• 제목/요약/키워드: FE-SEM/EDS

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Electroless Plating of Cu and its Characteristics with Plating Parameters and Reducing Agent (도금 변수 및 환원제에 따른 Cu 무전해 도금 및 도금막 특성 평가)

  • Lee, Jeong-Hyeon;Lee, Sun-Jae;Jeong, Do-Hyeon;Jeon, Ju-Seon;Jeong, Jae-Pil
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.174.1-174.1
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    • 2016
  • 무전해 도금법은 외부 전원을 인가하지 않고 환원제를 이용하여 자발적으로 금속 도금층을 형성시키는 기술로, 용액내의 환원제가 산화될 때 방출되는 전자가 금속 이온에 전이하여 금속을 코팅하는 기술이다. 그 중에서도 Cu 무전해도금은 박막 형성의 용이성 및 간단한 제조 공정으로 인한 제조 원가 절감 등의 장점으로 인해 반도체 소자 배선부분에서 건식방식으로 발생되는 한계점들에 대한 해결 기술로 주목받고 있다. 또한, 이 기술은 금속 이온이 환원제에 의해 금속으로 석출되기 때문에, 피도금물이 무전해 도금액과 균일하게 접촉하고 있으면 균일한 도금 두께를 얻을 수 있는 장점이 있어서 복잡하고 다양한 형상의 제품에 적용이 가능하다. 본 연구에서는 플라스틱, PCB 등 다양한 기판에 도금 환원제, 온도 및 시간 등 도금변수를 변경하여 Cu 도금막을 형성한 후 그 특성을 평가하였다. 도금층 두께 분석을 위해 field emission scanning electron microscope (FE-SEM), energy-dispersive spectroscopy (EDS)를 사용하였으며, 박리성 평가를 위해 cross-cutting test를 실시하였다. 실험 결과, 두께 $1{\sim}3{\mu}m$ 급의 균일한 도금층이 형성된 것을 확인하였으며, $85^{\circ}C/85%$ 고온고습 조건에서 168시간 후 박리성 평가 결과, 결함 없는 양호한 표면을 나타내었다.

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Effects of TiN Coating on the Fatigue Fracture of Dental Implant System with Various Cyclic Loads

  • Jung, Da-Un;Chung, Chae-Heon;Son, Mee-Kyoung;Choe, Han-Cheol
    • Journal of Surface Science and Engineering
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    • v.48 no.6
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    • pp.283-291
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    • 2015
  • The purpose of this study was to investigate effects of TiN coating on the fatigue fracture of dental implant system with various cyclic loads. TiN coated abutment screw, the fixture, and abutment of internal hex type were prepared for fatigue test. The fatigue test was carried out according to ISO 14801:2003(E) using tensile and compression tester with repeated load from 30% to 80% of static fracture force. Morphology and fractured surface was observed by field emission scanning electron microscope(FE-SEM) and energy dispersive X-ray spectroscope(EDS). The fracture cycle drastically decreased as repeated load increased. Especially, in the case of TiN-coated abutment screw, fracture cycle increased compared to non-coated abutment screw. The fatigue crack was propagated fast as repeated load increased. The plastic deformation region decreased, whereas, cleavage fracture region increased as repeated load increased.

Corrosion Behaviors of ZrN Coated on Dental Co-Cr Alloys (ZrN 코팅된 치과 주조용 Co-Cr 합금의 부식거동)

  • Lee, Sang-Hun;Nah, Jung-Sook;Jang, Jae-Young
    • Journal of Technologic Dentistry
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    • v.35 no.4
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    • pp.343-352
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    • 2013
  • Purpose: The purpose of this study was to investigate to effect of the ZrN coated on corrosion resistance and physical property of dental Co-Cr alloys using various instruments. Methods: The specimens were used, respectively, for experiment, Arc Ion plating was carried out for dental casting alloys using ZrN coated materials with nitrogen gas. ZrN coated surface of each specimen was observed with field emission scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDS), vickers hardness tester, and electrochemical tester. Results: The current density of ZrN coated specimen was smaller than that of non-coated specimen in 0.9% NaCl solution. Pit nucleated at scratch of specimen. The pitting corrosion resistant |$E_{max}-E_{rep}$| increased in order of ZrN coated (110 mV), and non-coated wire (100 mV). Conclusion: The corrosion potential of the ZrN coated specimen was comparatively high. the surface of ZrN coated specimen was more smooth than that of other kinds of non-coated specimen. ZrN coated surface showed higher hardness than that of non-coated surface.

