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Chemical Mechanical Polishing Characteristics of Mixed Abrasive Silica Slurry (MAS) by adding of Manganese oxide (MnO2) Abrasive (산화망간이 첨가된 혼합 연마제 실리카 슬러리의 산화막 CMP 특성)

  • Seo, Yong-Jin
    • Journal of IKEEE
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    • v.23 no.4
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    • pp.1175-1181
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    • 2019
  • In this paper, we have studied the chemical mechanical polishing(CMP) characteristics of mixed abrasive silica slurry(MAS) retreated by adding of manganese oxide(MnO2) abrasives within 1:10 diluted silica slurry. A slurry designed for optimal performance should produce high removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The polishing performances of MnO2 abrasive-added MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared to original silica slurry in the view-point of high removal rate and low non-uniformity. Therefore, our proposed MnO2-MAS can be useful to save on the high cost of slurry consumption since we used a 1:10 diluted silica slurry.

Research for the influence of body movement on the space occupation - Focusing on the GSD - (몸 움직임이 공간구축에 미친 영향에 관한 연구 - 감성공간디자인(GSD)를 중심으로 -)

  • Kim, Yeon-Joung;Oh, Young-Keun
    • Korean Institute of Interior Design Journal
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    • v.18 no.6
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    • pp.124-132
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    • 2009
  • Recently, 'Emotion' has attracted public attention socially and continuously in the fields such as construction, environment, design and products. Also, phenomenological concept of space through the physique in the viewpoint of the human-oriented aspect, namely, body, has been managed as a planned measure suitable for a new era and space. In this study, the author examined and analyzed the verbs and emotional vocabulary about the human body's behavior. The phenomenological space conception through body, i.e, flesh in this human centered point of view is being treated as the suitable planning measure on the new era and space. Though the epochal issue for Emotion is being attempted in many ways in various field such as product and marketing, the approach through the relationship between human and space. Therefore, we would like to see how the Emotion related to the movement that occurs in the space by analyzing the human body movement which is the subject of experiencing the space experimentally and research the characteristic of Emotion and space movement. SPSS 12.0 was used for the analysis to perform the analysis of basic statistics and Factor Analysis, and then to analyze the characteristic and emotional attribute for the experimental analysis. Comparing the activity for the 2 groups' behavior through the analyzed result with the test, active behavior was found to be higher than inactive behavior in the emotional value, and their bodies' motion showed averagely positive value in the emotional aspect; their bodies' motion was presented differently according to the attributes and amount of the people who would experience a specific space. However, the author found that affirmative and active behavior showed emotional aspect more than inactive behavior.

Study on the Methods of Enhancing the Quality of DIBR-based Multiview Intermediate Images using Depth Expansion and Mesh Construction (깊이 정보 확장과 메쉬 구성을 이용한 DIBR 기반 다시점 중간 영상 화질 향상 방법에 관한 연구)

  • Park, Kyoung Shin;Kim, Jiseong;Cho, Yongjoo
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.19 no.1
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    • pp.127-135
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    • 2015
  • In this research, we conducted an experiment on evaluating the extending depth information method and surface reconstruction method and the interaction of these two methods in order to enhance the final intermediate view images, which are acquired using DIBR (Depth-Image-Based Rendering) method. We evaluated the experimental control groups using the Microsoft's "Ballet" and "Break Dancer" data sets with three different hole-filling algorithms. The result revealed that the quality was improved the most by applying both extending depth information and surface reconstruction method as compared to the previous point clouds only. In addition, it found that the quality of the intermediate images was improved vastly by only applying extending depth information when using no hole-filling algorithm.

An Estimation of Shear Capacity of Hexagonal Masonry Walls Under Cyclic Loading (반복하중을 받는 육각형 블록 벽체 전단내력평가)

  • Chang, Gug-Kwan;Seo, Dae-Won;Han, Tae-Kyoung
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.14 no.6
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    • pp.205-214
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    • 2010
  • Masonry structures have been used throughout the world for the construction of residential buildings. However, from a structural point of view, the masonry material is characterized by a very low tensile strength. Moreover, the bearing and shear capacity of masonry walls have been found to be vulnerable to earthquakes. In this study, to improve the seismic performance of masonry walls, hexagonal blocks were developed and six masonry walls made with hexagonal block were tested to failure under reversed cyclic lateral loading. This paper focuses on an experimental investigation of different types of wall with hexagonal blocks, i.e. walls with different hexagonal blocks and with different reinforcing bar arrangements, subjected to applied cyclic loads. The cracking, damage patterns and hysteretic feature were evaluated. Results from the hexagonal masonry wall were shown more damage reduction and less brittle failure in comparison to the existing rectangular masonry walls.

A Study on Perceived City Brand Image and Consumer Behavior (도시브랜드이미지 인식과 소비자 행동 연구)

  • Park, Gwijeong;Park, Soyoung
    • Journal of Digital Convergence
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    • v.16 no.7
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    • pp.145-151
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    • 2018
  • This paper is a study on city brand development which is increasingly interested as a means to enhance the attractiveness of the city. the previous research, the design of city brand identity was an application from the internal stakeholder's point of view related to the metropolitan government. However, in the present study, we tried to take a external approach that perceptions and designs city brands from the related to the consumer. For the purpose of research, based on previous studies, we extracted three images of leading, stable and amusing city brand images and prepared three scenarios for the imaginary city as experimental stimuli. The results showed that the overall city brand attitude, residence intention, and tourism intention to the imaginary city were significantly different according to the leading, stability and amusement brand image. According to the results of this study, it is necessary to continuously effort the development of city brand image which is perceived by consumers in order to differentiate city.

