• Title/Summary/Keyword: FT-IR (fourier transform infrared) spectrum

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Study of the hydrogen concentration of SiNx film by Fourier transform infrared spectroscopy (Fourier transform infrared spectroscopy를 이용한 SiNx박막의 수소농도 연구)

  • Lee, Seok-Ryoul;Choi, Jae-Ha;Jhe, Ji-Hong;Lee, Lim-Soo;Ahn, Byung-Chul
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.215-219
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    • 2008
  • The bonding structure and composition of silicon nitride (SiNx) films were investigated by using Fourier transform infrared spectroscopy (FT-IR). SiNx films were deposited on Si substrate at $340^{\circ}C$ using a conventional PECVD system. The compositions of Si and N in SiNx films were confirmed by using Rutherford backscattering spectroscopy (RBS) and photoluminescence (PL) analysis. The surface morphology of SiNx films was also analyzed by using atomic force microscopy (AFM). It was found that the contents of NH(at. %) is the reverse related with those of SiH corresponding to the result of FT-IR. we conclude that a quantitative analysis on SiNx films can be possible through a precise detection of the contents of H in SiNx films with a FT-IR analysis only.

Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process (반도체 사진공정에서 실리콘 웨이퍼 위의 Silylated Resist의 Fourier 변환 적외선 분광분석)

  • Kang, Sung Chul;Kim, Su Jong;Son, Min Young;Park, Chun Geun
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.455-464
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    • 1992
  • Using FT-IR, we determined the depth of silylated layers produced from various gas-phase-silylation conditions was proposed by using Fourier Transform Infrared (FT-IR) spectroscopic analysis. The depth of silylated layer was determined from absorbance measurments of the significant peaks (Si-O-ph, Si-C, Si-H) of FT-IR spectra with background spectrum subtraction method. And the results were compared with thickness measurments of SEM. The results were well agree with SEM. It found to be well suited for determining silylation process window.

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Properties of Current due to Voltage in Heat Conductive Silicone Rubber (열전도성 실리콘 고무의 전압-전류 특성)

  • Lee, Sung-Ill
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.9
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    • pp.576-581
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    • 2014
  • This study used the heat conductive silicone rubber sample of 0.95 mm thickness to research the properties of current by changing voltage. When the 1, 10, 30, 60, and 90 minute have passed, the running current has been measured through the applied voltage range of 200 V~800 V on setting temperature of $110^{\circ}C{\sim}170^{\circ}C$. As the temperature increased in applied voltage of 800 V, so did the current value according to time in proportion to the increasing temperature. In an analysis of FT-IR (fourier transform infrared) spectrum, the hydroxyl radicals group(O-H) was created by effects of the hydrogen that methyl group is eliminated by addition of the cross-linking agent peroxide.

Infrared Spectral Signatures of Dust by Ground-based FT-IR and Space-borne AIRS (지상 및 위성 고분해 적외스펙트럼 센서에서 관측된 황사 특성)

  • Lee, Byung-Il;Sohn, Eun-Ha;Ou, Mi-Lim;Kim, Yoon-Jae
    • Atmosphere
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    • v.19 no.4
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    • pp.319-329
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    • 2009
  • The intensive dust observation experiment has been performed at Korea Global Atmosphere Watch Center (KGAW) in Anmyeon, Korea during each spring season from 2007 to 2009. Downward and upward hyper-spectral spectrums over the dust condition were measured to understand the hyper-spectral properties of Asian dust using both ground-based Fourier Transform Infrared Spectroscopy (FT-IR) and space-borne AIRS/Aqua. To understand the impact of the Asian dust, a Line-by-Line radiative transfer model runs to calculate the high resolution infrared spectrum over the wave number range of $500-500cm^{-1}$. Furthermore, the radiosonde, a $PM_{10}$ Sampler, a Micro Pulse Lidar (MPL), and an Aerodynamic Particle Sizer (APS) are used to understand the vertical profile of temperature and humidity and the properties of Asian dust like concentration, altitude of dust layer, and size distribution. In this study, we found the Asian dust distributed from surface up to 3-4 km and volume concentration is increased at the size range between 2 and $8{\mu}m$ The observed dust spectrums are larger than the calculated clear sky spectrums by 15~60K for downward and lower by around 2~6K for upward in the wave number range of $800-1200cm^{-1}$. For the characteristics of the spectrum during the Asian dust, the downward spectrum is revealed a positive slope for $800-1000cm^{-1}$ region and negative slope over $1100-1200cm^{-1}$ region. In the upward spectrum, slopes are opposed to the downward one. It is inferred that the difference between measured and calculated spectrum is mostly due to the contribution of emission and/or absorption of the dust particles by the aerosol amount, size distribution, altitude, and composition.

