• Title/Summary/Keyword: Eximer Laser

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The ablation of ITO thin films by KrF Eximer laser and its characteristics (KrF 엑시머 레이저에 의한 ITO 박막의 어블레이션과 표면특성관찰)

  • Lee, Kyoung-Cheol;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.511-514
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    • 2000
  • This work aimed to develop ITO (Indium Tin Oxide) thin films ablation with a KrF Eximer laser required for the application in flat panel display, especially patterning into small geometry on a large substrate area. The threshold fluence for ablating ITO on glass substrate is about 0.1 J/cm$^2$. And its value is much smaller than using third harmonic Nd:YAG laser. Through the optical microscope measurement the surface color of the damaged ITO is changed into dark brown and irradiated spot is completely isolated form the undamaged surroundings by laser light. The XPS analysis showed that the relative surface concentration of Sn and In were essentially unchanged (In :Sn=5:1) after irradiating Eximer laser. Using aluminium mask made by second harmonic Nd:YAG laser the ITO patterning is carried out.

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Four cases of vitiligo patients treated by Oriental medical treatment who have experienced Excimer Laser treatment (엑시머레이저 치료를 경험했던 백반증 환자가 한방복합치료와 엑시머레이저 병행치료로 호전된 치험 4례)

  • Lee, Jin-Hyuk;Kim, Se-Yoon
    • The Journal of Korean Medicine Ophthalmology and Otolaryngology and Dermatology
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    • v.27 no.3
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    • pp.205-212
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    • 2014
  • Purpose: This study aims to prove effects of an oriental medical complex therapy on vitiligo patients who have experienced the Eximer laser therapy. Method: The study conducted its investigation targeting these four patients who have not been observed with any satisfactory reaction to the Eximer laser therapy. The study analyzed the findings through the comparison on the pictures before and after the therapy. Result: After comparing the pictures, the study confirmed positive changes in the conditions of the patients. The oriental medical complex therapy turned out to be effective enough to treat the patients who have gone through the Eximer laser therapy before. Conclusion: Such result leads the study to a conclusion that the oriental medical complex therapy can be an effective way to treat these patients who do not have a satisfactory reaction to the Eximer laser therapy. In addition, the author of the study suggests that more clinical trials should be conducted.

Laser Beam Application and Technology in Micro Machining (레이저 빔 응용 기술)

  • 윤경구;이성국;김재구;신보성;최두선;황경현;박진용
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.7
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    • pp.27-35
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    • 2000
  • 재료가공분야에의 레이저의 적용은 1960년대 후반부터 시작되었으며, 고출력 CO$_2$ 와 Nd:YAG 레이저가 많은 산업분야에서 보편화될 정도로 발전하여 왔다. 재료가공에서의 레이저의 적용분야는 금속의 절단, 용접 및 드릴링, 세라익의 스크라이빙, 플라스틱과 복합재의 절단 및 여러 가지 재료의 마킹 등을 포함한다. 이와 같은 모든 응용에서 공통적인 것이 레이저 조사에 의해 재료를 용융, 증발시키는 열적 메카니즘이다.(중략)

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Fabrication optimization of Fiber Bragg gratings (광섬유 브래그 격자(Fiber Bragg grating) 제작과 제작 조건에 따른 특성 향상)

  • Choi, Bo-Hun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.7
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    • pp.1680-1686
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    • 2010
  • Optical fiber Bragg grating to have the lowest transmitivity at 1549.9nm wavelength was fabricated using a Gaussian distributed KrF Eximer laser of 248nm lasing wavelength and a phase mask of 1.072um period. The proper alignment of an optic setup to fabricate fiber gratings was investigated and the reproductivity of the grating fabrication was examined using the obtained optimum fabrication condition in this experiment.

Off-Axis Illumination (패턴 분해능 및 초점심도 향상에 대한 사입사 조명)

  • 박정보;이성묵
    • Korean Journal of Optics and Photonics
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    • v.10 no.6
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    • pp.453-461
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    • 1999
  • In this paper, we have studied on the effects of annular and quadrupole illuminations by changing their conditions for enhancing the pattern resolution and depth of focus (OaF) in the optical lithography system using KrF Eximer laser 0.248$\mu$m and 0.65 NA. As a result, it is revealed that each illumination condition to optimize the resolution and the OaF for the mask containing the assistance pattern is different under the annular illumination. And in case of quadrupole illumination, we could ascertain that the resolution and the OaF would be enhanced through changing the arrangement of each pole from the conventional X type (45 degrees) to some proper type according to the main pattern direction. ction.

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Comparison of temperature dependance between short and long period fiber gratings (단주기 광섬유 격자(Fiber Grating)와 장주기 광섬유 격자의 온도 의존성 비교)

  • Choi, Bo-Hun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.8
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    • pp.1791-1796
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    • 2011
  • An optical fiber short period grating of 0.7 nm as a 3 dB wavelength linewidth was fabricated using a Gaussian distributed KrF Eximer laser and a phase mask. This grating has temperature dependancy of 0.01 nm/$^{\circ}C$ over the range of -10 $^{\circ}C$ ~ 70 $^{\circ}C$and no difference between temperature directions. An optical fiber long period grating of 14.22 nm as a 3 dB linewidth was also fabricated using a amplitude mask and has dependancy of 0.01 nm/$^{\circ}C$ over the same range.