A Study on Wet Etching of Metal Thin Film Deposited by DC Magnetron Sputtering System (DC 마그네트론 스퍼터링 증착 금속 박막의 습식식각에 대한 연구)
-
- Proceedings of the Korean Institute of Information and Commucation Sciences Conference
- /
- 2010.05a
- /
- pp.795-797
- /
- 2010