Effect of the Mg Ion Containing Oxide Films on the Biocompatibility of Plasma Electrolytic Oxidized Ti-6Al-4V

  • Lee, Kang;Choe, Han-Cheol
    • Journal of Surface Science and Engineering
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    • v.49 no.2
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    • pp.135-140
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    • 2016
  • In this study, we prepared magnesium ion containing oxide films formed on the Ti-6Al-4V using plasma electrolytic oxidation (PEO) treatment. Ti-6Al-4V surface was treated using PEO in Mg containing electrolytes at 270V for 5 min. The phase, composition and morphology of the Mg ion containing oxide films were evaluated with X-ray diffraction (XRD), Attenuated total reflectance Fourier transform infrared (ATR-FTIR) and filed-emission scanning electron microscopy (FE-SEM) with energy dispersive X-ray spectrometer (EDS). The biocompatibility of Mg ion containing oxide films was evaluated by immersing in simulated body fluid (SBF). According to surface properties of PEO films, the optimum condition was formed when the applied was 270 V. The PEO films formed in the condition contained the properties of porosity, anatase phase, and near 1.7 Ca(Mg)/P ratio in the oxide film. Our experimental results demonstrate that Mg ion containing oxide promotes bone like apatite nucleation and growth from SBF. The phase and morphologies of bone like apatite were influenced by the Mg ion concentration.

CZTS 태양전지 제작을 위한 열분해법 나노 파티클 합성

  • Lee, Su-Ho;Seo, Mun-Su;Hong, Byeong-Yu;Park, Yong-Seop;Lee, Jae-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.321.1-321.1
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    • 2013
  • 높은 광흡수 계수를 갖는 Cu(In,Ga)Se2(CIGS) 화합물 박막 소재는 고효율 태양전지 양산을 위해 가장 전도유망한 재료이나 상대적으로 매장량이 적은 In 및 Ga을 사용한다는 소재적 한계가 있다. Cu2ZnSnSe4(CZTSe) 혹은 Cu2ZnSnS4(CZTS)와 같은 Cu-Zn-Sn-Se계 화합물 반도체는 CIGS 내 희소원소인 In과 Ga이 범용원소인 Zn 및 Sn으로 대체된 소재로써 미래형 저가 태양전지 개발을 위해 활발히 연구되고 있는데, 그 화합물 조합에 따라 0.8eV부터 1.5eV까지의 에너지 밴드갭을 갖는 것으로 알려져 있다. 본 연구에서는 열분해법으로 CZTS 나노 입자를 합성하였다. 용매로 Oleylamine을 사용하였는데, $260{\sim}340^{\circ}C$의 온도 범위에서 5시간 30분 동안 CZTS 나노입자를 합성하였고, $300^{\circ}C$에서 5시간 30분~9시간까지 합성하였다. 헥산을 이용하여 원심분리기와 초음파세척기로 용매인 Oleylamine을 제거하였고, 진공오븐에서 건조된 CZTS 분말의 FE-SEM (Field Emission Scanning Electron Microscope), XRD (X-Ray Diffraction), EDS (Energy Dispersive Spectroscopy) 분석 등을 통해 합성온도에 따른 구조적, 화학적 조성 변화를 조사하였다.

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Thermal stability and microstructure of CrZr-Al-N films synthesized by unbalanced magnetron sputtering with Cr-Zr-Al segment target (Cr-Zr-Al segment 타겟을 장착한 Unbalanced magnetron sputtering 활용하여 증착한 CrZr-Al-N 박막의 thermal stability와 microstructure에 관한 연구)

  • Kim, Dong-Jun;Ra, Jeong-Hyeon;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.173-173
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    • 2012
  • 본 연구는 segment target을 장착한 unbalanced magnetron sputtering을 활용하여 CrZr-Al-N 박막을 합성하고 박막의 고온안정성과 미세구조를 연구하는데 그 목적이 있다. 박막의 Al 함량을 조절하기 위하여 각 segment target은 Cr,Zr을 일정vol% 유지하며 Al vol%만 변화하여 설계하였다. 박막의 고온안정성을 실험하기 위해 각 시편은 $100{\sim}500^{\circ}C$ 사이의 온도에서 1시간씩 annealing 처리를 실시한 후에 경도를 측정하였다. 박막의 미세구조 단면을 위해 FE-SEM을 이용하였으며 이밖에 박막의 조성, 경도 및 결정구조를 측정하기 위해 EDS, microhardness testing system, XRD를 사용하였다. Al 부피비를 변화시킨 Segment target을 활용한 박막합성에서 박막의 Al함량은 각각 1/11에서 4.6at.%, 1/5에서 8.1at.%, 1/3에서 12.9at.% 로 나타났으며, 박막의 경도는 4.6~12.9at.% 사이의 Al 함량을 갖는 박막에 대해 모두 유사한 값을 가졌으며 31GPa로 측정되었다. 박막의 단면 구조 역시 4.6~12.9at.% 사이의 Al 함량을 갖는 박막에 대해 모두 columnar 구조가 관찰되었다.

