• 제목/요약/키워드: Evaporation Deposition Method

검색결과 172건 처리시간 0.031초

진공증착법을 이용한 PVDF 유기박막의 분자배향 (The Molecular Orientation of PVDF Organic Thin Film by Vapor Deposition Method)

  • 박수홍;이선우;임응춘;최충석;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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    • pp.297-300
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    • 1997
  • In this study, The PVDF thin film was fabricated on the one method of dry-process the physical vapor deposition method, applied electric field, and evaporation control in $\beta$-PVDF thin film preparation. A study on the electric-field-phase change of PVDF thin film in physical vapor deposition using the polymer deposition apparatus which are manufactured for oneself. In the analysis of Fourier-Transform Infrared spectra, according to increasing of electric field intensity, the 510$cm^{-1}$ / peak and 1273$cm^{-1}$ / peak which are showed in $\beta$-PVDF increase, on the contrary the 530$cm^{-1}$ / peak and 977$cm^{-1}$ / peak which are showed in $\alpha$-PVDF decrease.

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비정질 Se박막의 가시광선영역 광특성 (The Optical Properties of Amorphous Se Films in the Visible Range)

  • 박창엽;김영호
    • 대한전기학회논문지
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    • 제31권11호
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    • pp.141-145
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    • 1982
  • Optical absorption properties of an orphous Se film due to interband electronic transitions are observed in the visible range by varying the folm thickness. Amorphous Se films were prepared by evaporation method. As the experimental results, it is found that optical energy gap is around 2.07(e V), and the optical constants depend on the film thickness, evaporation-deposition conditions, and incident photon energy.

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이동형 핵종 분석 장치용 CZT 반도체 검출기의 완충전극에 대한 연구 (A Study of Interface Layer on CdZnTe Radiation Sensor for Potable Isotope Identifier)

  • 조윤호;박세환;김용균;하장호
    • 방사선산업학회지
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    • 제5권1호
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    • pp.95-99
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    • 2011
  • The electrical and mechanical properties of electrode for radiation detection are very important. In general, Au electrode and CZT crystal are combined to form ohmic contacts, and the best energy resolution is shown at the Au electrode. The metal contacts are fabricated by electroless deposition method, sputtering deposition method and thermal evaporation method. The electrode fabrication is easy with use of the thermal evaporation method, while an adhesive strength is weak. Thus interface materials such as Ag, Al and Ni were investigated to overcome defects generated by the this method. The thickness of the interface material between the Au electrode and the CZT crystal was 100 Angstroms, the Au electrode with thickness of 400 Angstroms was deposited. The Al+Au electrode is shown that the results of current-voltage and radiation response are similar to results of Au electrode.

Aerosol Deposition and Behavior on Leaves in Cool-temperate Deciduous Forests. Part 3: Estimation of Fog Deposition onto Cool-temperate Deciduous Forest by the Inferential Method

  • Katata, Genki;Yamaguchi, Takashi;Sato, Haruna;Watanabe, Yoko;Noguchi, Izumi;Hara, Hiroshi;Nagai, Haruyasu
    • Asian Journal of Atmospheric Environment
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    • 제7권1호
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    • pp.17-24
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    • 2013
  • Fog deposition onto the cool-temperate deciduous forest around Lake Mashu in northern Japan was estimated by the inferential method using the parameterizations of deposition velocity and liquid water content of fog (LWC). Two parameterizations of fog deposition velocity derived from field experiments in Europe and numerical simulations using a detailed multi-layer atmosphere-vegetation-soil model were tested. The empirical function between horizontal visibility (VIS) and LWC was applied to produce hourly LWC as an input data for the inferential method. Weekly mean LWC computed from VIS had a good correlation with LWC sampled by an active string-fog collector. By considering the enhancement of fog deposition due to the edge effect, fog deposition calculated by the inferential method using two parameterizations of deposition velocity agreed with that computed from throughfall data. The results indicated that the inferential method using the current parameterizations of deposition velocity and LWC can provide a rough estimation of water input due to fog deposition onto cool-temperature deciduous forests. Limitations of current parameterizations of deposition velocity related to wind speed, evaporation loss of rain and fog droplets intercepted by tree canopies, and leaf area index were discussed.

증착방법에 따른 DLC 막의 마찰-마모 특성평가 (Characterization of Tribological Properties of DLC Films Prepared by Different Deposition Method)

  • 오윤석
    • 한국세라믹학회지
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    • 제46권5호
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    • pp.497-504
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    • 2009
  • DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. Different deposition method such as arc plating, ion gun plating and PECVD were used for comparing mechanical and tribological properties of each DLCs deposited on stainless steel with 1 um thick respectively. Among these 3 types of DLCs, the arc plated DLC film showed highest value for wear resistance in dry condition. From the results of analysis for physical properties of DLC films, it seems that the adhesion force and crack initiation modes were more important factors than intrinsic mechanical properties such as hardness, elastic modulus and/or roughness to the wear resistance of DLC films. Raman spectroscopy was used for understanding chemical bonding natures of each type of DLC films. Typical D and G peaks were identified based on the deposition method. Hardness of the coating layers were identified by nanoindentation method and the adhesions were checked by scratch method.

