한국신재생에너지학회:학술대회논문집
- 2009.06a
- /
- Pages.83-84
- /
- 2009
$CuInSe_2$ thin film is manufactured by the Sputtering and Selenization process
스퍼터링 및 셀렌화 열처리에 의한 $CuInSe_2$ 박막제조
Abstract
Thin film solar cells based on CIGS continue to be a leading candidate for thin film photovoltaic devices due to their appropriate bandgap, long-term stability, and low-cost production. To date, the most successful technique for the deposition of a CIGS absorber layer has been based on the co-evaporation However, the evaporation process is difficult to scale-up for large-area manufacturing the sputtering and Selenizaton process has been a promising method for low-cost and large-scale production of high quality CIGS In this study, we have used Cu and CuIn alloy targets for precursor deposition the precursor deposited by sputtering Cu and CuIn targets and