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Characteristics of a Titanium-oxide Layer Prepared by Plasma Electrolytic Oxidation for Hydrogen-ion Sensing

  • Lee, Do Kyung;Hwang, Deok Rok;Sohn, Young-Soo
    • Journal of Sensor Science and Technology
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    • v.28 no.2
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    • pp.76-80
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    • 2019
  • The characteristics of a titanium oxide layer prepared using a plasma electrolytic oxidation (PEO) process were investigated, using an extended gate ion sensitive field effect transistor (EG-ISFET) to confirm the layer's capability to react with hydrogen ions. The surface morphology and element distribution of the PEO-processed titanium oxide were observed and analyzed using field-emission scanning-electron microscopy (FE-SEM) and energy-distribution spectroscopy (EDS). The titanium oxide prepared by the PEO process was utilized as a hydrogen-ion sensing membrane and an extended gate insulator. A commercially available n-channel enhancement MOS-FET (metal-oxide-semiconductor FET) played a role as a transducer. The responses of the PEO-processed titanium oxide to different pH solutions were analyzed. The output drain current was linearly related to the pH solutions in the range of pH 4 to pH 12. It was confirmed that the titanium-oxide layer prepared by the PEO process could feasibly be used as a hydrogen-ion-sensing membrane for EGFET measurements.

Effect of Zinc Based Anodes on Self-Discharge Behavior for Zinc-Air Batteries (아연-공기 전지용 음극재의 자가방전 억제 효과)

  • Jung, Min Seo;Jo, Yong Nam
    • Korean Journal of Materials Research
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    • v.30 no.12
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    • pp.709-714
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    • 2020
  • For zinc-air batteries, there are several limitations associated with zinc anodes. The self-discharge behavior of zinc-air batteries is a critical issue that is induced by corrosion reaction and hydrogen evolution reaction (HER) of zinc anodes. Aluminum and indium are effective additives for controlling the hydrogen evolution reaction as well as the corrosion reaction. To enhance the electrochemical performances of zinc-air batteries, mechanically alloyed Zn-Al and Zn-In materials with different compositions are successfully fabricated at 500rpm and 5h milling time. Investigated materials are characterized by X-ray diffractometer (XRD), field emission scanning electron microscope (FE-SEM), and energy dispersive spectrometer (EDS). Alloys are investigated for the application as novel anodes in zinc-air batteries. Especially, the material with 3 wt% of indium (ZI3) delivers 445.37 mAh/g and 408.52 mAh/g of specific discharge capacity with 1 h and 6 h storage, respectively. Also, it shows 91.72 % capacity retention and has the lowest value of corrosion current density among attempted materials.

Sodium titanate as an infrared reflective material for cool roof application

  • Ullah, Mahboob;Kim, Hee Jung;Heo, Jae Gu;Roh, Dong Kyu;Kim, Dae-Sung
    • Journal of Ceramic Processing Research
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    • v.20 no.spc1
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    • pp.86-91
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    • 2019
  • A solid-state route was used to prepare sodium titanium oxide (NTO, Na2Ti3O7) as a solar heat protecting material with an impressive solar reflectance (TSR = 94.3%) using a high refractive index rutile TiO2. The solar reflectance of the synthesized NTO was measured using UV-Vis-NIR spectrophotometer. Solar reflectance property of the synthesized compound depends on the calcination temperature. The solar reflectance property of the synthesized NTO powder was compared with commercial rutile TiO2. The compound synthesized at 900 ℃ for 24 hrs had remarkable solar reflectance 94.3% than that calcined below 900 ℃. Crystalline nature, structural property, morphology and optical properties of NTO powders were characterized and analyzed using XRD, FE-SEM, EDS and UV-Vis-NIR spectrophotometer. From the results, we guessed that NTO would be a suitable "solar heat protecting candidate" for energy-saving applications in coating industries.

Corrosion behaviors of plasma electrolytic oxidation (PEO) treated high-silicon aluminum alloys

  • Park, Deok-Yong;Chang, Chong-Hyun;Oh, Yong-Jun;Myung, Nosang V.;Yoo, Bongyoung
    • Journal of Surface Science and Engineering
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    • v.55 no.3
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    • pp.143-155
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    • 2022
  • Ceramic oxide layers successfully were formed on the surface of cast Al alloys with high Si contents using plasma electrolytic oxidation (PEO) process in electrolytes containing Na2SiO3, NaOH, and additives. The microstructure of the oxide layers was systematically analyzed using scanning electron microscopy (SEM), cross-sectional transmission electron microscopy (TEM), X-ray diffraction patterns (XRD), and energy X-ray dispersive spectroscopy (EDS). XRD analysis indicated that the PEO untreated high-silicon Al alloys (i.e., 17.1 and 11.7 wt.% Si) consist of Al, Si and Al2Cu phases whereas Al2Cu phase selectively disappeared after PEO treatment. PEO process yielded an amorphous oxide layer with few second phases including γ-Al2O3 and Fe-rich phases. The corrosion behaviors of high-silicon Al alloys treated by PEO process were investigated using electrochemical impedance spectroscopy (EIS) and other electrochemical techniques (i.e., open circuit potential and polarization curve). Electroanalytical studies indicated that high-silicon Al alloys treated by PEO process have greater corrosion resistance than high-silicon alloys untreated by PEO process.