INTENSIVE OBSERVATION OF SAND AND DUST STORMS USING GROUND-BASED FOURIER TRANSFORM INFRARED SPECTROSCOPY IN ANMYEON, KOREA

  • Lee, Byung-Il;Kim, Yoon-Jae;Sohn, Eun-Ha;Kim, Mee-Ja;Lee, Kwang-Mog;Park, Joong-Hyun
    • Proceedings of the KSRS Conference
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    • 2007.10a
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    • pp.142-145
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    • 2007
  • In order to analyze hyper-spectral properties of Sand and Dust Storm (SDS), dust observation experiment has been performed at the Korea Global Atmosphere Watch Center (KGAW) in Anmyeon form early March to middle of May, 2007. We measured down-welling radiances by using ground-based Fourier Transform Infrared Spectroscopy (FT-IR) at the time of overpass of AIRS. And radiative transfer model simulation has been carried out to estimate the effects of size distribution, components, and altitude of SDS over the high resolution infrared spectrum in the range of 500-1500 $cm^{-1}$ with a line-by-line radiative transfer model and compared them with FT-IR and AIRS/Aqua observing data.

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Feasibility of Determining the Ripeness of Strawberry Fruit Flesh by Fourier Transform Infrared Spectroscopy (Fourier 변환 적외선 분광분석법에 의한 딸기 과육의 성숙도 측정 가능성)

  • Min, Sung-Ran;Kwak, Chul-Won;Kim, Suk-Weon;Jeong, Won-Joong;Chung, Hwa-Jee;Choi, Pil-Son;Ko, Suk-Min;Park, Sang-Kyu;Chung, Hoe-Il;Liu, Jang, R.
    • Journal of Plant Biotechnology
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    • v.33 no.4
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    • pp.277-281
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    • 2006
  • Fourier transform - infrared spectroscopy (FT-IR) provides biochemical profiles containing overlapping signals from a majority of the compounds that are present when whole cell extracts are analyzed. We attempted to determine the ripeness of strawberry fruit flesh by FT-IR. Fruit ripeness was divided into four developmental stages based on fruit skin color: 'yellow-green', 'pink-green', 'pink', and 'red' stages. Principal component analysis of FT-IR data of inside fruit flesh extracts clustered samples of four different developmental stages into three discrete groups: (1) 'yellow-green' group, (2) 'pink-green' group, and (3) 'pink' and 'red' group. The most remarkable difference between four different developmental stages was found in the carbohydrate fingerprint region $(1,000-1,100cm^{-1})$ of the FT-IR spectrum, indicating that differences in carbohydrate compounds represented the ripeness of strawberry fruit. Overall results indicate that FT-IR in combination with PCA enables discrimination of the ripeness of strawberry fruit flesh.

Scientific Studies on Ancient Silk Fibers Used for Textiles Excavated at Archaeological Sites in Japan, Using Microscopic Fourier Transform Infrared Spectroscopy

  • SATO, Masanori
    • Journal of Conservation Science
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    • v.5 no.2 s.6
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    • pp.45-50
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    • 1996
  • Silk fibers excavated at Fujinoki mounted tomb, Shimoikeyana mounted tomb and Kuriyama site were examined using FT-IR microscope and two peaks called amide I and II present in modern silk fibers were compared with those of excavated fibers. It was found that amide ground in a polymer molecule decreased with the progress of degradation and peak intensity of amide group in infrared spectrum decreased correspondingly. The advantages of FT-IR microscopy for the analysis of organic remains in archaeological view point were evaluated and it was concluded that the systematic investigation of spectral change due to the degradation of respective material is essential.

