• Korean Journal of Computational Design and Engineering
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• v.19 no.3
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• pp.236-244
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• 2014

Presented in the paper is a reservation based dispatching rule to achieve the on-time delivery in system LSI (large scale integrated circuit) semiconductor fabrication (FAB) with urgent orders. Using the proposed reservation based dispatching rule, urgent lots can be processed without waiting in a queue. It is possible to achieve the on-time delivery of urgent orders by reserving a proper tool for the next step in advance while urgent lots are being processed at the previous step. It can cause, however, tardiness of normal lots, because the proposed rule assign urgent lots first. To solve this problem, the proposed rule tries to find the best tool for the reservation in the tool group, which can minimize idle time, and the reservation rule is applied at all tools except for photolithography tools (bottleneck). $MOZART^{(R)}$ which is developed by VMS solutions are used for simulation experiments. The experimentation results show that the reservation based dispatching rule can achieve the on-time delivery of normal lots as well as urgent lots.

• Journal of Korean Physical Therapy Science
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• v.29 no.3
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• pp.1-11
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• 2022

Background: The aim of this randomized controlled pilot study was to determine the effect of trunk training in wheelchair on fall efficacy, fall risk and activities of daily living in acute stroke patients. Design: Randomized controlled pilot trial. Methods: The study included 18 patients with acute stroke who were randomly allocated to an experimental group (EG) (n=9) and a control group (CG) (n=9). Patients in the EG group received general rehabilitation therapy combined with trunk training in wheelchair for 20min, whereas CG group received general rehabilitation therapy combined with bicycle training for 20min. Both groups performed the exercise 5 times a week for 3 weeks. Outcomes were assessed using Korean-Fall Efficacy Scale (K-FES), Fullerton Advanced Balance Scale (FAB) and Korean-Modified Barthel Index (K-MBI). Results: After 3 weeks of training, both groups showed significantly improved K-FES, FAB and K-MBI (p<.05 in both groups). However, the K-FES, FAB and K-MBI in the experimental group was significantly improving than in the control group (p<.05). Conclusion: These findings indicate that trunk training in wheelchair may be effective at decreasing fall risk and improving activities of daily living in acute stroke patients. Therefore, trunk training in wheelchair may be recommended as an intervention in reducing the incidence of fall risk in acute stroke patient.

• The Korean Journal of Food And Nutrition
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• v.22 no.4
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• pp.577-586
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• 2009

Aging is associated with decreased energy expenditure, thermogenesis and energy requirements. Maintenance of physical fitness of the elderly has been reported to reduce the rate at which the basal metabolic rate, muscle strength, skeletal muscle mass and bone density deteriorate. Skeletal muscle disease is known to increase the risk of physical disability and psychological problems. This study was conducted to investigate changes in disability, emotional problems, body compositions, obesity indices and nutrient intake levels according to physical fitness with the elderly in rural areas. According to the results, physical fitness was negatively related with Activities of Daily Living(ADL, p<0.05), Instrumental Activities of Daily Living(IADL, p<0.001), Body Mass Index(BMI, p<0.001) and abdominal obesity(p<0.05), while it showed a positive correlation with the General Self Efficacy Scale(GSES)(p<0.001) and nutrient intake(p<0.05). When changes in these factors were compared according to the range of quartile of the Fullerton Advanced Balance Scale(FAB Scale), GSES(Q1=35.3, Q2=43.5, Q3=53.2, Q4=51.9, p<0.001), BMI(Q1=36.1%, Q2=34.7%, Q3=33.2%, Q4=28.6%, p<0.01), abdominal obesity(Q1=1.02, Q2=0.99, Q3=0.97, Q4=0.94, p<0.001) and nutrient intake(Q1=71.1%, Q2=75.4%, Q3=80.6%, Q4=80.2%, p<0.05) differed significantly. Taken together, these results suggested that better physical fitness would lead to a reduction in negative factors including physical disability and obesity indices, but to an increase in positive factors such as GSES and nutrient intake. The results of this study are expected to be used as basic data for the development of programs to promote the health of the elderly in a local society.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.5
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• pp.1074-1081
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• 2009

The importance of improving semiconductor fab layout has been increased with the necessity of a large-scale capital investment and the increase of manufacturing complexity of the system. For the present, most semiconductor fab takes the form of a bay type layout where the same types of machines has been laid at the same bay. The bay type layout has many disadvantages in respect of material flow control even though it has merits of flexibility. To overcome the drawbacks of the bay type layout, a new room type semiconductor layout which integrates bays without a center spine and maintains the flexibilities of the bay type has been presented and compared with existing layouts. The results of test show that the room type layout is superior to the existing layouts from standpoints of transportation number and time, foot-print, number of stocker being passed and material flow time.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.26-31
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• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• Journal of the Korean Society of Physical Medicine
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• v.12 no.4
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• pp.139-146
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• 2017

