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Modeling of Polymer Ablation with Excimer Lasers  

Yoon, Kyung-Koo (한국기계연구원)
Bang, Se-Yoon (동국대학교 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.9, 2005 , pp. 60-68 More about this Journal
Abstract
To investigate the effects of beam focusing in the etching of polymers with short pulse Excimer lasers, a polymer etching model of SSB's is combined with a beam focusing model. Through the numerical simulation, it was found that in the high laser fluence region, SSB model considering both photochemical and thermal contribution is considered to be suitable to predict the etched hole shape than a simple photochemical etching model. The average temperature distribution into the substance obtained by assuming 1-D heat transfer is found to be fairly similar to the fluence distribution on the ablated surface. The experimental etching data fur polymers are used to give material properties for ablation model. The fitted etch depth curve gives a nice agreement with the experimental data.
Keywords
Polymer ablation; Excimer lasers; Photochemical etching; Thermal etching;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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