• Title/Summary/Keyword: Excimer

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The Effect of Annealing Methods on Dopant Activation and Damage Recovery of Phosphorous ion Shower Doped Poly-Si (다결정 실리콘 박막 위에 P이온 샤워 도핑 후 열처리 방법에 따르는 도펀트 활성화 및 결함 회복에 관한 효과)

  • Kim, Dong-Min;Ro, Jae-Sang;Lee, Ki-Yong
    • Journal of the Korean Electrochemical Society
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    • v.8 no.1
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    • pp.24-31
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    • 2005
  • Ion shower doping with a main ion source of $P_2H_x$ using a source gas mixture of $PH_3/H_2$ was conducted on excimer-laser-annealed (ELA) poly-Si.The crystallinity of the as-implanted samples was measured using a UV-transmittance. The measured value using UV-transmittance was found to correlate well with the one measured using Raman Spectroscopy. The sheet resistance decreases as the acceleration voltage increases from 1kV to 15kV at the moderate doping conditions. It, however, increases as the acceleration voltage increases under the severe doping conditions. The reduction in carrier concentration due to electron trapping at uncured damage after activation annealing seems to be responsible for the rise in sheet resistance. Three different annealing methods were investigated in terms of dopant-activation and damage-recovery, such as furnace annealing, excimer laser annealing, and rapid thermal annealing, respectively.

Fabrication and Characterization of Ge/B-doped Optical Fiber for UV Poling Applications (UV 폴링용 Ge와 B가 첨가된 실리카 유리 광섬유 제조 및 특성 평가)

  • Kim, Bok-Hyeon;Ahn, Tae-Jun;Heo, Jong;Shin, Dong-Wook;Han, Won-Taek
    • Journal of the Korean Ceramic Society
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    • v.39 no.12
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    • pp.1158-1163
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    • 2002
  • An Ge/B-doped optical fiber with high photosensitivity was fabricated to induce large second-order optical nonlinearity by UV poling. It was found that long period fiber gratings were inscribed on the fiber by the 248 nm KrF excimer laser irradiation with pulse energy of 116 mJ/$cm^2$ and pulse frequency of 10 Hz without hydrogen loading treatment. The photosensitivity was measured by use of the long period fiber grating pair method and the refractive index change of 3.3$10{\times}^{-3}$ was found to be induced in the core of the optical fiber by the KrF excimer laser irradiation of 8.67 kJ/$cm^2$. An H-shaped optical fiber was also fabricated for the UV poling through optimization of the fiber drawing condition.

Pulse Stretching Effect in XeCl Excimer Laser (XeCl 엑시머 레이저에서의 Pulse Stretching 효과)

  • Chu, Hong;Kim, Dong-Hwan;Lee, Soo-Man;John, Young-Min;Choi, Sang-Sam;Park, Dae-Yoon
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.447-451
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    • 1993
  • Long pulse XeCl excimer laser with 150 ns (FWHM) pulse duration is developed using a simple capacitor-charge transfer circuit. We measured the laser pulse width varying the gas mixture ratio and capacitance ratio, which dominantly affect the pulse width. In this way we can easily stretch the pulse width from short pulse to long pulse. The pulse width was stretched by 120 ns as the partial pressure of HC1 and Xe gas was reduced under constant gas mixture ratio ([Xe]/[HCl]= 15), and by varying the capacitance ratio (Cm/Cp) under fixed pressure, the pulse width was stretched by 60 ns.

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The Effect of Ethanol on the Physical Properties of Neuronal Membranes

  • Bae, Moon-Kyoung;Jeong, Dong-Keun;Park, No-Soo;Lee, Cheol-Ho;Cho, Bong-Hye;Jang, Hye-Ock;Yun, Il
    • Molecules and Cells
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    • v.19 no.3
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    • pp.356-364
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    • 2005
  • Intramolecular excimer formation of 1,3-di(1-pyrenyl) propane(Py-3-Py) and fluorescence polarization of 1,6-diphenyl-1,3,5-hexatriene (DPH) were used to evaluate the effect of ethanol on the rate and range of lateral and rotational mobilities of bulk bilayer structures of synaptosomal plasma membrane vesicles (SPMVs) from the bovine cerebral cortex. Ethanol increased the excimer to monomer fluorescence intensity ratio (I'/I) of Py-3-Py in the SPMVs. Selective quenching of both DPH and Py-3-Py by trinitrophenyl groups was used to examine the range of transbilayer asymmetric rotational mobility and the rate and range of transbilayer asymmetric lateral mobility of SPMVs. Ethanol increased the rotational and lateral mobility of the outer monolayer more than of the inner one. Thus ethanol has a selective fluidizing effect within the transbilayer domains of the SPMVs. Radiationless energy transfer from the tryptophans of membrane proteins to Py-3-Py was used to examine both the effect of ethanol on annular lipid fluidity and protein distribution in the SPMVs. Ethanol increased annular lipid fluidity and also caused membrane proteins to cluster. These effects on neuronal membranes may be responsible for some, though not all, of the general anesthetic actions of ethanol.

