

FCP requires different curvatures and shapes according to the method of division, and it is necessary to manufacture a formwork accordingly. FCP production equipment consists of CNC equipment and side shape control equipment. This can be implemented in various shapes of upper, lower, and side surfaces. In the side shape control equipment, it is implemented as a variable side formwork. Among the required performance of the variable side formwork, there is stiffness against side pressure, which needs to be verified. Therefore, in this study, the FCP fabrication experiment is conducted with the developed variable side formwork. By analyzing the error in the shape of the fabricated FCP, the lateral pressure resistance capability of the side form is measured and verified.

• Journal of Astronomy and Space Sciences
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• v.27 no.2
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• pp.153-160
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• 2010

We modified the optical system of 500 mm wide-field telescope of which point spread function showed an irregularity. The telescope has been operated for Near Earth Space Survey (NESS) located at Siding Spring Observatory (SSO) in Australia, and the optical system was brought back to Korea in January 2008. After performing a numerical simulation with the tested value of surface figure error of the primary mirror using optical design program, we found that the surface figure error of the mirror should be fabricated less than root mean square (RMS) $\lambda$/10 in order to obtain a stellar full width at half maximum (FWHM) below $28\;{\mu}m$. However, we started to figure the mirror for the target value of RMS $\lambda$/20, because system surface figure error would be increased by the error induced by the optical axis adjustment, mirror cell installation, and others. The radius of curvature of the primary mirror was 1,946 mm after the correction. Its measured surface figure error was less than RMS $\lambda$/20 on the table of polishing machine, and RMS $\lambda$/15 after installation in the primary mirror cell. A test observation performed at Daeduk Observatory at Korea Astronomy and Space Science Institute by utilizing the exiting mount, and resulted in $39.8\;{\mu}m$ of stellar FWHM. It was larger than the value from numerical simulation, and showed wing-shaped stellar image. It turned out that the measured-curvature of the secondary mirror, 1,820 mm, was not the same as the designed one, 1,795.977 mm. We fabricated the secondary mirror to the designed value, and finally obtained a stellar FWHM of $27\;{\mu}m$ after re-installation of the optical system into SSO NESS Observatory in Australia.

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
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• v.25 no.4
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• pp.295-303
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• 1999

Presented in this paper are the experimental results that measure rapid prototyping (RP) errors in 3D medical models. We identified various factors that can cause dimensional errors when producing RP models, specifically in maxillofacial areas. For the experiment, we used a human dry skull. A number of linear measurements based on landmarks were first obtained on the skull. This was followed by CT scanning, 3D model reconstruction, and RP model fabrication. The landmarks were measured again on both the reconstructed models and the physical RP models, and these were compared with those on dry skull. We focused on major sources of errors, such as CT scanning, conversion from CT data to STL models, and RP model fabrication. The results show that the overall error from skull to RP is $0.64{\times}0.36mm(0.71{\times}0.66%)$ in absolute value. This indicates that the RP technology can be acceptable in the real clinical applications. A clinical case that has applied RP models successfully for treatment planning and surgical rehearsal is presented. Although the use of RP models is rare in the medical area yet, we believe RP is promising in that it has a great potential in developing new tools which can aid diagnosis, treatment planning, surgical rehearsal, education, and so on.