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http://dx.doi.org/10.5140/JASS.2004.21.4.481

FABRICATION OF Nb/Al SUPERCONDUCTING TUNNEL JUNCTION  

Cho, Sung-Ik (Korea Astronomy Observatory, SOL, Dept. of Astronomy and Space Science. Yonsei University)
Park, Young-Sik (Korea Astronomy Observatory)
Park, Jang-Hyun (Korea Astronomy Observatory)
Lee, Yong-Ho (Korea Research Institute of Standards and Science)
Lee, Sang-Kil (Korea Research Institute of Standards and Science)
Kim, Sug-Whan (SOL, Dept. of Astronomy and Space Science. Yonsei University)
Han, Won-Yong (Korea Astronomy Observatory)
Publication Information
Journal of Astronomy and Space Sciences / v.21, no.4, 2004 , pp. 481-492 More about this Journal
Abstract
We report the successful fabrication and I-V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and $80{\mu}m$ were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafer. STJ was designed by $Tanner^{TM}$ L-Edit 8.3 program, and fabricated in SQUID fabrication facility, KRISS. S-layer STJ thin-films were fabricated using UV photolithography, DC magnetron sputtering, Reactive ion etching, and CVD(Chemical Vapor Deposition) techniques. Superconducting state test for STJ was succeeded in 4K with liquid helium cooling system. Their performance indicators such ie energy gap, normal resistance, normal resistivity, dynamic resistance, dynamic resistivity, and quality factor were measured from I-V curve. Fabricated Nb/Al STJ shows $11\%$ higher FWHM energy resolution than genuine Nb STJ.
Keywords
astronomical detector; superconducting tunnel junction;
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1 Perryman, M. A. C., Cropper, M., Ramsay, G., Favata, F., Peacock, A., Rando, N., & Reynolds, A. 2001, MNRAS, 324, 899   DOI   ScienceOn
2 Perryman, M. A. C., Favata, F., & Peacock, A. 1999, A&A, 346, L30
3 Perryman, M. A. C., & Peacock, A. 1993, Nucl. Instrument Methods A, 325, 319   DOI   ScienceOn
4 한병성, 황종선 2002, 초전도공학 (서울:동일출판사), pp.62-66
5 Brammertz, G. 2003, PhD Thesis, Twente University
6 Brammertz, G., Verhoeve, P., & Martin, D. 2004, Proc of SPIE, 5499, 269   DOI
7 Gijsbertsen, J. G. 1995, PhD Thesis, Twente University
8 Martin, D. D. E., Verhoeve, P., & Peacock, A. 2004, Nucl. Instrument Methods Phys. Res. A, 520, 512   DOI   ScienceOn
9 Rando, N., Andersson, S., Peacock, A., & Verhoeve, P. 2000, Nucl. Instrument Methods A, 444, 441   DOI   ScienceOn
10 Sato, H., Takizawa, Y., & Ootani W. 2000, Jap. J. Appl. Phys., 39, 5090   DOI
11 Shiki, S., Sato. H., Takizawa, Y., Kurakudo, M., & Shimizu, H. M. 2004a, Publ. Astron. Soc. Japan 56, L19
12 Shiki, S., Sato, H., Takizawa, Y., Taino, T., Otani, C., & Shimizu, H. M. 2004b, Nucl. Instrument Methods Phys. Res. A, 520, 530   DOI   ScienceOn
13 Twerenbold, D. 1986, Phys. Rev. B, 34, 774