• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.603-604
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• 2008

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 전자공학회논문지SC
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• 제41권2호
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• pp.17-28
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• 2004

퍼지논리를 이용한 XY 테이블의 데드존 보상기법을 제안한다. 퍼지논리 함수의 분류특성은 다양한 영역을 가진 데드존에 의해 유발되는 오차를 제거하기 위한 보상기 설계를 가능케 한다. 데드존 보상이 적응적이고 추적오차와 파라미터 추정치가 유계가 되는 퍼지논리 파라미터 동조알고리듬과 안정도 증명을 제시한다. 퍼지논리 데드존 보상기를 위치 테이블에 실험함으로써 데드존의 해로운 영향을 줄이는 효과를 보여준다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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• pp.1096-1101
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• 1992

In order tominimize fixing error of workpieces, circle, prismatic, sphere, cylindrical and sculptures types. Modification Rule by Indexing Table and Modification Rule by NC Program are developed for machining centers by using touch trigger probes. The Modification Rule by Indexing Table meas the alignment of workpiece to NC program through degree of freedoms of indexing table. The Modification Rule by NC Program is the alognment of NC program to workpiece ste-tp condition via the generation of NC progarm. A postprocessing module is alos developed for generating NC-part program(User Macro) to compensate for machining errors in end milling and boring processes. Developed method are verified by experiments.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• 한국정밀공학회지
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• 제16권10호
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• pp.45-52
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• 1999

The online realtime positioning error compensation system 'SKY-PACS' is developed to correct geometric errors, thermal errors and tool deflection errors induced by cutting forces on the vertical machining center. 'SKY-PACS' communicates position commands and position compensation signals with the CNC controller at 100Hz, which is CNC control frequency. So the compensation procedure can be applied during axis movement. Using 'SKY-PACS', Maximum 1 axis positioning accuracy was corrected from 5{\mu}m$ to 2{\mu}m$and the squareness error of X-Y table was corrected from 51{\mu}m$/m to below 4{\mu}m$/m. The error compensation under the cutting condition is carried out by ISO10791-7. And the measurement of test-pieces shows that the roundness is corrected rom 8{\mu}m$ to below 5{\mu}m$.

• 한국정밀공학회지
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• 제26권6호
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.581-586
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• 2003

This paper presents control designs using neural networks (NN) for a XY positioning table. The proposed neurocontroller is composed of an outer PD tracking loop for stabilization of the fast flexible-mode dynamics and an NN inner loop used to compensate for the system nonlinearities. A tuning algorithm is given for the NN weights, so that the NN compensation scheme becomes adaptive, guaranteeing small tracking errors and bounded weight estimates. Formal nonlinear stability proofs are given to show that the tracking error is small. The proposed neuro-controller is implemented and tested on an IBM PC-based XY positioning table, and is applicable to many precision XY tables. The algorithm, simulation, and experimental results are described. The experimental results are shown to be superior to those of conventional control.

• 조명전기설비학회논문지
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• 제28권11호
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• pp.112-122
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• 2014

This paper proposes a PMSM torque control method considering DC-link voltage variation and friction torque. In general EV/HEV application, two dimensions look-up table(2D-LUT) is used for reference current generation due to its stable and robust torque control performance. Conventionally, this 2D-LUT is established by flux-torque table to overcome the DC-link voltage variation. However, the flux table establishment is more complex than the speed table establishment. Moreover, one flux data reflects several speed conditions in variable DC-link voltage, friction torque cannot be considered by using the flux table. In this paper, speed-torque 2D-LUT is used for current reference generation. With this table, PMSM torque control is well achieved regardless of DC-link voltage variation by the proposed control method. Simulation and experimental results validate improvement of torque control error through friction torque compensation.

• 전기전자학회논문지
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• 제16권3호
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• pp.189-196
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• 2012

본 논문에서는 FFT 영역을 이용한 새로운 RVDT 인코더의 위상 오차 보상 방법을 제시하였다. 최소 개수의 보상 저항의 조합으로 오차를 측정하고 FFT 변환 후 1차 하모닉 성분의 저항에 따른 계수의 변화를 구하였다. 또한 삽입 저항과 계수의 크기가 반비례 관계에 있음을 알아냈다. 이 방법은 기존의 시간 영역에서의 보상에 비해 테이블을 구하는데 드는 시간이 단축되고 테이블의 크기를 획기적으로 줄일 수 있었다. 또한 축변환을 통해 보상 저항의 위치도 정확히 찾을 수 있었으며 첨두간 위상 오차값을 0.57도 정도로 2배 가까이 개선하였다.