• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.2
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• pp.252-261
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• 2014

A Bayesian network (BN) based fault diagnosis framework for semiconductor etching equipment is presented. Suggested framework contains data preprocessing, data synchronization, time series modeling, and BN inference, and the established BNs show the cause and effect relationship in the equipment module level. Statistically significant state variable identification (SVID) data of etch equipment are preselected using principal component analysis (PCA) and derivative dynamic time warping (DDTW) is employed for data synchronization. Elman's recurrent neural networks (ERNNs) for individual SVID parameters are constructed, and the predicted errors of ERNNs are then used for assigning prior conditional probability in BN inference of the fault diagnosis. For the demonstration of the proposed methodology, 300 mm etch equipment model is reconstructed in subsystem levels, and several fault diagnosis scenarios are considered. BNs for the equipment fault diagnosis consists of three layers of nodes, such as root cause (RC), module (M), and data parameter (DP), and the constructed BN illustrates how the observed fault is related with possible root causes. Four out of five different types of fault scenarios are successfully diagnosed with the proposed inference methodology.

• Journal of Information Processing Systems
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• v.18 no.6
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• pp.822-829
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• 2022

According to existing study into the remote fault diagnosis procedure, the current diagnostic approach has an imperfect decision model, which only supports communication in a close distance. An Internet of Things (IoT)-based remote fault diagnostic approach for wind power equipment is created to address this issue and expand the communication distance of fault diagnosis. Specifically, a decision model for active power coordination is built with the mechanical energy storage of power generation equipment with a remote diagnosis mode set by decision tree algorithms. These models help calculate the failure frequency of bearings in power generation equipment, summarize the characteristics of failure types and detect the operation status of wind power equipment through IoT. In addition, they can also generate the point inspection data and evaluate the equipment status. The findings demonstrate that the average communication distances of the designed remote diagnosis method and the other two remote diagnosis methods are 587.46 m, 435.61 m, and 454.32 m, respectively, indicating its application value.

• KEPCO Journal on Electric Power and Energy
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• v.4 no.2
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• pp.89-99
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• 2018

Downtime and malfunction of industrial rotor machines represents a crucial cost burden and productivity loss. Fault diagnosis of this equipment has recently been carried out to detect their fault(s) and cause(s) by using fault classification methods. However, these methods are of limited use in detecting rotor faults because of their hypersensitivity to unexpected and different equipment conditions individually. These limitations tend to affect the accuracy of fault classification since fault-related features calculated from vibration signal are moved to other regions or changed. To improve the limited diagnosis accuracy of existing methods, we propose a new approach for fault diagnosis of rotor machines based on the model generated by supervised learning. Our work is based on feature residual values from vibration signals as fault indices. Our diagnostic model is a robust and flexible process that, once learned from historical data only one time, allows it to apply to different target systems without optimization of algorithms. The performance of the proposed method was evaluated by comparing its results with conventional methods for fault diagnosis of rotor machines. The experimental results show that the proposed method can be used to achieve better fault diagnosis, even when applied to systems with different normal-state signals, scales, and structures, without tuning or the use of a complementary algorithm. The effectiveness of the method was assessed by simulation using various rotor machine models.

• Journal of Korea Multimedia Society
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• v.25 no.11
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• pp.1547-1556
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• 2022

As mechanical facilities are interacting with each other, the failure of some equipment can affect the entire system, so it is necessary to quickly detect and diagnose the abnormality of mechanical equipment. This study proposes a deep learning model that can effectively diagnose abnormalities in rotating machinery and equipment. CNN is widely used for feature extraction and LSTMs are known to be effective in learning sequential information. In LSTM, the number of parameters and learning time increase as the length of input data increases. In this study, we propose a method of segmenting an input segment signal into shorter-length sub-segment signals, sequentially inputting them to CNN through a time-distributed method for extracting features, and inputting them into LSTM. A failure diagnosis test was performed using the vibration data collected from the motor for ventilation equipment installed at the urban railway station. The experiment showed an accuracy of 99.784% in fault diagnosis. It shows that the proposed method is effective in the fault diagnosis of rotating machinery and equipment.