Utility Interactive Solar Power Conditioner with Zero Voltage Soft Switching High frequency Sinewave Modulated Inverter Link

  • Terai H.;Sumiyoshi S.;Kitaizumi T.;Omori H.;Ogura K.;Chandhaket S.;Nakaoka M.
    • Proceedings of the KIPE Conference
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    • 2001.10a
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    • pp.668-672
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    • 2001
  • The utility interactive sinewave modulated inverter for the solar photovoltaic (PV) power conversion and conditioning with a new high frequency pulse modulated link is presented for domestic residential applications. As compared with the conventional full-bridge hard switching PWM inverter with a high frequency AC link, the simplest single-ended quasi-resonant soft switching sinewave modulated inverter with a duty cycle pulse control is implemented, resulting in size and weight reduction and low-cost. This paper presents a prototype circuit of the single-ended zero voltage soft switching sinewave inverter for solar power conditioner and its operating principle. In addition, this paper proposes a control system to deliver high quality output current. Major design of each component and the power loss analysis under actual power processing is also discussed from an experimental point of view. A newly developed interactive sinewave power processor which has $92.5\%$ efficiencty at 4kW output is demonstrated. It is designed 540mm-300mm-125mm in size, and 20kg in weight.

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A Development of Energy Saving System for Automatic Lighting Control using PIR (PIR을 이용한 에너지절감형 자동조명제어 시스템 개발)

  • Joo, Jin-Hwan;Kang, Shin-Wook;Kwon, Hak-Cheol;Lee, Suk-Gyu;Park, Ju-Hyun
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.24 no.2
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    • pp.58-68
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    • 2010
  • This paper proposes a novel design of auto light control system with high efficiency using RS-485 to save lighting energy in new and existing buildings. The proposed system consists of ALSU(Auto Light Sensor Unit) which is connected with RS-485 to control lighting appliances, ALS(Auto Light Unit), and Hi-FACS which is a monitoring system using communication interface. lighting appliances are automatically controlled by ALSU which detects moving objects. The total system is designed to be controlled by either manual or auto mode by using the ALS. In addition, the monitoring system receives the information on the state of the lighting appliances from ALSU and ALS to control the proposed system We compared the proposed system with the conventional one in functionality and energy saving point of view. Through some experimental results, the proposed system shows better performance in various circumstances.

Search for Semantic Web Services Based on the Integrated Concept Model (통합 개념 모델에 기반한 시맨틱 웹 서비스 탐색)

  • Du, Hwa-Jun;Shin, Dong-Hoon;Lee, Kyong-Ho
    • Journal of Korea Multimedia Society
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    • v.10 no.2
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    • pp.147-169
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    • 2007
  • Semantic Web Services Discovery matches between users' requirements and the ontological description of Web Services. However, concepts of an ontology can be interpreted differently according to a point of view. Previous works are limited in interpreting concepts. Since they lack a precise scheme of describing the advertisements and requirements of services and users, respectively, and even do not support a sophisticated matching, semantic mismatches may occur. This paper presents a sophisticated method of discovering Web services. The proposed method facilitates specifying semantics precisely and flexibly based on a proposed integrated concept model. Additionally, more sophisticated discovery is supported by computing complex matchings with many-to-many relationships. Experimental results show that the proposed method performs more efficiently for various kinds of user requests, compared with previous works.

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Chemical Mechanical Polishing: A Selective Review of R&D Trends in Abrasive Particle Behaviors and Wafer Materials (화학기계적 연마기술 연구개발 동향: 입자 거동과 기판소재를 중심으로)

  • Lee, Hyunseop;Sung, In-Ha
    • Tribology and Lubricants
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    • v.35 no.5
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    • pp.274-285
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    • 2019
  • Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

Effect on Nutrients Removal of Algae in Aerobic High Rate Pond by Irradiance Period and pH (호기성 고율 안정조에서 빛의 조사 기간과 pH가 조류의 영양물질 제거에 미치는 영향)

  • 공석기;안승구
    • Journal of Environmental Science International
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    • v.6 no.2
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    • pp.141-152
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    • 1997
  • The pilot plant had been made so as to be an association system from the various items managed to have degrees of efficiency and It have been done to consider the experimental result with irradiance period and pH influence of all major things to treatment function of Waste Stabilization Pond. The results are as following. The attained results for continuous & cyclic irradiance 1. 24L.-reactor was prior to 12L.-12D.-reactor on oxygen generation & algal production ability. 2. 24L.-reactor was prior to 12L.-12D.-reactor on nutrients removal efficiency. 3. In 24L.-reactor it maintained 5mg/L∼6mg/L, DO concent enough to a fish's survival. The attained results for pH condition 1. Oxygen generation ^ algal production in pH 4-reactor were higher than those in pH 10-reactor. 2. The acidic condition at pH 4 and alkalic condition at pH 10 did not so much affect an algal growth and nutrients removal. The attained results for whole 1. In view of the results appeared as [(NH3-N)+(NO3-N)] removal efficiency, 89.1%∼93.9% and PO4-P removal efficiency, 34.3%∼83.7% & COD removal efficiency, 88.5%∼93.9%. It is possible to treat the wastewater with starch and pH which have been known as thedifficult problem. 2. At the point of non using methanol to nitrificate NO3-N, the nutrients removal method by using an algal growth is the most economical method in the whole nutrients removal methods. 3. The nutrients removal method by using an algal growth contributes to natural ecosystem. 4. The nutrients removal method by using an algal growth is excellant in the prevention against the eutrophication.

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