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Study on Methods of Enhancement and Measurement of Corrosion Resistance for Subsea Equipment made of Aluminum (알루미늄으로 제작된 심해 장비의 부식 저항 능력 향상 방법 및 측정 방법 조사)

  • Seo, Youngkyun;Jung, Jung-Yeul
    • Plant Journal
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    • v.16 no.3
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    • pp.47-52
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    • 2020
  • This study investigated the methodologies to enhance the corrosion resistance and the ways to measure for subsea equipment made of aluminum. The methodologies for the anticorrosion were cathodic protection, conversion coating, anodizing and organic coating. The simply analyzed ways to measure the corrosion resistance were Scanning Electron Microscope (SEM), Electrochemical Impedance Spectroscopy (EIS), Glow discharge optical emission spectrum spectroscopy (GD-OES), Fourier Transform Infrared Spectroscopy (FT-IR), Transmission Electron Microscopy (TEM), X-ray Photoelectron Spectroscopy (XPS), Scanning Vibrating Electrode Technique (SVET), contact angle and interfacial tension. The most widely used tools for increasing the corrosion resistance were the anodizing and the organic coating. Many ways were evenly used to measure corrosion. The methods more frequently utilized were SEM for the surface investigation and the contact angle to evaluate the corrosion resistance.

The Characteristics of Plasma Polymerized Carbon Hardmask Film Prepared by Plasma Deposition Systems with the Variation of Temperature

  • Yang, J.;Ban, W.;Kim, S.;Kim, J.;Park, K.;Hur, G.;Jung, D.;Lee, J.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.381.1-381.1
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    • 2014
  • In this study, we investigated the deposition behavior and the etch resistivity of plasma polymerized carbon hardmask (ppCHM) film with the variation of process temperature. The etch resistivity of deposited ppCHM film was analyzed by thickness measurement before and after direct contact reactive ion etching process. The physical and chemical properties of films were characterized on the Fourier transform infrared (FT-IR) spectroscope, Raman spectroscope, stress gauge, and ellipsometry. The deposition behavior of ppCHM process with the variation of temperature was correlated refractive index (n), extinction coefficient (k), intrinsic stress (MPa), and deposition rate (A/s) with the hydrocarbon concentration, graphite (G) and disordered (D) peak by analyzing the Raman and FT-IR spectrum. From this experiment we knew an optimal deposition condition for structure of carbon hardmask with the higher etch selectivity to oxide. It was shown the density of ppCHM film had 1.6~1.9 g/cm3 and its refractive index was 1.8~1.9 at process temperature, $300{\sim}600^{\circ}C$. The etch selectivity of ppCHM film was shown about 1:4~1:8 to undoped siliconoxide (USG) film (etch rate, 1300 A/min).

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Grafting of Glycidyl Methacrylate upon Coralline Hydroxyapatite in Conjugation with Demineralized Bone Matrix Using Redox Initiating System

  • Murugan, R.;Rao, K.Panduranga
    • Macromolecular Research
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    • v.11 no.1
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    • pp.14-18
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    • 2003
  • Grafting of glycidyl methacrylate (GMA) upon coralline hydroxyapatite in conjugation with demineralized bone matrix (CHA-DBM) using equal molar ratio of potassium persulfate/sodium metabisulfite redox initiating system was investigated in aqueous medium. The optimum reaction condition was standardized by varying the concentrations of backbone, monomer, initiator, temperature and time. The results obtained imply that the percent grafting was found to increase initially and then decrease in most of the cases. The optimum temperature and time were found to be 50 $^{\circ}C$ and 180 min, respectively, to obtain higher grafting yield. Fourier transform infrared (FT-IR) spectroscopy and X-ray powder diffraction (XRD) method were employed for the proof of grafting. The FT-IR spectrum of grafted CHA-DBM showed epoxy groups at 905 and 853 $cm^{-1}$ / and ester carbonyl group at 1731 $cm^{-1}$ / of poly(glycidyl methacrylate) (PGMA) in addition to the characteristic absorptions of CHA-DBM, which provides evidence of the grafting. The XRD results clearly indicated that the crystallographic structure of the grafted CHA-DBM has not changed due to the grafting reaction. Further, no phase transformation was detected by the XRD analysis, which suggests that the PGMA is grafted only on the surface of CHA-DBM backbone. The grafted CHA-DBM will have better functionality because of their surface modification and hence they may be more useful in coupling of therapeutic agents through epoxy groups apart from being used as osteogenic material.