• 한국정밀공학회지
• /
• 제22권9호
• /
• pp.60-68
• /
• 2005

To investigate the effects of beam focusing in the etching of polymers with short pulse Excimer lasers, a polymer etching model of SSB's is combined with a beam focusing model. Through the numerical simulation, it was found that in the high laser fluence region, SSB model considering both photochemical and thermal contribution is considered to be suitable to predict the etched hole shape than a simple photochemical etching model. The average temperature distribution into the substance obtained by assuming 1-D heat transfer is found to be fairly similar to the fluence distribution on the ablated surface. The experimental etching data fur polymers are used to give material properties for ablation model. The fitted etch depth curve gives a nice agreement with the experimental data.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
• /
• pp.319-321
• /
• 2004

We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing.

• 한국광학회지
• /
• 제1권1호
• /
• pp.107-113
• /
• 1990

Characteristics and applications of three major types of lasers are discussed. They are chemical-metabolic, thermal destructive, and nonthermal mechanical lasers. The thermal destructive lasers ($CO_2$, Argon, and Nd:YAG) are especially explained in detail with regard to energy density, wavelength, fluence, stage of thermal destruction, and advantages of laser surgery. Excimer and Q-swiched lasers are discussed as nonthermal mechanical ones. Delivery system, optical fiber and articulated arm, is also discussed. Finally, recent advancements of medical laser are included in the conclusion.

• 한국연소학회:학술대회논문집
• /
• 한국연소학회 1997년도 제15회 KOSCO SYMPOSIUM 논문집
• /
• pp.13-21
• /
• 1997

Excitations of eight pumping transitions for nitric oxide fluorescence imaging are analyzed under equivalent experimental conditions to determine the detection. Frequency mixed dye laser pumping, 1st anti-Stokes $H_2$ Raman of KrF excimer laser pumping and ArF excimer laser pumping show good sensitivities.

• 한국정밀공학회지
• /
• 제22권7호
• /
• pp.54-61
• /
• 2005

A simulator for virtual laser machining is developed to help understanding and predicting the effects of machining parameters on the final machined results. Main program is based on the model for polymer ablation with short pulse excimer lasers. Version f of the simulator is built using Visual Fortran to make the user work under visual environment such as Windows on PC, where the important machining parameters can be input via dialog box and the calculated results for machined shape, beam fluence, and temperature distribution can be plotted through the 2-D graphics windows. Version II of the simulator is built using HTML, CGI and JAVA languages, allowing the user to control the input parameters and to see the results plot through the internet.

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 2001년도 춘계학술발표대회 논문개요집
• /
• pp.27-30
• /
• 2001

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 1998년도 추계학술발표대회 초록개요집
• /
• pp.43-46
• /
• 1998

• 소성∙가공
• /
• 제11권7호
• /
• pp.601-607
• /
• 2002

Optically transparent materials such as fused silica, quartz and crystal have become important in the filed of optics and optoelectronics. Laser ablation continues to grow as an important technique for micromachining and surface modification of various materials, because many problems caused by direct contact between tools and workpiece can be avoided. Especially, laser ablation with excimer lasers enables fine micromachining of transparent materials such as fused silica, quartz and crystal, etc. In this study, laser-induced wet etching of fused silica in organic solution was conducted. KrF excimer laser was used as a light source and acetone solution of pyrene was used as etchant. Changing the number of laser pulses, micro holes of various depths are fabricated.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1987년도 정기총회 및 창립40주년기념 학술대회 학회본부
• /
• pp.405-407
• /
• 1987

We calculated the discharge resistance, which is determined by plasma dynamics, of the discharge pumped excimer lasers with charge-transfer type. And investigated the characteristic of discharge voltage and current using EMIP.

• 한국조명전기설비학회:학술대회논문집
• /
• 한국조명전기설비학회 1999년도 학술대회논문집-국제 전기방전 및 플라즈마 심포지엄 Proceedings of 1999 KIIEE Annual Conference-International Symposium of Electrical Discharge and Plasma
• /
• pp.58-63
• /
• 1999

In order to analyze the discharge-pumped KrF excimer laser, computer simulation code is developed. On the other hand, the electron velocity distribution in a discharge plasma, measured by the Thomson scattering method, showed the Maxwellian, while the code predicted non-Maxwellian. This disagreement was solved by introducing the electron-electron collision into the simulation code. We also developed a simulation code on the CO2 laser-heated plasma in high-pressure Ar gas, and estimated the formation process of Ar2 excimer. The code predicted the possibility of the Ar2 laser action at 126 nm.