• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.603-604
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.41 no.2
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• pp.17-28
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• 2004

A deadzone compensator is designed for a XY positioning table using fuzzy logic. The classification property of fuzzy logic systems makes them a natural candidate for the rejection of errors induced by the deadzone, which has regions in which it behaves differently. A tuning algorithm is given for the fuzzy logic parameters, so that the deadzone compensation scheme becomes adaptive, guaranteeing small tracking errors and bounded parameter estimates. Formal nonlinear stability proofs are given to show that the tracking error is small. The fuzzy logic deadzone compensator is implemented on a XY positioning table to show its efficacy.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10a
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• pp.1096-1101
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• 1992

In order tominimize fixing error of workpieces, circle, prismatic, sphere, cylindrical and sculptures types. Modification Rule by Indexing Table and Modification Rule by NC Program are developed for machining centers by using touch trigger probes. The Modification Rule by Indexing Table meas the alignment of workpiece to NC program through degree of freedoms of indexing table. The Modification Rule by NC Program is the alognment of NC program to workpiece ste-tp condition via the generation of NC progarm. A postprocessing module is alos developed for generating NC-part program(User Macro) to compensate for machining errors in end milling and boring processes. Developed method are verified by experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.10
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• pp.45-52
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• 1999

The online realtime positioning error compensation system 'SKY-PACS' is developed to correct geometric errors, thermal errors and tool deflection errors induced by cutting forces on the vertical machining center. 'SKY-PACS' communicates position commands and position compensation signals with the CNC controller at 100Hz, which is CNC control frequency. So the compensation procedure can be applied during axis movement. Using 'SKY-PACS', Maximum 1 axis positioning accuracy was corrected from 5{\mu}m$ to 2{\mu}m$and the squareness error of X-Y table was corrected from 51{\mu}m$/m to below 4{\mu}m$/m. The error compensation under the cutting condition is carried out by ISO10791-7. And the measurement of test-pieces shows that the roundness is corrected rom 8{\mu}m$ to below 5{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.581-586
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• 2003

This paper presents control designs using neural networks (NN) for a XY positioning table. The proposed neurocontroller is composed of an outer PD tracking loop for stabilization of the fast flexible-mode dynamics and an NN inner loop used to compensate for the system nonlinearities. A tuning algorithm is given for the NN weights, so that the NN compensation scheme becomes adaptive, guaranteeing small tracking errors and bounded weight estimates. Formal nonlinear stability proofs are given to show that the tracking error is small. The proposed neuro-controller is implemented and tested on an IBM PC-based XY positioning table, and is applicable to many precision XY tables. The algorithm, simulation, and experimental results are described. The experimental results are shown to be superior to those of conventional control.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.11
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• pp.112-122
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• 2014

This paper proposes a PMSM torque control method considering DC-link voltage variation and friction torque. In general EV/HEV application, two dimensions look-up table(2D-LUT) is used for reference current generation due to its stable and robust torque control performance. Conventionally, this 2D-LUT is established by flux-torque table to overcome the DC-link voltage variation. However, the flux table establishment is more complex than the speed table establishment. Moreover, one flux data reflects several speed conditions in variable DC-link voltage, friction torque cannot be considered by using the flux table. In this paper, speed-torque 2D-LUT is used for current reference generation. With this table, PMSM torque control is well achieved regardless of DC-link voltage variation by the proposed control method. Simulation and experimental results validate improvement of torque control error through friction torque compensation.

• Journal of IKEEE
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• v.16 no.3
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• pp.189-196
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• 2012

This paper proposes new phase error compensation method of RVDT encoder in the FFT domain. Phase errors are measured with a small combination of compensation resistors and the changes of first order coefficients of FFT for each resistor are obtained. It is found that the coefficient change is inversely proportional to the inserted resistor. The proposed method takes less time and the size of the table is smaller than previous time domain approaches. In addition, the location of the compensation resistor can be found through axis transformation of the coefficients. Finally, the peak-to-peak phase error was improved to 0.57 which is two times better than previous one.