PURPOSE: The purpose of this study was to systematically analyze the reliability and validity of the Korean-version of the balance assessment tools. METHODS: Two reviewers of this study independently evaluated the titles of articles and abstracts of studies published until December 2016 through electronic databases (RISS, NDSL, KISS, DBpia) using the keywords "Balance or posture or postural control or postural stability", "Test or assessment or measurement or outcome measure or assessment tool or measurement tool", "Korean version", "Reliability" and "Validity". Regarding the questions considered suitable for the purpose of this study, consensus was reached after reading the full text. Selecting journals suitable for the purpose of the study, they were analyzed as data. RESULTS: The reviewers selected nine papers suitable for the purpose of this study, and Korean-version of the balance assessment tools, included the Berg Balance Scale (BBS), Activities-specific Balance Confidence (ABC) scale, Postural Assessment Scale for Stroke (PASS), Motor Assessment Scale (MAS), Trunk Impairment Scale (TIS), Falls Efficacy Scale (FES), Tinetti-Balance scale, Fullerton Advanced Balance (FAB) scale, and Function In Sitting Test (FIST). Our study showed that the reliability and validity of the Korean-version of the balance assessment tools were high. CONCLUSION: The Korean-version of the balance assessment tools with high reliability and validity would enable physical therapists to make a more accurate evaluation of balance.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.196-203
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• 2002

Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2006.11a
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• pp.525-528
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• 2006

This paper considers the vehicle dispatching problem in the automated material handling system (AMHS) of a large scale semiconductor fabrication line, which consists of 18 bays, 468 equipments and uses more than 130 overhead hoist transporters (OHT). We propose an assignment problem based vehicle dispatching approach to take advantage of simultaneous vehicle reassignment based on up-to-date system status. The proposed approach compares fsvorably with the shortest travel distance first rule and with the reassignment based rule which was recently proposed by the authors, in the number of vehicles required and the average lead time.

• Metals and materials international
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• v.24 no.6
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• pp.1285-1292
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• 2018

Microstructural properties of as-grown and annealed CoCrFeMnNi high entropy alloy (HEA) oxynitride thin films were investigated. The CoCrFeMnNi HEA oxynitride thin film was grown by magnetron sputtering method using an air gas, and annealed under the argon plus air flow for 5 h at $800^{\circ}C$. The as-grown film was homogeneous and uniform composed of nanometer-sized crystalline regions mixed with amorphous-like phase. The crystalline phase in the as-grown film was face centered cubic structure with the lattice constant of 0.4242 nm. Significant microstructural changes were observed after the annealing process. First, it was fully recrystallized and grain growth happened. Second, Ni-rich region was observed in nanometer-scale range. Third, phase change happened and it was determined to be $Fe_3O_4$ spinel structure with the lattice constant of 0.8326 nm. Hardness and Young's modulus of the as-grown film were 4.1 and 150.5 GPa, while those were 9.4 and 156.4 GPa for the annealed film, respectively.

• Sleep Medicine and Psychophysiology
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• v.20 no.1
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• pp.15-21
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• 2013

Objectives: Cognitive impairment in restless legs syndrome (RLS) patients can be affected by sleep deprivation, anxiety and depression, which are common in RLS. The objective of this study is to investigate relationship between cognitive impairment and RLS in the non-medicated Korean elderly with controlling for psychiatric conditions. Method: The study sample for this study comprised 25 non-medicated Korean elderly RLS patients and 50 age-, sex-, and education- matched controls. All subjects were evaluated with comprehensive cognitive function assessment tools- including the Korean version of Consortium to Establish a Registry for Alzheimer's Disease Assessment Packet (CERAD-K), severe cognitive impairment rating scale (SCIRS), frontal assessment battery (FAB), and clock drawing test (CLOX). Sleep quality and depression were also assessed with Pittsburgh sleep quality index (PSQI) and geriatric depression scale (GDS). Results: PSQI and GDS score showed no difference between RLS and control group. There was no significant difference between two groups in nearly all the cognitive function except in constructional recognition test, in which subjects with RLS showed lower performance than control group (t=-2.384, p=0.02). Subjects with depression ($GDS{\geq}10$) showed significant cognitive impairment compared to control in verbal fluency, Korean version of Mini Mental Status Examination in the CERAD-K (MMSE-KC), word list memory, trail making test, and frontal assessment battery (FAB). In contrast, no difference was observed between subjects who have low sleep quality (PSQI>5) and control group. Conclusions: At the exclusion of the impact of insomnia and depression, cognitive function was found to be relatively preserved in RLS patients compared to control. Impairment of visual recognition in RLS patients can be explained in terms of dopaminergic dysfunction in RLS.