The Effect of n-Alkanols on the Lateral Diffusion of Synaptosomal Plasma Membrane Vesicles Isolated from Bovine Cerebral Cortex (n-Alkanols가 소의 대뇌피질로부터 분리한 Synaptosomal Plasma Membrane Vesicles의 측방확산운동 범위와 속도에 미치는 영향)

  • Chung, In-Kyo;Kang, Jung-Sook;Yun, Il
    • The Korean Journal of Pharmacology
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    • v.29 no.1
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    • pp.157-163
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    • 1993
  • Intramolecular excimer formation with the fluorescent probe 1,3-di(1-pyrenyl)propane (Py-3-Py) was used to investigate the effects of methanol, ethanol, 1-propanol, 1-butanol, 1-pentanol, 1-hexanol, 1-heptanol, 1-octanol, 1-nonanol and 1-decanol on the lateral diffusion of synaptosomal plasma membrane vesicles isolated from bovine cerebral cortex (SPMV). The n-alkanols increased the excimer to monomer fluorescence intensity ratio (I'/I) of Py-3-Py in the SPMV. In a dose-dependent manner, n-alkanols increased lateral diffusion of hydrocarbon region of bulk (inner+outer monolayers) SPMV lipid bilayers, and the potencies of n-alkanols up to l-nonanol increased with carbon chain length. It appears that the potencies in bilayer fluidization due to the lateral diffusion increase by 1 order of magnitude as the carbon chain length increases by two carbon atoms. The cut-off phenomenon was reached at 1-decanol, where further increase in hydrocarbon length resulted in a decrease in pharmacological activity.

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A MECHANICAL INVESTIGATION OF CORNEAL REFRACTIVE SURGERIES AND PROPOSITION OF NEW TECHNIQUES (각막굴절수술의 역학적 고찰 및 새로운 기법의 시도)

  • Shin, J.W.;Han, G.J.;Whang, M.C.;Nam, S.H.
    • Proceedings of the KOSOMBE Conference
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    • v.1995 no.05
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    • pp.95-100
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    • 1995
  • This study investigated the effects of mechanical factors involved in several corneal refractive surgeries on the surgical outcomes. Then we proposed possible new techniques from the mechanical point of a view utilizing finite element method. The models studied are: circumferential keratetomy, combination of excimer laser photorefractive keratectomy and circumferential keratotomy for myopia treatment, arcuate keratotomy for astigmatism treatment. The cornea was assumed to be nonlinear elastic and almost incompressible material as the most soft tissue in the human body. In the circumferential keratotomy the effect of the incision location was investigated. The angle and location of the incision were varied to predict the surgical outcomes in the arcuate keratotomy. The finite element analysis results showed that the location of incision was a critical factor affecting the surgical outcomes in the circumferential keratotomy. In the combination of the excimer laser photorefractive keratectomy and circumferential keratotomy, it was predicted that the circumferential can increase or decrease the refractive power depending on the incision location or it can be used to adjust the overcorrection of undercorrection. In the arcuate keratotomy for astigmatism, the most diopter changes were predicted when the location and the angle of the incision were 3.0mm from the apex and $90^{\circ}$, respectively. In the arcuate keratotomy, the effects of an incision were studied within the incision area as well as outside the incision area. Also, the arcuate keratotomy with two incisions located on the opposite area of the cornea was also studied. As a conclusion, the finite element method is a useful technique in the area of corneal refractive surgeries to develop new techinques.