알루미늄의 진공증발과 열산화에 의한 알루미나 복합분리막의 제조 및 특성분석 (Synthesis and Characterization of Alumina Composite Membrane by Al Evaporation and Thermal Oxidation)

  • 이동호;최두진;현상훈
    • 한국세라믹학회지
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    • 제32권3호
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    • pp.349-358
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    • 1995
  • The ceramic composite membrane was synthesized by thermal oxidation after evaporation of Al on the support prepared by slip casting process. Oxidation was performed at $700^{\circ}C$ and 80$0^{\circ}C$ under dry oxygen atmosphere. It was considered as optimum oxidation condition that the membrane showed a knudsen behaviro. A further oxidation resulted in an increase of gas permeability because top layer became densified. Then, a multi-layered composite membrane was synthesized through a sol-gel method, evaporation and thermal oxidation of Al coating processes. While the membrane was thermally stable up to 80$0^{\circ}C$, gas permeability was rapidly decreased even at a slight amount of deposition of Al.

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스퍼터링 및 셀렌화 열처리에 의한 $CuInSe_2$ 박막제조 ($CuInSe_2$ thin film is manufactured by the Sputtering and Selenization process)

  • 문동권;안세진;윤재호;곽지혜;이희덕;윤경훈
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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    • pp.83-84
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    • 2009
  • Thin film solar cells based on CIGS continue to be a leading candidate for thin film photovoltaic devices due to their appropriate bandgap, long-term stability, and low-cost production. To date, the most successful technique for the deposition of a CIGS absorber layer has been based on the co-evaporation However, the evaporation process is difficult to scale-up for large-area manufacturing the sputtering and Selenizaton process has been a promising method for low-cost and large-scale production of high quality CIGS In this study, we have used Cu and CuIn alloy targets for precursor deposition the precursor deposited by sputtering Cu and CuIn targets and $CuInSe_2$ thin film is manufactured by Selenization process

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ITO투명도전막의 전기, 광학적 특성 및 그 응용 (The Application and Electrical, Optical Properties of $In_2O_3$: Sn Transparent Conducting Films)

  • 이동훈;박기철;박창배;김기완
    • 대한전자공학회논문지
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    • 제23권4호
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    • pp.498-505
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    • 1986
  • In2O3: Sn(ITO) transparent conducting films were fabricated by the electron beam evaporation method. The dependence of their electrical and optical properties on deposition conditions were examined. The optimum evaporation conditions were such that the deposition rate was 5-10\ulcornersec, oxygen partial pressure was 4x10**_4 torr, substate temperatudre was above 300\ulcorner, and SnO2 doping rate was 10 mol%. The values of sheet resistance and transmittance of the films in visible region fabricated under these optimum conditins were 12\ulcorner/ and 87-99%, respecively. And the energy conversion efficiency of the SIS solar cell fabricated using ITO was 9.16%. It is shown that the transparent conducting films can be applied to the TV camear pick-up tube and solar cell.

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TiN증착 조건에 따른 박막의 특성에 대한 실험적 연구 (A study on an experimental basis a special quality character of thin film use in order to TiN a conditioned immersion)

  • 박일수
    • 한국산학기술학회논문지
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    • 제12권11호
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    • pp.4711-4717
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    • 2011
  • PVD방식에 의한 TiN박막의 형성은 DC와 RF sputtering deposition 방식을 적용할 수 있지만, 플라즈마 생성을 위해 주입된 가스의 이온화율이 떨어져 박막성형 속도가 느려지며, 박막과의 접착력을 높이는 것에도 한계성을 가지고 있다. 이를 개선하기 위해 증착과 동시에 이온빔을 조사하는 이온빔 진공증착 IBAD(Ion beam assisted deposition)를 이용 하게 되면, 코팅 전에 소재 표면을 Ion beam으로 조사하기 때문에 표면cleaning의 효과가 크고, 접착력이 높은 박막을 얻을 수 있다. 또한 고 진공과 낮은 온도에서도 균일한 두께의 고순도의 박막을 얻을 수 있는 이점이 있다.

동시 스퍼터법으로 제작한 Bi 초전도 박막의 성장 모델 (Growth Model of Bi-Superconducting Thin Film Fabricated by Co-sputtering Method)

  • Chun, Min-Woo;Park, Yong-Pil
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 추계종합학술대회
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    • pp.796-799
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    • 2002
  • BSCCO thin films are fabricated via a co-deposition process at an ultra-low growth rate using ion beam sputtering. The sticking coefficient of Bi element exhibits a characteristic temperature dependence. This temperature dependence of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi$_2$O$_3$.

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