• KNOM Review
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• v.24 no.1
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• pp.13-19
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• 2021

In recent, there is research to maximize production by preventing failures/accidents in advance through fault diagnosis/prediction and factory automation in the industrial field. Cloud technology for accumulating a large amount of data, big data technology for data processing, and Artificial Intelligence(AI) technology for easy data analysis are promising candidate technologies for accomplishing this. Also, recently, due to the development of fault diagnosis/prediction, the equipment maintenance method is also developing from Time Based Maintenance(TBM), being a method of regularly maintaining equipment, to the TBM of combining Condition Based Maintenance(CBM), being a method of maintenance according to the condition of the equipment. For CBM-based maintenance, it is necessary to define and analyze the condition of the facility. Therefore, we propose a machine learning-based system and data model for diagnosing the fault in this paper. And based on this, we will present a case of predicting the fault occurrence in advance.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.830-839
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• 2017

Support vector machine (SVM) is introduced as an effective fault diagnosis technique based on dissolved gases analysis (DGA) for oil-immersed transformers with maximum generalization ability; however, the applicability of the SVM is highly affected due to the difficulty of selecting the SVM parameters appropriately. Therefore, a novel approach combing SVM with improved imperialist competitive algorithm (IICA) for fault diagnosis of oil-immersed transformers was proposed in the paper. The improved ICA, which is proved to be an effective optimization approach, is employed to optimize the parameters of SVM. Cross validation and normalizations were applied in the training processes of SVM and the trained SVM model with the optimized parameters was established for fault diagnosis of oil-immersed transformers. Three classification benchmark sets were studied based on particle swarm optimization SVM (PSOSVM) and IICASVM with four multiple classification schemes to select the best scheme for transformer fault diagnosis. The results show that the proposed model can obtain higher diagnosis accuracy than other methods. The comparisons confirm that the proposed model is an effective approach for classification problems.

• Nuclear Engineering and Technology
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• v.55 no.6
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• pp.2096-2106
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• 2023

Rotating machinery is widely applied in important equipment of nuclear power plants (NPPs), such as pumps and valves. The research on intelligent fault diagnosis of rotating machinery is crucial to ensure the safe operation of related equipment in NPPs. However, in practical applications, data-driven fault diagnosis faces the problem of small and imbalanced samples, resulting in low model training efficiency and poor generalization performance. Therefore, a deep convolutional conditional generative adversarial network (DCCGAN) is constructed to mitigate the impact of imbalanced samples on fault diagnosis. First, a conditional generative adversarial model is designed based on convolutional neural networks to effectively augment imbalanced samples. The original sample features can be effectively extracted by the model based on conditional generative adversarial strategy and appropriate number of filters. In addition, high-quality generated samples are ensured through the visualization of model training process and samples features. Then, a deep convolutional neural network (DCNN) is designed to extract features of mixed samples and implement intelligent fault diagnosis. Finally, based on multi-fault experimental data of motor and bearing, the performance of DCCGAN model for data augmentation and intelligent fault diagnosis is verified. The proposed method effectively alleviates the problem of imbalanced samples, and shows its application value in intelligent fault diagnosis of actual NPPs.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.279-284
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• 2005

Knowledge based fault diagnosis has a limitation in determining the cause and scheme for the fault, because it detects faults from signal pattern only Therefore, model-based fault diagnosis is requested to determine the fault by analyzing output of the equipment from its dynamic model. This research shows a method how to devise the automaton of system as a model for normal and faulty condition through the reduction of handling data by quantization of vibration signals and the example which is concerning to the bearing of ATM. The developed model based fault diagnosis was applied to detect the faulty bearing of ATM, which results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1319-1322
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• 2004

In this paper, a fault diagnosis system for ram in PHWR plant is developed. The developed diagnosis system can detect the ram stuck phenomena due to increased ball wear and damage in ball nut using discrete wavelet transform before the ram is stuck. The validity of developed diagnosis system is shown via experiments using ball nut characteristic test equipment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.2
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• pp.153-158
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• 2005

Recently, as the feasibility study shows that trans-Korea railway and trans-continental railway are advantageous, interest in high-speed railway system is increasing. Because railway vehicle is environment-friendly and safe compared with airplane and ship, its market-sharing increases gradually. KHST(Korean High Speed Train) has been developed by KRRI (Korea Railroad Research Institute) for last 6 years to satisfy the need. An electric railway system is composed of high-tech subsystems, among which main electric equipment such as transformers and converter are critical components determining the performance of rolling stock. We developed a measurement system for on-line test and evaluation of performances of KHST. The measurement system is composed of software part and hardware part. Perfect interface between multi-users is possible. A now method to measure temperature was applied to the measurement system. By using the system, fault diagnosis and performance evaluation of electric equipment in Korean High Speed Train was conducted during test running.