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Simulation Anaysis on the Output Characteristics of XeF$(C\rightarrowA$ Excimer Laser Pumped by Electron-Beam (전자빔여기 XeF$(C\rightarrowA$ 엑시머 레이저의 출력특성에 대한 시뮬레이션 해석)

  • 류한용;이주희
    • Korean Journal of Optics and Photonics
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    • v.6 no.3
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    • pp.201-213
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    • 1995
  • By the use of computer simulation including collisional mixing kinetic processes of the B- and C-state in the upper laser level the output characteristics of electron-beam pumped XeF$(C\rightarrowA$ excimer laser are analyzed. We compared the results between experiments and simulations for the $XeF^*(C)$ formation that correlated the number of densities of the $XeF^*(B)$. We obtained good agreement$(28.5 mJ\pm5%)$ with comparisons between experiment and simulation and confirmed the optimal gas mixing ratio of $Xe/F_2/Ar=5.26/0.49/94.28%$ at atmospheric pressure laser medium under the condition of 70 ns [FWHM] electron-beam (800 kV, 21 kA). Also through the simulation we have investigated that the $XeF^*(C)$ formation channel, the $XeF^*(C)$ relaxation channel, and the absorption channel of bluegreen wavelength region as a function of F2 halogen donor and Xe partial pressure. ssure.

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Trend of Crystallization Technology and Large Scale Research for Fabricating Thin Film Transistors of AMOLED Displays (AMOLED 디스플레이의 박막트랜지스터 제작을 위한 결정화 기술 동향 및 대형화 연구)

  • Kim, Kyoung-Bo;Lee, Jongpil;Kim, Moojin;Min, Youngsil
    • Journal of Convergence for Information Technology
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    • v.9 no.5
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    • pp.117-124
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    • 2019
  • This paper discusses recent trends in the fabrication of semiconducting materials among the components of thin film transistors used in AMOLED display. In order to obtain a good semiconductor film, it is necessary to change the amorphous silicon into polycrystalline silicon. There are two ways to use laser and heat. Laser-based methods include sequential lateral solidification (SLS), excimer laser annealing (ELA), and thin-beam directional crystallization (TDX). Solid phase crystallization (SPC), super grain silicon (SGS), metal induced crystallization (MIC) and field aided lateral crystallization (FALC) were crystallized using heat. We will also study research for manufacturing large AMOLED displays.

Effects of Selective Si ion-Implantation on Excimer Laser Annealing of Dehydrogenrated a-Si Film (선택적인 Si 이온 주입이 비정질 실리콘의 레이저 결정화에 미치는 영향)

  • Nam, Woo-Jin;Lee, Min-Cheol;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 2001.11a
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    • pp.106-108
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    • 2001
  • 본 실험에서는 플라즈마 화학기상증착(PECVD)으로 증착한 비경질 실리콘(amorphous silicon, a-Si) 박막에 국부적으로 Si+ 이온을 주입한 후 엑시머 레이저 어닐링(exicimer laser annealing, ELA)을 수행하여 그레인의 수평 성장(lateral growth)에 미치는 영향을 관찰한다. Si+ 이온 주입은 비정질 실리콘 박막의 원자 결합 에너지를 효과적으로 감소시키는 역할을 하여 박막이 녹기 시작하는 문턱(threshold) 에너지가 $105mJ/cm^2$에서 $85mJ/cm^2$ 까지 낮아지는 것을 확인하였다. 결과적으로 선택적인 Si 이온 주입을 통해 비정질 박막의 결정화 시 온도 구배에 의한 결정핵(nucleation) 형성의 차이를 유발시킴으로써 위치 제어가 가능한 1um 크기를 갖는 수평 성장 그레인을 얻었다.

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Thermal Conductivity Analysis of Amorphous Silicon Formed by Natural Cooling: A Molecular-dynamics Study

  • Lee, Byoung Min
    • Journal of the Korean Ceramic Society
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    • v.53 no.3
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    • pp.295-300
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    • 2016
  • To investigate the thermal conductivity and the structural properties of naturally cooled excimer-laser annealed Si, molecular-dynamics (MD) simulations have been performed. The thermal conductivity of crystalline Si (c-Si) was measured by direct method at 1000 K. Steady-state heat flow was measured using a stationary temperature profile; significant deviations from Fourier's law were not observed. Reliable processes for measuring the thermal conductivity of c-Si were presented. A natural cooling process to admit heat flow from molten Si (l-Si) to c-Si was performed using an MD cell with a size of $48.9{\times}48.9{\times}97.8{\AA}^3$. During the cooling process, the temperature of the bottom $10{\AA}$ of the MD cell was controlled at 300 K. The results suggest that the natural cooling system described the static structural property of amorphous Si (a-Si) well.